JPS61110623U - - Google Patents
Info
- Publication number
- JPS61110623U JPS61110623U JP19953584U JP19953584U JPS61110623U JP S61110623 U JPS61110623 U JP S61110623U JP 19953584 U JP19953584 U JP 19953584U JP 19953584 U JP19953584 U JP 19953584U JP S61110623 U JPS61110623 U JP S61110623U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- inside guide
- guide
- longitudinal direction
- wafer moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008602 contraction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Reciprocating Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199535U JPH032496Y2 (https=) | 1984-12-26 | 1984-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984199535U JPH032496Y2 (https=) | 1984-12-26 | 1984-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61110623U true JPS61110623U (https=) | 1986-07-12 |
| JPH032496Y2 JPH032496Y2 (https=) | 1991-01-23 |
Family
ID=30759548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984199535U Expired JPH032496Y2 (https=) | 1984-12-26 | 1984-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032496Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144009A (ja) * | 1982-02-18 | 1983-08-27 | Aisaku Tekko Kk | 往復搬送装置 |
-
1984
- 1984-12-26 JP JP1984199535U patent/JPH032496Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144009A (ja) * | 1982-02-18 | 1983-08-27 | Aisaku Tekko Kk | 往復搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH032496Y2 (https=) | 1991-01-23 |