JPS61111588U - - Google Patents

Info

Publication number
JPS61111588U
JPS61111588U JP20178084U JP20178084U JPS61111588U JP S61111588 U JPS61111588 U JP S61111588U JP 20178084 U JP20178084 U JP 20178084U JP 20178084 U JP20178084 U JP 20178084U JP S61111588 U JPS61111588 U JP S61111588U
Authority
JP
Japan
Prior art keywords
nozzle
coupling part
air
opening
supply pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20178084U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20178084U priority Critical patent/JPS61111588U/ja
Publication of JPS61111588U publication Critical patent/JPS61111588U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP20178084U 1984-12-24 1984-12-24 Pending JPS61111588U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20178084U JPS61111588U (enrdf_load_stackoverflow) 1984-12-24 1984-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20178084U JPS61111588U (enrdf_load_stackoverflow) 1984-12-24 1984-12-24

Publications (1)

Publication Number Publication Date
JPS61111588U true JPS61111588U (enrdf_load_stackoverflow) 1986-07-15

Family

ID=30763887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20178084U Pending JPS61111588U (enrdf_load_stackoverflow) 1984-12-24 1984-12-24

Country Status (1)

Country Link
JP (1) JPS61111588U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720947U (enrdf_load_stackoverflow) * 1971-04-08 1972-11-09
JPS5910583B2 (ja) * 1978-05-29 1984-03-09 沖電気工業株式会社 半導体装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720947U (enrdf_load_stackoverflow) * 1971-04-08 1972-11-09
JPS5910583B2 (ja) * 1978-05-29 1984-03-09 沖電気工業株式会社 半導体装置の製造方法

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