JPS61104550U - - Google Patents
Info
- Publication number
- JPS61104550U JPS61104550U JP19017484U JP19017484U JPS61104550U JP S61104550 U JPS61104550 U JP S61104550U JP 19017484 U JP19017484 U JP 19017484U JP 19017484 U JP19017484 U JP 19017484U JP S61104550 U JPS61104550 U JP S61104550U
- Authority
- JP
- Japan
- Prior art keywords
- supporting
- wafer carrier
- supporting side
- plates
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005452 bending Methods 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19017484U JPS61104550U (enExample) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19017484U JPS61104550U (enExample) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61104550U true JPS61104550U (enExample) | 1986-07-03 |
Family
ID=30747624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19017484U Pending JPS61104550U (enExample) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61104550U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6011640U (ja) * | 1983-06-30 | 1985-01-26 | 三菱電機株式会社 | 同期機 |
-
1984
- 1984-12-17 JP JP19017484U patent/JPS61104550U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6011640U (ja) * | 1983-06-30 | 1985-01-26 | 三菱電機株式会社 | 同期機 |