JPS61110135U - - Google Patents

Info

Publication number
JPS61110135U
JPS61110135U JP19528784U JP19528784U JPS61110135U JP S61110135 U JPS61110135 U JP S61110135U JP 19528784 U JP19528784 U JP 19528784U JP 19528784 U JP19528784 U JP 19528784U JP S61110135 U JPS61110135 U JP S61110135U
Authority
JP
Japan
Prior art keywords
temperature measurement
conductor wire
thermocouple
thermocouple conductor
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19528784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19528784U priority Critical patent/JPS61110135U/ja
Publication of JPS61110135U publication Critical patent/JPS61110135U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP19528784U 1984-12-25 1984-12-25 Pending JPS61110135U (hu)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19528784U JPS61110135U (hu) 1984-12-25 1984-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19528784U JPS61110135U (hu) 1984-12-25 1984-12-25

Publications (1)

Publication Number Publication Date
JPS61110135U true JPS61110135U (hu) 1986-07-12

Family

ID=30752800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19528784U Pending JPS61110135U (hu) 1984-12-25 1984-12-25

Country Status (1)

Country Link
JP (1) JPS61110135U (hu)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11815407B2 (en) 2019-09-03 2023-11-14 Tokyo Electron Limited Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11815407B2 (en) 2019-09-03 2023-11-14 Tokyo Electron Limited Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure

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