JPS61105324U - - Google Patents
Info
- Publication number
- JPS61105324U JPS61105324U JP19004884U JP19004884U JPS61105324U JP S61105324 U JPS61105324 U JP S61105324U JP 19004884 U JP19004884 U JP 19004884U JP 19004884 U JP19004884 U JP 19004884U JP S61105324 U JPS61105324 U JP S61105324U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- air passage
- air
- guide member
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19004884U JPS61105324U (cs) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19004884U JPS61105324U (cs) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61105324U true JPS61105324U (cs) | 1986-07-04 |
Family
ID=30747495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19004884U Pending JPS61105324U (cs) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61105324U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5375683A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Wafer transporting apparatus |
-
1984
- 1984-12-17 JP JP19004884U patent/JPS61105324U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5375683A (en) * | 1976-12-17 | 1978-07-05 | Hitachi Ltd | Wafer transporting apparatus |
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