JPS61109135U - - Google Patents
Info
- Publication number
- JPS61109135U JPS61109135U JP19492884U JP19492884U JPS61109135U JP S61109135 U JPS61109135 U JP S61109135U JP 19492884 U JP19492884 U JP 19492884U JP 19492884 U JP19492884 U JP 19492884U JP S61109135 U JPS61109135 U JP S61109135U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- outer periphery
- rotating body
- rotates
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
Landscapes
- Warehouses Or Storage Devices (AREA)
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19492884U JPS61109135U (sv) | 1984-12-21 | 1984-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19492884U JPS61109135U (sv) | 1984-12-21 | 1984-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61109135U true JPS61109135U (sv) | 1986-07-10 |
Family
ID=30752408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19492884U Pending JPS61109135U (sv) | 1984-12-21 | 1984-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61109135U (sv) |
-
1984
- 1984-12-21 JP JP19492884U patent/JPS61109135U/ja active Pending