JPS61102807U - - Google Patents

Info

Publication number
JPS61102807U
JPS61102807U JP18749184U JP18749184U JPS61102807U JP S61102807 U JPS61102807 U JP S61102807U JP 18749184 U JP18749184 U JP 18749184U JP 18749184 U JP18749184 U JP 18749184U JP S61102807 U JPS61102807 U JP S61102807U
Authority
JP
Japan
Prior art keywords
position detection
optical sensors
detected object
outputs
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18749184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18749184U priority Critical patent/JPS61102807U/ja
Publication of JPS61102807U publication Critical patent/JPS61102807U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP18749184U 1984-12-10 1984-12-10 Pending JPS61102807U (US07696358-20100413-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18749184U JPS61102807U (US07696358-20100413-C00002.png) 1984-12-10 1984-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18749184U JPS61102807U (US07696358-20100413-C00002.png) 1984-12-10 1984-12-10

Publications (1)

Publication Number Publication Date
JPS61102807U true JPS61102807U (US07696358-20100413-C00002.png) 1986-06-30

Family

ID=30744950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18749184U Pending JPS61102807U (US07696358-20100413-C00002.png) 1984-12-10 1984-12-10

Country Status (1)

Country Link
JP (1) JPS61102807U (US07696358-20100413-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63282260A (ja) * 1987-05-13 1988-11-18 Chugai Ro Kogyo Kaisha Ltd スパッタリング装置
JP2012173254A (ja) * 2011-02-24 2012-09-10 Hitachi High-Technologies Corp 検測方法及び装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58153105A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp 光学式相対位置測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58153105A (ja) * 1982-03-08 1983-09-12 Mitsubishi Electric Corp 光学式相対位置測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63282260A (ja) * 1987-05-13 1988-11-18 Chugai Ro Kogyo Kaisha Ltd スパッタリング装置
JP2012173254A (ja) * 2011-02-24 2012-09-10 Hitachi High-Technologies Corp 検測方法及び装置

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