JPS6093755U - 蒸着材料融解用ボ−ト - Google Patents

蒸着材料融解用ボ−ト

Info

Publication number
JPS6093755U
JPS6093755U JP18597583U JP18597583U JPS6093755U JP S6093755 U JPS6093755 U JP S6093755U JP 18597583 U JP18597583 U JP 18597583U JP 18597583 U JP18597583 U JP 18597583U JP S6093755 U JPS6093755 U JP S6093755U
Authority
JP
Japan
Prior art keywords
boat
melting
deposition materials
melting deposition
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18597583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332131Y2 (enrdf_load_stackoverflow
Inventor
龍 長井
梶田　耕三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Energy Ltd filed Critical Hitachi Maxell Energy Ltd
Priority to JP18597583U priority Critical patent/JPS6093755U/ja
Publication of JPS6093755U publication Critical patent/JPS6093755U/ja
Application granted granted Critical
Publication of JPS6332131Y2 publication Critical patent/JPS6332131Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18597583U 1983-12-01 1983-12-01 蒸着材料融解用ボ−ト Granted JPS6093755U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18597583U JPS6093755U (ja) 1983-12-01 1983-12-01 蒸着材料融解用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18597583U JPS6093755U (ja) 1983-12-01 1983-12-01 蒸着材料融解用ボ−ト

Publications (2)

Publication Number Publication Date
JPS6093755U true JPS6093755U (ja) 1985-06-26
JPS6332131Y2 JPS6332131Y2 (enrdf_load_stackoverflow) 1988-08-26

Family

ID=30401827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18597583U Granted JPS6093755U (ja) 1983-12-01 1983-12-01 蒸着材料融解用ボ−ト

Country Status (1)

Country Link
JP (1) JPS6093755U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6332131Y2 (enrdf_load_stackoverflow) 1988-08-26

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