JPS61104132U - - Google Patents

Info

Publication number
JPS61104132U
JPS61104132U JP18955284U JP18955284U JPS61104132U JP S61104132 U JPS61104132 U JP S61104132U JP 18955284 U JP18955284 U JP 18955284U JP 18955284 U JP18955284 U JP 18955284U JP S61104132 U JPS61104132 U JP S61104132U
Authority
JP
Japan
Prior art keywords
opening
clean room
articles
air
entry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18955284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212513Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18955284U priority Critical patent/JPH0212513Y2/ja
Publication of JPS61104132U publication Critical patent/JPS61104132U/ja
Application granted granted Critical
Publication of JPH0212513Y2 publication Critical patent/JPH0212513Y2/ja
Expired legal-status Critical Current

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  • Ventilation (AREA)
JP18955284U 1984-12-15 1984-12-15 Expired JPH0212513Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18955284U JPH0212513Y2 (enrdf_load_stackoverflow) 1984-12-15 1984-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18955284U JPH0212513Y2 (enrdf_load_stackoverflow) 1984-12-15 1984-12-15

Publications (2)

Publication Number Publication Date
JPS61104132U true JPS61104132U (enrdf_load_stackoverflow) 1986-07-02
JPH0212513Y2 JPH0212513Y2 (enrdf_load_stackoverflow) 1990-04-09

Family

ID=30746998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18955284U Expired JPH0212513Y2 (enrdf_load_stackoverflow) 1984-12-15 1984-12-15

Country Status (1)

Country Link
JP (1) JPH0212513Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0212513Y2 (enrdf_load_stackoverflow) 1990-04-09

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