JPS61105807U - - Google Patents
Info
- Publication number
- JPS61105807U JPS61105807U JP19173184U JP19173184U JPS61105807U JP S61105807 U JPS61105807 U JP S61105807U JP 19173184 U JP19173184 U JP 19173184U JP 19173184 U JP19173184 U JP 19173184U JP S61105807 U JPS61105807 U JP S61105807U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- thickness meter
- ray
- ray detector
- collimator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 2
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173184U JPS61105807U (enExample) | 1984-12-18 | 1984-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19173184U JPS61105807U (enExample) | 1984-12-18 | 1984-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61105807U true JPS61105807U (enExample) | 1986-07-05 |
Family
ID=30749168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19173184U Pending JPS61105807U (enExample) | 1984-12-18 | 1984-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105807U (enExample) |
-
1984
- 1984-12-18 JP JP19173184U patent/JPS61105807U/ja active Pending
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