JPS6110960B2 - - Google Patents
Info
- Publication number
- JPS6110960B2 JPS6110960B2 JP52070793A JP7079377A JPS6110960B2 JP S6110960 B2 JPS6110960 B2 JP S6110960B2 JP 52070793 A JP52070793 A JP 52070793A JP 7079377 A JP7079377 A JP 7079377A JP S6110960 B2 JPS6110960 B2 JP S6110960B2
- Authority
- JP
- Japan
- Prior art keywords
- arc
- current
- power supply
- switch
- constant current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000087 stabilizing effect Effects 0.000 claims description 4
- 230000001052 transient effect Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Particle Accelerators (AREA)
- Discharge Heating (AREA)
Description
【発明の詳細な説明】 この発明は、アーク安定化電源装置に関する。[Detailed description of the invention] The present invention relates to an arc stabilized power supply device.
イオン加速器等に用いられるプラズマを得るの
にアークが利用されていることは周知であり、こ
のアークを安定にさせるものとしてアーク安定化
電源装置（以下電源装置という）がある。 It is well known that an arc is used to obtain plasma used in ion accelerators and the like, and an arc stabilizing power supply device (hereinafter referred to as a power supply device) is used to stabilize this arc.
第１図は従来の電源装置の１例を示すもので、
アーク負荷としてプラズマを発生させるイオン源
装置が接続されている。１は直流定電流化電源
で、１ａはその出力回路である。２はシヤント抵
抗、３は電流検出回路、４は定電流制御回路で、
これらにより直流定電流化電源１の出力電流は一
定に保持される。５は出力回路１ａに直列に挿入
された直流スイツチで、このスイツチのON、
OFFによつて出力回路１ａの電流の通電、しや
断が行なわれる。６，７はアーク負荷１０が接続
される端子である。図示する例では、アーク負荷
１０はイオン源装置であつて、１１は真空容器、
１２はアーク電極、１３はフイラメント、１４は
磁場コイル、１５は加速電極、１６は減速電極で
ある。アーク電極１２とフイラメント１３とは互
いに近接して設けられてあり、前者は端子６に、
後者は端子７にそれぞれ接続されている。また。
１７はフイラメント用電源、１８はガスの導入パ
イプである。 Figure 1 shows an example of a conventional power supply device.
An ion source device that generates plasma as an arc load is connected. 1 is a DC constant current power supply, and 1a is its output circuit. 2 is a shunt resistor, 3 is a current detection circuit, 4 is a constant current control circuit,
Due to these, the output current of the DC constant current power source 1 is held constant. 5 is a DC switch inserted in series with the output circuit 1a, and when this switch is turned ON,
By turning OFF, the current in the output circuit 1a is turned on and off. 6 and 7 are terminals to which the arc load 10 is connected. In the illustrated example, the arc load 10 is an ion source device, 11 is a vacuum vessel,
12 is an arc electrode, 13 is a filament, 14 is a magnetic field coil, 15 is an acceleration electrode, and 16 is a deceleration electrode. The arc electrode 12 and the filament 13 are provided close to each other, and the former is connected to the terminal 6,
The latter are respectively connected to terminals 7. Also.
17 is a power source for the filament, and 18 is a gas introduction pipe.
このように構成されたものにおいて、容器１１
内にガスを導き入れてフイラメント１３に電流を
流してガスを加熱させる。そして直流スイツチ５
をONにして例えば、350V、600A程度の電流を短
かい時間（例えば、100ms）出力回路１ａに流れ
るようにすると、アーク電極１２とフイラメント
１３との間にアーク電流が流れる。このときのア
ーク熱によつてフイラメント１３の近傍は正イオ
ンと電子とが共存する所謂プラズマ状態となる。
そして、このイオンを高電界中に導入して加速を
するが、ビームの集束性を良好ならしめるために
はアーク電流の速い立ち上り、およびアーク電流
の安定であることが要求される。従つて、この種
電源装置には出力電流を定電流化することおよび
通電、しや断時における直流スイツチの速い動作
が要求される。 In the structure configured in this way, the container 11
Gas is introduced into the filament 13 and current is passed through the filament 13 to heat the gas. and DC switch 5
When the output circuit 1a is turned on and a current of, for example, 350 V and 600 A is caused to flow through the output circuit 1a for a short time (for example, 100 ms), an arc current flows between the arc electrode 12 and the filament 13. Due to the arc heat at this time, the vicinity of the filament 13 enters a so-called plasma state in which positive ions and electrons coexist.
These ions are introduced into a high electric field and accelerated, but in order to achieve good beam focusing, the arc current needs to rise quickly and be stable. Therefore, this type of power supply device is required to have a constant output current and to operate a DC switch quickly when energizing or disconnecting the power.
ところが、従来のこの種電源装置においては、
直流スイツチ５がONされて始めて出力回路１ａ
に電流が流れることおよび出力回路１ａに固有の
インダクタンスにより出力電流の立上りが遅くな
り、所望の定電流に素早く到達することができな
い。更に、またアークは一般に負性抵抗を有して
いるが、従来の定電流制御回路４等の制御系では
アーク抵抗の瞬間的な変動に対して迅速に対応し
て定電流制御をすることが困難であつた。このよ
うに従来の電源装置にあつては、速応性に欠け、
アークの負性抵抗によるアーク電流の不安定さを
十分に補償し切れないという問題点があつた。 However, in this type of conventional power supply device,
Output circuit 1a is activated only after DC switch 5 is turned on.
The rise of the output current is delayed due to the current flowing through the output circuit 1a and the inductance inherent in the output circuit 1a, making it impossible to quickly reach the desired constant current. Furthermore, although arcs generally have negative resistance, conventional control systems such as the constant current control circuit 4 cannot quickly respond to instantaneous fluctuations in arc resistance and perform constant current control. It was difficult. In this way, conventional power supplies lack quick response and
There was a problem in that the instability of the arc current due to the negative resistance of the arc could not be sufficiently compensated for.
この発明は、上述の事柄に留意して提案された
もので、直流定電流化電源とアーク負荷との間に
インダクタンスを接続し、かつ前記アーク負荷と
並列に側路スイツチを設けることにより、応答性
の速くしかも電流制御特性の優れた電源装置を提
供することを目的とする。以下図に示す１実施例
に基いてこの発明を説明する。 This invention was proposed with the above-mentioned considerations in mind, and provides a response by connecting an inductance between a DC constant current power supply and an arc load, and providing a bypass switch in parallel with the arc load. The object of the present invention is to provide a power supply device that is fast in operation and has excellent current control characteristics. The present invention will be explained below based on one embodiment shown in the drawings.
第２図は、この発明による電源装置の１例を示
す回路図で、図において第１図と同一符号のもの
は同一物を示している。２１は直流定電流化電源
１とアーク負荷１０が接続される端子６，７との
間に設けられた前記直流定電流化電源の過渡特性
を援助するインダクタンスである。２２は端子
６，７間をバイパスするようにこれと並列に接続
された側路スイツチである。この側路スイツチ２
２は例えば、SCRやゲートターンオフ（gate−
turn−off）素子などの急速動作をするスイツチ
素子で構成され、この閉開によつてアーク負荷へ
の供給電流の立上げを急速に行なう。第３図はこ
の側路スイツチ２２をSCRで構成したときのチ
ヨツパー回路の１例を示すものである。図におい
て、２３はSCRなどのスイツチ素子、２４はコ
イル、２５はコンデンサ、２６は整流回路、２７
は交流電源である。 FIG. 2 is a circuit diagram showing an example of a power supply device according to the present invention, and in the figure, the same reference numerals as in FIG. 1 indicate the same components. Reference numeral 21 denotes an inductance that is provided between the DC constant current power source 1 and the terminals 6 and 7 to which the arc load 10 is connected, and assists in the transient characteristics of the DC constant current power source. 22 is a side switch connected in parallel with the terminals 6 and 7 so as to bypass the terminals 6 and 7. This side path switch 2
2 is, for example, SCR or gate turn-off (gate-
It consists of a switch element that operates rapidly, such as a turn-off (turn-off) element, and by opening and closing the switch element, the supply current to the arc load is rapidly increased. FIG. 3 shows an example of a chopper circuit when the bypass switch 22 is constructed of an SCR. In the figure, 23 is a switch element such as an SCR, 24 is a coil, 25 is a capacitor, 26 is a rectifier circuit, and 27
is an AC power source.
次に以上のように構成された電源装置によりア
ーク電流をパルス状通電するときの動作について
説明する。側路スイツチ２２をONすると、直流
定電流化電源１の出力電流はこの側路スイツチ２
２を介して流れるので、端子６，７間には電流は
流れない。次に側路スイツチ２２をOFFにする
と、今まで側路スイツチ２２を経由して流れてい
た出力電流の時間的変化により瞬時高電圧を生ず
る。この結果、アーク電極１２とフイラメント１
３間とがブレークダウンしてアークが発生し、ア
ーク電流が流れる。このアーク電流値は、側路ス
イツチ２２のON、OFF切換えにより過渡的に変
化するが、この瞬間的な電流変化はインダクタン
ス２１により定電流となるように補償され、側路
スイツチ２２のOFF直前にインダクタンス２１
を流れていた電流値にまで直ちに到達する。従つ
て、電流の立上り特性は大いに改善される。ま
た、定電流制御回路４の如き制御系が追従し得な
い瞬間的なアーク抵抗の変化に対してはインダク
タンス２１が出力電流が一定となるように抵抗変
化分を補償する。 Next, a description will be given of the operation when the power supply device configured as described above applies arc current in a pulsed manner. When the bypass switch 22 is turned on, the output current of the DC constant current power supply 1 is changed to the output current of the DC constant current power supply 1.
2, so no current flows between terminals 6 and 7. Next, when the bypass switch 22 is turned OFF, an instantaneous high voltage is generated due to the temporal change in the output current that has been flowing through the bypass switch 22 until now. As a result, arc electrode 12 and filament 1
3 breaks down, an arc occurs, and an arc current flows. This arc current value changes transiently when the bypass switch 22 is turned ON and OFF, but this instantaneous current change is compensated by the inductance 21 to become a constant current, and just before the bypass switch 22 is turned OFF, the arc current value changes transiently. inductance 21
The current value that was flowing through the current is immediately reached. Therefore, the current rise characteristics are greatly improved. Furthermore, for instantaneous arc resistance changes that cannot be followed by a control system such as the constant current control circuit 4, the inductance 21 compensates for the resistance changes so that the output current remains constant.
以上のように、この発明によれば、直流定電流
化電源の出力回路にアーク負荷と並列に側路スイ
ツチを設けたので、アークを発生させないとき
は、この側路スイツチをONして出力電流をバイ
パスさせることができる。そして、アークを発生
させるときは前記側路スイツチをOFFして前記
出力電流が端子間を流れるように切換えるように
したから、所定の電流値に素早く到達させ得ると
共に、アークをOFFする時及び加速電極等のブ
レークダウン時には側路スイツチを再びONする
ことによりアーク電流をカツトオフできるので極
めて応答性の早い電源装置が得られる。また瞬間
的なアーク抵抗の変化の如き過渡的変化に対して
は、インダクタンスにより定電流となるように制
御されるので、電流の制御特性の優れた電源装置
が得られる。 As described above, according to the present invention, a shunt switch is provided in the output circuit of the DC constant current power supply in parallel with the arc load, so when an arc is not generated, the shunt switch is turned on to control the output current. can be bypassed. When an arc is generated, the bypass switch is turned OFF and the output current is switched so that it flows between the terminals, so that a predetermined current value can be quickly reached, and when the arc is turned OFF and acceleration When an electrode breaks down, the arc current can be cut off by turning on the bypass switch again, resulting in a power supply device with extremely quick response. In addition, since the inductance controls the current to be constant in response to transient changes such as instantaneous changes in arc resistance, a power supply device with excellent current control characteristics can be obtained.
第１図は、従来のアーク安定化電源装置にアー
ク負荷を接続した回路図、第２図はこの発明によ
るアーク安定化電源装置の回路図、第３図は側路
スイツチのチヨツパー回路図である。
１……直流定電流化電源、１０……アーク負
荷、２１……インダクタンス、２２……側路スイ
ツチ。
Fig. 1 is a circuit diagram of a conventional arc stabilizing power supply device with an arc load connected to it, Fig. 2 is a circuit diagram of an arc stabilizing power supply device according to the present invention, and Fig. 3 is a chopper circuit diagram of a bypass switch. . 1... DC constant current power supply, 10... Arc load, 21... Inductance, 22... Side switch.
Claims (1)
らの供給電流によつてアークが形成されるアーク
負荷との間に前記直流定電流化電源の過渡特性を
援助するリアクトルを直列に接続し、かつ前記リ
アクトルよりも前記アーク負荷側で前記アーク負
荷と並列に急速動作をする側路スイツチを設け、
前記直流定電流化電源からの供給電流を前記側路
スイツチの閉開により前記アーク負荷に供給して
成ることを特徴とするアーク安定化電源装置。 ２ 側路スイツチがSCRである特許請求の範囲
第１項記載のアーク安定化電源装置。 ３ 側路スイツチがゲートターンオフスイツチ素
子である特許請求の範囲第１項記載のアーク安定
化電源装置。[Scope of Claims] 1. A reactor that assists the transient characteristics of the DC constant current power source between the DC constant current power source and an arc load in which an arc is formed by the supplied current from the DC constant current power source. are connected in series, and a shunt switch that operates rapidly in parallel with the arc load is provided on the arc load side of the reactor,
An arc stabilizing power supply device characterized in that a supply current from the DC constant current power source is supplied to the arc load by closing and opening the bypass switch. 2. The arc stabilized power supply device according to claim 1, wherein the bypass switch is an SCR. 3. The arc stabilized power supply device of claim 1, wherein the bypass switch is a gate turn-off switch element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7079377A JPS545198A (en) | 1977-06-14 | 1977-06-14 | Arc stabilizing source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7079377A JPS545198A (en) | 1977-06-14 | 1977-06-14 | Arc stabilizing source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS545198A JPS545198A (en) | 1979-01-16 |
| JPS6110960B2 true JPS6110960B2 (en) | 1986-04-01 |
Family
ID=13441763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7079377A Granted JPS545198A (en) | 1977-06-14 | 1977-06-14 | Arc stabilizing source device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS545198A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS584300A (en) * | 1981-06-30 | 1983-01-11 | 株式会社東芝 | Acceleration power source |
| JPS59127530A (en) * | 1983-01-08 | 1984-07-23 | 株式会社東芝 | High voltage dc power source |
| JP5623115B2 (en) * | 2010-04-09 | 2014-11-12 | キヤノン株式会社 | Plasma discharge power supply device and plasma discharge treatment method |
-
1977
- 1977-06-14 JP JP7079377A patent/JPS545198A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS545198A (en) | 1979-01-16 |
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