JPS61104452U - - Google Patents
Info
- Publication number
- JPS61104452U JPS61104452U JP1984189680U JP18968084U JPS61104452U JP S61104452 U JPS61104452 U JP S61104452U JP 1984189680 U JP1984189680 U JP 1984189680U JP 18968084 U JP18968084 U JP 18968084U JP S61104452 U JPS61104452 U JP S61104452U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- film
- photoresist film
- printing machine
- vacuum device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189680U JPS6350665Y2 (enExample) | 1984-12-13 | 1984-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189680U JPS6350665Y2 (enExample) | 1984-12-13 | 1984-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61104452U true JPS61104452U (enExample) | 1986-07-03 |
| JPS6350665Y2 JPS6350665Y2 (enExample) | 1988-12-27 |
Family
ID=30747130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984189680U Expired JPS6350665Y2 (enExample) | 1984-12-13 | 1984-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350665Y2 (enExample) |
-
1984
- 1984-12-13 JP JP1984189680U patent/JPS6350665Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350665Y2 (enExample) | 1988-12-27 |