JPS6092780U

JPS6092780U - Vacuum pump

Info

Publication number: JPS6092780U
Application number: JP18653683U
Authority: JP
Inventors: 関　公明
Original assignee: 三菱電機株式会社
Priority date: 1983-11-30
Filing date: 1983-11-30
Publication date: 1985-06-25

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図〜第３図は何れも従来のこの種真空ポンプを示す
もので、第１図は全体の縦断面図、第２図Ａおよび第３
図はベアリングと環状カムとの動作説明図、第２図Ｂは
第２図Ａのｓ−８線における断面図である。第４図はこ
の考案の一実施例にかかる環状カムとベアリングの断面
図、第５図および第６図は何れもこの考案の他の実施例
にかかる環状カムとベアリングの断面図である。図において、１は電動機、２は電動機軸、３はカム板、
３ａは環状カム、４はベアリング、６はスライド軸、７
はダイヤフラム、１６は吸気弁、１７は排気弁、２２は
テーパ穴、２４は弁体、２５は押え板である。なお、図
中同一符号は同一または相当部分を示す。Figures 1 to 3 all show conventional vacuum pumps of this type, with Figure 1 being a longitudinal sectional view of the whole, Figures 2A and 3.
The figure is an explanatory diagram of the operation of the bearing and the annular cam, and FIG. 2B is a sectional view taken along line s-8 in FIG. 2A. FIG. 4 is a sectional view of an annular cam and a bearing according to one embodiment of the invention, and FIGS. 5 and 6 are sectional views of an annular cam and a bearing according to other embodiments of the invention. In the figure, 1 is a motor, 2 is a motor shaft, 3 is a cam plate,
3a is an annular cam, 4 is a bearing, 6 is a slide shaft, 7
1 is a diaphragm, 16 is an intake valve, 17 is an exhaust valve, 22 is a tapered hole, 24 is a valve body, and 25 is a holding plate. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims

[Scope of utility model registration request]

(1) A bearing attached to the other end of a slide shaft with an exhaust valve and a diaphragm connected to one end, or an arcuate portion on either end of the annular cam of a cam plate that is in pressure contact with this bearing and directly connected to the motor shaft. A vacuum pump characterized in that the bearing is brought into point contact with the end face of the annular cam.

(2) The vacuum pump according to claim 1, wherein the bearing is a ball bearing or a steel ball.

(3) The vacuum pump according to claim 1, wherein the annular cam formed on the peripheral end face of the cam plate has a chevron shape whose height changes sequentially in the axial direction.

(4) The vacuum pump according to claim 1 or 2, wherein the steel ball bearing is fitted into a tapered hole formed in the end face of the slide shaft.