JPS61103476U - - Google Patents
Info
- Publication number
- JPS61103476U JPS61103476U JP18869184U JP18869184U JPS61103476U JP S61103476 U JPS61103476 U JP S61103476U JP 18869184 U JP18869184 U JP 18869184U JP 18869184 U JP18869184 U JP 18869184U JP S61103476 U JPS61103476 U JP S61103476U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- pipe
- processing
- liquid supply
- trumpet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 12
- 238000004381 surface treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869184U JPS6342142Y2 (enExample) | 1984-12-12 | 1984-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18869184U JPS6342142Y2 (enExample) | 1984-12-12 | 1984-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61103476U true JPS61103476U (enExample) | 1986-07-01 |
| JPS6342142Y2 JPS6342142Y2 (enExample) | 1988-11-04 |
Family
ID=30746155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18869184U Expired JPS6342142Y2 (enExample) | 1984-12-12 | 1984-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342142Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019094526A (ja) * | 2017-11-21 | 2019-06-20 | 富士通株式会社 | 基板処理装置 |
-
1984
- 1984-12-12 JP JP18869184U patent/JPS6342142Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019094526A (ja) * | 2017-11-21 | 2019-06-20 | 富士通株式会社 | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6342142Y2 (enExample) | 1988-11-04 |