JPS6087150U - 電子ビ−ム調整装置 - Google Patents

電子ビ−ム調整装置

Info

Publication number
JPS6087150U
JPS6087150U JP17626383U JP17626383U JPS6087150U JP S6087150 U JPS6087150 U JP S6087150U JP 17626383 U JP17626383 U JP 17626383U JP 17626383 U JP17626383 U JP 17626383U JP S6087150 U JPS6087150 U JP S6087150U
Authority
JP
Japan
Prior art keywords
ring
electron beam
magnets
adjustment device
shaped magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17626383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343646Y2 (en, 2012
Inventor
喜久雄 島津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaneka Corp
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corp filed Critical Kaneka Corp
Priority to JP17626383U priority Critical patent/JPS6087150U/ja
Publication of JPS6087150U publication Critical patent/JPS6087150U/ja
Application granted granted Critical
Publication of JPH0343646Y2 publication Critical patent/JPH0343646Y2/ja
Granted legal-status Critical Current

Links

JP17626383U 1983-11-15 1983-11-15 電子ビ−ム調整装置 Granted JPS6087150U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17626383U JPS6087150U (ja) 1983-11-15 1983-11-15 電子ビ−ム調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17626383U JPS6087150U (ja) 1983-11-15 1983-11-15 電子ビ−ム調整装置

Publications (2)

Publication Number Publication Date
JPS6087150U true JPS6087150U (ja) 1985-06-15
JPH0343646Y2 JPH0343646Y2 (en, 2012) 1991-09-12

Family

ID=30383266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17626383U Granted JPS6087150U (ja) 1983-11-15 1983-11-15 電子ビ−ム調整装置

Country Status (1)

Country Link
JP (1) JPS6087150U (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62120248U (en, 2012) * 1986-01-23 1987-07-30
KR20020049117A (ko) * 2000-12-19 2002-06-26 이형도 편향요크

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390443U (en, 2012) * 1976-12-23 1978-07-24
JPS5472430U (en, 2012) * 1977-10-31 1979-05-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390443U (en, 2012) * 1976-12-23 1978-07-24
JPS5472430U (en, 2012) * 1977-10-31 1979-05-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62120248U (en, 2012) * 1986-01-23 1987-07-30
KR20020049117A (ko) * 2000-12-19 2002-06-26 이형도 편향요크

Also Published As

Publication number Publication date
JPH0343646Y2 (en, 2012) 1991-09-12

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