JPS61111151U - - Google Patents
Info
- Publication number
- JPS61111151U JPS61111151U JP20067184U JP20067184U JPS61111151U JP S61111151 U JPS61111151 U JP S61111151U JP 20067184 U JP20067184 U JP 20067184U JP 20067184 U JP20067184 U JP 20067184U JP S61111151 U JPS61111151 U JP S61111151U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- solvent
- nozzle
- onto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20067184U JPS61111151U (he) | 1984-12-25 | 1984-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20067184U JPS61111151U (he) | 1984-12-25 | 1984-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61111151U true JPS61111151U (he) | 1986-07-14 |
Family
ID=30761739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20067184U Pending JPS61111151U (he) | 1984-12-25 | 1984-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61111151U (he) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5555206A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Electronics Eng Co Ltd | Inspection data processing system for defect on face plate |
-
1984
- 1984-12-25 JP JP20067184U patent/JPS61111151U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5555206A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Electronics Eng Co Ltd | Inspection data processing system for defect on face plate |
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