JPS61104551U - - Google Patents
Info
- Publication number
- JPS61104551U JPS61104551U JP19020184U JP19020184U JPS61104551U JP S61104551 U JPS61104551 U JP S61104551U JP 19020184 U JP19020184 U JP 19020184U JP 19020184 U JP19020184 U JP 19020184U JP S61104551 U JPS61104551 U JP S61104551U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- axle
- wheels
- wafer holding
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19020184U JPS61104551U (fi) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19020184U JPS61104551U (fi) | 1984-12-17 | 1984-12-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61104551U true JPS61104551U (fi) | 1986-07-03 |
Family
ID=30747652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19020184U Pending JPS61104551U (fi) | 1984-12-17 | 1984-12-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61104551U (fi) |
-
1984
- 1984-12-17 JP JP19020184U patent/JPS61104551U/ja active Pending