JPS61105529U - - Google Patents
Info
- Publication number
- JPS61105529U JPS61105529U JP18984584U JP18984584U JPS61105529U JP S61105529 U JPS61105529 U JP S61105529U JP 18984584 U JP18984584 U JP 18984584U JP 18984584 U JP18984584 U JP 18984584U JP S61105529 U JPS61105529 U JP S61105529U
- Authority
- JP
- Japan
- Prior art keywords
- polished
- electrolyte solution
- liquid passage
- ultrasonic oscillator
- recovery tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 238000011084 recovery Methods 0.000 claims description 3
- 239000008151 electrolyte solution Substances 0.000 claims 3
- 239000002131 composite material Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 1
Description
図面は本考案の一実施例の正面図である。
１……被研磨物、２……超音波発振ノズル、３
……超音波発振子、４……超音波発生装置、５…
…液体通路、６……電解電流発生装置、７・８…
…電極、９……回収槽、１０……循環ポンプ。
The drawing is a front view of one embodiment of the present invention. 1...Object to be polished, 2...Ultrasonic oscillation nozzle, 3
...Ultrasonic oscillator, 4...Ultrasonic generator, 5...
...Liquid passage, 6...Electrolytic current generator, 7/8...
...electrode, 9...recovery tank, 10...circulation pump.
Claims (1)
、被研磨物の表面に吹き付けられる電解質溶液を
流通させる液体通路を設け、前記超音波発振子と
被研磨物との間に、両者間に電位差を生ぜしめる
電解電流発生装置を設け、前記被研磨物および超
音波発振子の下方に、前記流体通路から被研磨物
に吹き付けられた電解質溶液を回収する回収槽を
設け、該回収槽に、前記液体通路へ電解質溶液を
送り込む循環ポンプを連設したことを特徴とする
超音波電解複合研磨装置。 A liquid passage is provided inside the ultrasonic oscillator made of a conductive material to flow an electrolyte solution to be sprayed onto the surface of the object to be polished, and a liquid passage is provided between the ultrasonic oscillator and the object to be polished. An electrolytic current generating device that generates a potential difference is provided, and a recovery tank is provided below the object to be polished and the ultrasonic oscillator for recovering the electrolyte solution sprayed onto the object to be polished from the fluid passage, and in the recovery tank, An ultrasonic electrolytic composite polishing apparatus characterized in that a circulation pump for feeding an electrolyte solution into the liquid passage is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18984584U JPS61105529U (en) | 1984-12-14 | 1984-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18984584U JPS61105529U (en) | 1984-12-14 | 1984-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61105529U true JPS61105529U (en) | 1986-07-04 |
Family
ID=30747294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18984584U Pending JPS61105529U (en) | 1984-12-14 | 1984-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105529U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234145A (en) * | 1988-03-15 | 1989-09-19 | Nagao Saito | Ultrasonic machining method |
-
1984
- 1984-12-14 JP JP18984584U patent/JPS61105529U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234145A (en) * | 1988-03-15 | 1989-09-19 | Nagao Saito | Ultrasonic machining method |
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