JPS61107485U - - Google Patents

Info

Publication number
JPS61107485U
JPS61107485U JP1984188750U JP18875084U JPS61107485U JP S61107485 U JPS61107485 U JP S61107485U JP 1984188750 U JP1984188750 U JP 1984188750U JP 18875084 U JP18875084 U JP 18875084U JP S61107485 U JPS61107485 U JP S61107485U
Authority
JP
Japan
Prior art keywords
optical path
shutters
tables
light receiving
receiving section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984188750U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984188750U priority Critical patent/JPS61107485U/ja
Publication of JPS61107485U publication Critical patent/JPS61107485U/ja
Pending legal-status Critical Current

Links

JP1984188750U 1984-12-14 1984-12-14 Pending JPS61107485U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984188750U JPS61107485U (enrdf_load_stackoverflow) 1984-12-14 1984-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984188750U JPS61107485U (enrdf_load_stackoverflow) 1984-12-14 1984-12-14

Publications (1)

Publication Number Publication Date
JPS61107485U true JPS61107485U (enrdf_load_stackoverflow) 1986-07-08

Family

ID=30746214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984188750U Pending JPS61107485U (enrdf_load_stackoverflow) 1984-12-14 1984-12-14

Country Status (1)

Country Link
JP (1) JPS61107485U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010142891A (ja) * 2008-12-17 2010-07-01 Linkstar Japan Co Ltd 基板テーブルおよびそれを用いたレーザ加工装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010142891A (ja) * 2008-12-17 2010-07-01 Linkstar Japan Co Ltd 基板テーブルおよびそれを用いたレーザ加工装置

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