JPS61106337U - - Google Patents

Info

Publication number
JPS61106337U
JPS61106337U JP19146384U JP19146384U JPS61106337U JP S61106337 U JPS61106337 U JP S61106337U JP 19146384 U JP19146384 U JP 19146384U JP 19146384 U JP19146384 U JP 19146384U JP S61106337 U JPS61106337 U JP S61106337U
Authority
JP
Japan
Prior art keywords
counter electrode
moving
axial direction
electrode
moving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19146384U
Other languages
English (en)
Other versions
JPS6310816Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19146384U priority Critical patent/JPS6310816Y2/ja
Publication of JPS61106337U publication Critical patent/JPS61106337U/ja
Application granted granted Critical
Publication of JPS6310816Y2 publication Critical patent/JPS6310816Y2/ja
Expired legal-status Critical Current

Links

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  • Physical Or Chemical Processes And Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例であるプラズマ処理
装置を示す断面図、第２図は第１図をＡＡから見
た平断面図、第３図は従来例であるプラズマ処理
装置を示す断面図である。 １２……電極、２０……対向電極、３０……電
極上下装置、４０……軸受装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. サセプタ側の電極に対向する対向電極に、該対
    向電極を該電極に対して軸方向に移動させる移動
    手段と、該対向電極を前記軸方向に案内すると共
    に該対向電極を前記軸方向に対して直角方向に調
    整可能に動かせる軸受手段とを設けたことを特徴
    とするプラズマ処理装置。
JP19146384U 1984-12-19 1984-12-19 Expired JPS6310816Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19146384U JPS6310816Y2 (ja) 1984-12-19 1984-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19146384U JPS6310816Y2 (ja) 1984-12-19 1984-12-19

Publications (2)

Publication Number Publication Date
JPS61106337U true JPS61106337U (ja) 1986-07-05
JPS6310816Y2 JPS6310816Y2 (ja) 1988-03-31

Family

ID=30748902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19146384U Expired JPS6310816Y2 (ja) 1984-12-19 1984-12-19

Country Status (1)

Country Link
JP (1) JPS6310816Y2 (ja)

Also Published As

Publication number Publication date
JPS6310816Y2 (ja) 1988-03-31

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