JPS6088538U - Resist film forming equipment - Google Patents
Resist film forming equipmentInfo
- Publication number
- JPS6088538U JPS6088538U JP1983181528U JP18152883U JPS6088538U JP S6088538 U JPS6088538 U JP S6088538U JP 1983181528 U JP1983181528 U JP 1983181528U JP 18152883 U JP18152883 U JP 18152883U JP S6088538 U JPS6088538 U JP S6088538U
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- film forming
- forming equipment
- forming apparatus
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図Ａは、従来のレジスト膜形成装置の断面図、同図
Ｂは、同レジスト膜形成装置のＢ−Ｂ線に沿う断面図、
第２図はレジストのはね返り現象を示す説明図、第３図
Ａは、本考案の一実施例の断面図、同図Ｂは、同実施例
のＢ−Ｂ線に沿う断面図である。
１１・・・マスクホルダー、１２・・・マスク設置部、
１３・・・ハードマスク、１４・・・固定片、１５・・
・床面、１６・・・傾斜面、１７・・・密閉容器、１８
・・・ハードマスク、１９・・・レジスト膜、２０・・
・レジスト膜形成装置、２１・・・レジスト液。FIG. 1A is a cross-sectional view of a conventional resist film forming apparatus, and FIG. 1B is a cross-sectional view of the same resist film forming apparatus along line B-B.
FIG. 2 is an explanatory diagram showing a resist rebound phenomenon, FIG. 3A is a cross-sectional view of an embodiment of the present invention, and FIG. 3B is a cross-sectional view of the same embodiment along line B-B. 11...Mask holder, 12...Mask installation part,
13...Hard mask, 14...Fixed piece, 15...
・Floor surface, 16... Inclined surface, 17... Sealed container, 18
...Hard mask, 19...Resist film, 20...
- Resist film forming device, 21... resist liquid.
Claims (1)
在に収容してなるレジスト膜形成装置において、マスク
ホルダーに対向する密閉容器の内壁面の側面部を該密閉
容器の床面に向って末広がりに拡大した傾斜面にしたこ
とを特徴とするレジスト膜形成装置。In a resist film forming apparatus that rotatably accommodates a mask holder having a mask installation part formed on the top thereof, the side surface of the inner wall surface of a closed container facing the mask holder is enlarged toward the floor surface of the closed container. A resist film forming apparatus characterized by having a sloped surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983181528U JPS6088538U (en) | 1983-11-24 | 1983-11-24 | Resist film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983181528U JPS6088538U (en) | 1983-11-24 | 1983-11-24 | Resist film forming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6088538U true JPS6088538U (en) | 1985-06-18 |
Family
ID=30393337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983181528U Pending JPS6088538U (en) | 1983-11-24 | 1983-11-24 | Resist film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6088538U (en) |
-
1983
- 1983-11-24 JP JP1983181528U patent/JPS6088538U/en active Pending
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