JPS61109133U - - Google Patents

Info

Publication number
JPS61109133U
JPS61109133U JP19377984U JP19377984U JPS61109133U JP S61109133 U JPS61109133 U JP S61109133U JP 19377984 U JP19377984 U JP 19377984U JP 19377984 U JP19377984 U JP 19377984U JP S61109133 U JPS61109133 U JP S61109133U
Authority
JP
Japan
Prior art keywords
dummy wafer
wafer
view
barcodes
concentric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19377984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19377984U priority Critical patent/JPS61109133U/ja
Publication of JPS61109133U publication Critical patent/JPS61109133U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP19377984U 1984-12-20 1984-12-20 Pending JPS61109133U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19377984U JPS61109133U (enrdf_load_html_response) 1984-12-20 1984-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19377984U JPS61109133U (enrdf_load_html_response) 1984-12-20 1984-12-20

Publications (1)

Publication Number Publication Date
JPS61109133U true JPS61109133U (enrdf_load_html_response) 1986-07-10

Family

ID=30751208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19377984U Pending JPS61109133U (enrdf_load_html_response) 1984-12-20 1984-12-20

Country Status (1)

Country Link
JP (1) JPS61109133U (enrdf_load_html_response)

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