JPS61104340U - - Google Patents
Info
- Publication number
- JPS61104340U JPS61104340U JP19006884U JP19006884U JPS61104340U JP S61104340 U JPS61104340 U JP S61104340U JP 19006884 U JP19006884 U JP 19006884U JP 19006884 U JP19006884 U JP 19006884U JP S61104340 U JPS61104340 U JP S61104340U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- thermocouple
- hot junction
- thermopile
- support portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19006884U JPS61104340U (enExample) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19006884U JPS61104340U (enExample) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61104340U true JPS61104340U (enExample) | 1986-07-02 |
Family
ID=30747516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19006884U Pending JPS61104340U (enExample) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61104340U (enExample) |
-
1984
- 1984-12-17 JP JP19006884U patent/JPS61104340U/ja active Pending