JPS6087887A - Piping of water-flow system and its sterilizing method - Google Patents

Piping of water-flow system and its sterilizing method

Info

Publication number
JPS6087887A
JPS6087887A JP19409783A JP19409783A JPS6087887A JP S6087887 A JPS6087887 A JP S6087887A JP 19409783 A JP19409783 A JP 19409783A JP 19409783 A JP19409783 A JP 19409783A JP S6087887 A JPS6087887 A JP S6087887A
Authority
JP
Japan
Prior art keywords
regulator
temp
water
sterilizer
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19409783A
Other languages
Japanese (ja)
Inventor
Fusao Kojima
幸島 房雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinwa Controls Co Ltd
Original Assignee
Shinwa Controls Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinwa Controls Co Ltd filed Critical Shinwa Controls Co Ltd
Priority to JP19409783A priority Critical patent/JPS6087887A/en
Publication of JPS6087887A publication Critical patent/JPS6087887A/en
Pending legal-status Critical Current

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  • Pipeline Systems (AREA)
  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)

Abstract

PURPOSE:To prevent the proliferation of bacteria by providing a sterilizing block consisting of a regulator for maintaining the temp. suitable for sterilizing the bacteria when the water flow is stopped and a heater interlocking with the regulator to the pipeline of a piping system. CONSTITUTION:Plural sterilizing blocks 2 incorporating a sterilizer 3 are provided at appropriate parts of a pipeline 1a. The sterilizer 3 is constituted of a temp. regulator 4 and a heater 5 interlocking with the regulator. when a valve mechanism 6 is interrupted and the flow of the superhigh-purity water is stopped, the heater 5 of the sterilizer 3 is operated and the temp. of the part of the pipeline 1a where the sterilizing block 2 is equipped is increased. The temp. regulator 4 is set so that the temp. can be increased to about 120 deg.C which is suitable for the sterilization of bacteria, and the power source of the heater 5 is cut off by the regulator when the temp. exceeds the set temp. When the temp. of the sterilizing block 2 is decreased to a specified temp. or below, the temp. regulator 4 is again operated.

Description

【発明の詳細な説明】 本発明は、例えば半導体産業などにおいて利用されてい
る超純水製造システムのような各種の流水システムにお
ける配管内に、有害なバクテリア菌が侵入及び増殖する
ことを防!l二できるようにした流水システムの配管系
及びその滅菌法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention prevents harmful bacteria from entering and multiplying in the pipes of various water systems, such as ultrapure water production systems used in the semiconductor industry, etc. The present invention relates to a piping system for a running water system and a sterilization method thereof.

最近では半導体産業、食品工業、医薬品工業などの広範
囲の分野において、製品の精度を高めるなどの用途に使
用する微粒子、有機物、生菌、等の少ない超純水を得る
ための超純水製造システムが利用されるようになってい
る。また特に最近では、製品の精度、収率を高度化すめ
るためにはこの超純水の純度をいかにして高めるかとい
う方向に努力かはられれるようになっている。
Recently, ultrapure water production systems are used to obtain ultrapure water with low levels of fine particles, organic matter, living bacteria, etc. used for purposes such as improving product precision in a wide range of fields such as the semiconductor industry, food industry, and pharmaceutical industry. is now being used. Particularly recently, efforts have been made to improve the purity of this ultrapure water in order to improve the precision and yield of products.

超純水製造システムはそれ自体高価な設備費用を必要と
するので、この製造システムが稼動されるに際してはで
きるだけ効率よく純度の高い超純水が得られるようにす
ることか重要である。ところでこの超純水製造システム
における旨点ともいえる問題点は、配管の継手、弁など
の部分からの配管系内に対してバクテリアが侵入するこ
とや、超純水に機敏含有するバクテリアが増殖すること
である。勿論超純水製造システムにおいては、第1図に
示すように製造システムAが稼動状態にあって利用系管
路lに通常連続して超純水が流動しているときにはバク
テリアの侵入及び増殖はあまり問題とはならない。
Since an ultrapure water production system itself requires expensive equipment costs, it is important to ensure that ultrapure water of high purity can be obtained as efficiently as possible when this production system is operated. By the way, the problem with this ultrapure water production system is that bacteria can enter the piping system through piping joints, valves, etc., and bacteria that are easily contained in ultrapure water can multiply. That's true. Of course, in an ultrapure water production system, when the production system A is in operation and ultrapure water is normally continuously flowing through the utilization pipe 1, as shown in Figure 1, the invasion and proliferation of bacteria will not occur. It's not much of a problem.

しかしながら、製造システムAの稼動が一時的に中断し
て利用系管路内の水の流動が長時間にわたって停止した
場合とか、或は利用系管路に日頃あまり利用されない分
岐路などがあって管路内の一部に水の停滞部分がある場
合とか、または配管系の故障などにより予備の配管を接
続した場合などのときには、配管の継手部分や弁部分な
どから管路内にバクテリアが侵入して、これが水の流動
しない管路内における前記の侵入した菌の繁殖に好まし
い部分において増殖され、再び管路内に流水が流動した
際にこれを汚染するという問題がある。
However, if the operation of manufacturing system A is temporarily interrupted and the flow of water in the pipes in the utilization system stops for a long time, or if there are branches in the pipelines that are not used often, the pipes may be interrupted. If there is water stagnation in a part of the pipe, or if a spare pipe is connected due to a malfunction in the piping system, bacteria may enter the pipe through the joints or valves of the pipe. However, there is a problem in that this microorganism grows in the conduit where water does not flow, in a favorable area for the propagation of the invading bacteria, and contaminates the conduit when the water flows into the conduit again.

本発明は、例えば超純水製造システムのような流水シス
テムにおける前記のような問題点を解消するために、例
えば利用系管路などの配管系管路における適宜の部分に
流水流動の停止に伴なって作動する温度調節器とヒータ
ーとからなる加熱滅菌手段を設け、管路内の流水旋動が
停止した場合にこの加熱滅菌手段が管路内の水をバクテ
リアの死滅に適する温度条件下に加熱して、流水流動の
停止時において管路内に侵入する。<クチリアの増殖を
確実に防止できるようにした流水システム配管系及びそ
の滅菌法を目的としたものである。
In order to solve the above-mentioned problems in a flowing water system such as an ultrapure water production system, the present invention has been made to provide a solution to the problems described above in a flowing water system such as an ultra-pure water production system, by providing a system in which flowing water is stopped at an appropriate part of a piping system such as a utilization system piping. A heat sterilization means consisting of a temperature controller and a heater is provided, and when the rotation of flowing water in the pipe is stopped, the heat sterilization means brings the water in the pipe under temperature conditions suitable for killing bacteria. It heats up and enters the pipeline when the water flow stops. <The purpose is to provide a running water system piping system and its sterilization method that can reliably prevent the proliferation of Cutilia.

本発明を図面に示す実施例について説明すれば、第1図
は超純水製造システムAの配管系路を示しており、ft
52図は第1図の糸路における超純水利用系+4・路l
の一部の管路1aを示している。
To explain an embodiment of the present invention shown in the drawings, FIG. 1 shows a piping system of an ultrapure water production system A,
Figure 52 shows the ultrapure water utilization system in the yarn route shown in Figure 1 +4/Route l
A part of the pipe line 1a is shown.

該管路1aにおける適宜の部分には滅菌装置3を内蔵し
た滅菌ブロック2が複数箇所設けられている。この滅菌
装置3は温度調節器4と、この調節器4と連動するヒー
ター5とからなっている。また該滅菌装置3は、管路1
a内における超純水の流動を開閉する自動弁、手動弁な
どの弁機構6と連動するように構成されており、この弁
機構6が開いて管路1a内に超純水が流れている時には
滅菌装置3は作動せず、超純水製造システム全体の稼動
が停止した時、或は前記弁機構6が遮断された時に、超
純水の遮断に伴って発生する信号と同期して作動される
ようになっている。即ち、前記ブ「機構6が遮断されて
超純水の流れが止ると、該滅菌装置3におけるヒーター
5か作動して滅菌ブロック2の設けられた部分における
管路1aの温度が上PIL始める。滅菌装置3における
温度調節器4は、管路1a内の超純水か通常バクテリア
の滅菌に適した温度である約120°C程度に加熱され
るように設定されており、この設定温度以上に温度がJ
、: yJするとヒーター5の電源がりJれるようにな
っている。時間の経過に伴って滅菌ブロック2の温度が
一定値以下の温度に低下すると、温度調節器4が作動し
て再びヒーター5に電源が入り、管路1a内の超純水が
前記の滅菌温度に加熱維持される。
A plurality of sterilization blocks 2 each having a built-in sterilizer 3 are provided at appropriate portions of the conduit 1a. This sterilization device 3 is comprised of a temperature regulator 4 and a heater 5 that is interlocked with this regulator 4. The sterilizer 3 also includes a pipe line 1
It is configured to work in conjunction with a valve mechanism 6 such as an automatic valve or a manual valve that opens and closes the flow of ultrapure water in the pipe 1a, and when the valve mechanism 6 opens, the ultrapure water flows in the pipe 1a. Sometimes the sterilizer 3 does not operate, but when the operation of the entire ultrapure water production system is stopped or the valve mechanism 6 is shut off, it operates in synchronization with the signal generated when the ultrapure water is shut off. It is now possible to do so. That is, when the block mechanism 6 is shut off and the flow of ultrapure water is stopped, the heater 5 in the sterilizer 3 is activated, and the temperature of the pipe line 1a in the portion where the sterilization block 2 is provided begins to rise. The temperature controller 4 in the sterilizer 3 is set to heat the ultrapure water in the conduit 1a to about 120°C, which is a temperature suitable for sterilizing normal bacteria. temperature is J
, : When you press yJ, the power to heater 5 can be turned on. When the temperature of the sterilization block 2 falls below a certain value over time, the temperature regulator 4 is activated and the heater 5 is turned on again, and the ultrapure water in the conduit 1a is brought to the above-mentioned sterilization temperature. It is maintained heated to.

一般的に従来の超純水製造システムの配管系では硬質塩
化ビニールなどの合成樹脂管か用いられる例が多いこと
を考慮した場合、前記のような加熱型滅菌装置3を合成
樹脂の配管系に取り伺けることには問題がある。そのた
め本発明を合成樹脂管による配管系に実施する場合にお
いては、管路1aにおける滅菌ブロック2の両側部分に
、所定の長さ分だけでもステンレスなどの金属管或はそ
の他の耐熱性材料からなる耐熱管路1bを使用する必要
がある。しかしながら、部分的にも滅菌装置3の部分に
おける管路内の水を約120°C程度にまで上j;1さ
せた場合1.前記耐熱管路ibの長さを考慮せずに該管
路1bを直接合成樹脂管路1aと接続すると、合成樹脂
管路1aが高熱の湯水による悪影響を受ることになる。
Considering that the piping systems of conventional ultrapure water production systems generally use synthetic resin pipes such as hard vinyl chloride, it is possible to install the heating sterilizer 3 as described above in synthetic resin piping systems. There is a problem with being able to ask questions. Therefore, when the present invention is applied to a piping system using synthetic resin pipes, it is necessary to install metal pipes such as stainless steel or other heat-resistant materials on both sides of the sterilization block 2 in the pipe line 1a, even if only for a predetermined length. It is necessary to use the heat-resistant pipe line 1b. However, if the water in the pipe line in the sterilizer 3 is partially heated to about 120°C, 1. If the pipe line 1b is directly connected to the synthetic resin pipe line 1a without considering the length of the heat-resistant pipe line ib, the synthetic resin pipe line 1a will be adversely affected by the hot water.

このような問題を解消するためには、例えば該耐熱管路
1bを充分な長さに設定することによって、管路両端部
分において内部の湯水を合成樹脂管路1aに支障を与え
ない程度の温度に迄降下させるという方法が考えられる
が、滅菌装置3の部分に充分な長さの1耐熱管路1bを
設定することは利用系管路lの全体における耐熱管路1
bの長さが大きくなって実用上において問題がある。
In order to solve this problem, for example, by setting the heat-resistant pipe line 1b to a sufficient length, the hot water inside the pipe can be heated to a temperature that does not interfere with the synthetic resin pipe line 1a at both ends of the pipe. However, setting one heat-resistant pipe line 1b of sufficient length in the sterilizer 3 part means that the heat-resistant pipe line 1 in the entire utilization system pipe line l is lowered.
The length of b becomes large, which poses a problem in practical use.

そのため本発明においては、前記耐熱管路1bの外周に
アルミニューム或は銅製の熱伝導性の良好な材料からな
る放熱フィン7を設けて、耐熱管路1bの両端部分にお
いては、内部の湯水の温度降下が急速に行なはれ、従っ
て耐熱管路1bの長さを短かく設定できるようにして、
システム配管系へのMlみ込みが容易に行なえるように
しである。
Therefore, in the present invention, heat radiation fins 7 made of a material with good thermal conductivity such as aluminum or copper are provided on the outer periphery of the heat-resistant pipe line 1b, and at both ends of the heat-resistant pipe line 1b, the hot water inside is provided. The temperature drops rapidly, so the length of the heat-resistant pipe line 1b can be set short,
This allows for easy introduction of Ml into the system piping system.

なお」二足実施例においては、滅菌装置3を滅菌ブロッ
ク2内に設けるというように説明したが、滅菌ブロック
2とは前記利用系管路1における滅菌装置3の設置され
る箇所を指称するものであり、必らずしも枠状の設41
11である必要はない。従って図示はしないが、例えば
前記の耐熱管路tbの外周に7ヘントヒーターと温度調
節器とが直接取り付けられるような構成であってもよい
。また前記滅菌装置3にはヒーター5の安全機構として
異常温度保護装置を設けておくことが必要であることは
いうまでもない。
In addition, in the two-legged embodiment, it has been explained that the sterilizer 3 is installed in the sterilizer block 2, but the sterilizer block 2 refers to the location in the utilization system pipe 1 where the sterilizer 3 is installed. Therefore, it is not necessarily necessary to use a frame-shaped setting 41.
It doesn't have to be 11. Therefore, although not shown in the drawings, for example, a configuration may be adopted in which a 7-hent heater and a temperature regulator are directly attached to the outer periphery of the heat-resistant pipe line tb. It goes without saying that the sterilizer 3 must be provided with an abnormal temperature protection device as a safety mechanism for the heater 5.

本発明においては、上記のように超純水製造システムに
おける配管系管路の適宜複数箇所に、該管路内を流動す
る水の流れが遮断することに伴って作動する加熱滅菌装
置を設けたので、夜間或は昼間においても何らかの理由
により製造システムの稼動が停止して管路内を流動する
水の流れが止り、そのため管継手部分或は弁部分から管
路内にバクテリアが侵入して停滞水中において増殖する
ような虞が発生しても、滅菌装置3の部分における停滞
水部分かバクテリアの死滅に適した約120°C程度の
温度に加熱されるので、バクテリアを滅菌装置3の範囲
部分で確実に死滅させ、該部分以外の管路内に対するそ
れ以」−のバクテリアの侵入と増殖とを防止することが
できる。
In the present invention, as described above, heat sterilizers that are activated when the flow of water flowing through the pipes is interrupted are provided at appropriate locations in the piping system in the ultrapure water production system. Therefore, for some reason, the production system stops operating at night or during the day, and the flow of water in the pipes stops, causing bacteria to enter the pipes through the pipe joints or valves, resulting in stagnation. Even if there is a risk of bacteria multiplying in the water, the stagnant water in the sterilizer 3 is heated to a temperature of about 120°C, which is suitable for killing bacteria, so the bacteria can be removed from the area within the sterilizer 3. It is possible to reliably kill the bacteria and prevent further invasion and proliferation of bacteria into the pipes other than those parts.

勿論滅菌装置3は温度調節器4を備えているため、該装
置部分の管路1b内の超純水が所定温度に達したのちは
ヒーター5の作動が停止して、管路内がそれ以」二の高
温になるのを防ぐので配管系は安全に保持される。
Of course, the sterilizer 3 is equipped with a temperature regulator 4, so after the ultrapure water in the pipe line 1b of the device reaches a predetermined temperature, the operation of the heater 5 is stopped and the pipe line is no longer in operation. The piping system is kept safe as it prevents high temperatures.

前記のように滅菌装置3によってその部分の管路1bが
120°C程度の高温に加熱された場合、該管路内は約
2 kg/crn’程度の圧力となるため、もし管路の
一部に圧力開放弁などの出口を設けた場合には、管路内
は蒸気圧により水が減少して気相状態となり、バクテリ
アを死滅させるのに更に好ましい条件を与えることがで
きる。なお該滅菌装置ζ3のヒーター5の容量は比較的
小さいため、超純水をi!!続流水しているときであれ
ば滅菌装置3が動作していても流れる超純水の温度が多
少上る程度で特に問題とはならない。
When the sterilizer 3 heats the pipe 1b in that part to a high temperature of about 120°C as described above, the pressure inside the pipe becomes about 2 kg/crn'. If an outlet such as a pressure release valve is provided in the pipe, water in the pipe is reduced by steam pressure and becomes a gas phase, providing more favorable conditions for killing bacteria. Note that the capacity of the heater 5 of the sterilizer ζ3 is relatively small, so the ultrapure water is ! As long as the sterilizer 3 is in operation, there is no particular problem as long as the temperature of the flowing ultrapure water rises a little, as long as the water is flowing.

また配管系が合成樹脂管である場合には、減菌゛ 装置
30部分における管路1bに放熱フィン7などによる放
熱手段を設けることにより、合成樹脂製管路に対する温
度による障害を防止することができる。
In addition, when the piping system is a synthetic resin pipe, it is possible to prevent damage to the synthetic resin pipe due to temperature by providing a heat radiation means such as heat radiation fins 7 on the pipe 1b in the sterilization device 30 section. can.

f)v記実施例は超純水製造システムの利用系管路につ
いて述べたが、本発明は利用系管路のみならず前記製造
システムにおける他の管路を含む全ての配管系について
適用できることはいうまでもない。また必らずしも超純
水製造システムの配管系にのみ限定されることもなく、
それ以外の配管系であってバクテリアなどの雑菌が侵入
しては困るような各種流水システム配管系にも利用可能
である。また減+5Qのための温度もl 20 ’cに
限定されることはない。
f) Although the embodiment described in v describes the utilization system piping of an ultrapure water production system, the present invention can be applied not only to the utilization system piping but also to all piping systems including other pipelines in the production system. Needless to say. Also, it is not necessarily limited to the piping system of the ultrapure water production system.
It can also be used in various other piping systems for running water systems where it is difficult for bacteria and other germs to enter. Furthermore, the temperature for the reduction +5Q is not limited to l 20 'c.

以上に述べたように、本発明においては、配管系管路内
の流水が停止した際の該管路におけるバクテリアの侵入
及び増殖を防止でき、常に純度の高い純水が得られると
いう効果を為する。
As described above, in the present invention, it is possible to prevent the invasion and proliferation of bacteria in the pipes when the water flow in the pipes of the piping system is stopped, and it is possible to obtain pure water with high purity at all times. do.

【図面の簡単な説明】[Brief explanation of drawings]

fli’51図は流水システムとして例示する超純水製
造システムの配管系を示すフローチャート、第2図は本
発明に係る配管系の一部の構成を示す部分側面図、第3
図は本発明に係る配管系の他の実施例を示す部分側面図
である。図において、■=利用系管路、工a:管路、l
b:耐熱管路、2二滅菌ブロツク、3:#C菌装置、4
:温度調節器、5:ヒーター、 6:弁機構、7:放熱フィン、
Fig. fli'51 is a flowchart showing a piping system of an ultrapure water production system exemplified as a running water system, Fig. 2 is a partial side view showing the configuration of a part of the piping system according to the present invention, and Fig. 3
The figure is a partial side view showing another embodiment of the piping system according to the present invention. In the figure, ■ = Utilization system pipe, engineering a: pipe, l
b: Heat-resistant pipe line, 22 sterilization block, 3: #C bacteria device, 4
: Temperature controller, 5: Heater, 6: Valve mechanism, 7: Radiation fin,

Claims (1)

【特許請求の範囲】 ■、配管系管路における適宜の箇所に、該管路内におけ
る流水の流動が停止した際に管路を部分的にバクテリア
閑の死滅に適した温度に保持する温度調節器及び該調節
器と連動するヒーターとからなる滅菌ブロックが設置さ
れていることを特徴とする流水システムの配管系。 2、配管系管路における適宜の箇所に温度調節器及び該
調節器と連動するヒーターとからなる滅菌プロ、りを設
差し、前記管路内における流水の11コ動が停止した際
に前記滅菌ブロックを作動させることにより、管路を部
分的にバクテリア菌の死滅に適した温度に保持すること
を特徴とする流水システム配管系の滅菌法。 3、滅菌ブロックの両側部分における管路に放熱フィン
等の放熱手段を設けてなる特許請求の範囲第1qA記載
の流水システムの配管系。
[Scope of Claims] (1) Temperature adjustment at appropriate locations in the piping system to partially maintain the pipe at a temperature suitable for killing bacteria when the flow of water in the pipe stops. A piping system for a running water system, characterized in that a sterilization block consisting of a regulator and a heater interlocked with the regulator is installed. 2. A sterilizer consisting of a temperature regulator and a heater linked to the regulator is installed at an appropriate location in the pipeline, and when the flow of water in the pipeline stops, the sterilization process is carried out. A method of sterilizing a running water system piping system, which is characterized by partially maintaining the pipe line at a temperature suitable for killing bacteria by operating a block. 3. A piping system for a running water system according to claim 1qA, wherein heat radiating means such as radiating fins are provided in the pipelines on both sides of the sterilization block.
JP19409783A 1983-10-19 1983-10-19 Piping of water-flow system and its sterilizing method Pending JPS6087887A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19409783A JPS6087887A (en) 1983-10-19 1983-10-19 Piping of water-flow system and its sterilizing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19409783A JPS6087887A (en) 1983-10-19 1983-10-19 Piping of water-flow system and its sterilizing method

Publications (1)

Publication Number Publication Date
JPS6087887A true JPS6087887A (en) 1985-05-17

Family

ID=16318894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19409783A Pending JPS6087887A (en) 1983-10-19 1983-10-19 Piping of water-flow system and its sterilizing method

Country Status (1)

Country Link
JP (1) JPS6087887A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6342787A (en) * 1986-08-08 1988-02-23 Japan Organo Co Ltd Automatic hot sterilizing device for ultrapure water feed line
JP2008521593A (en) * 2004-11-30 2008-06-26 レギオフリーウォーター システムズ ベスローテン フェンノートシャップ Water supply system arranged for killing pathogens, operating device and method for killing pathogens in water supply systems

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431785U (en) * 1977-08-06 1979-03-02
JPS5811082A (en) * 1981-07-14 1983-01-21 Kaoru Hirano Valve device in producing device for sterilized water

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5431785U (en) * 1977-08-06 1979-03-02
JPS5811082A (en) * 1981-07-14 1983-01-21 Kaoru Hirano Valve device in producing device for sterilized water

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6342787A (en) * 1986-08-08 1988-02-23 Japan Organo Co Ltd Automatic hot sterilizing device for ultrapure water feed line
JP2008521593A (en) * 2004-11-30 2008-06-26 レギオフリーウォーター システムズ ベスローテン フェンノートシャップ Water supply system arranged for killing pathogens, operating device and method for killing pathogens in water supply systems

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