JPS6086441U - Vacuum vessel structure - Google Patents
Vacuum vessel structureInfo
- Publication number
- JPS6086441U JPS6086441U JP17982583U JP17982583U JPS6086441U JP S6086441 U JPS6086441 U JP S6086441U JP 17982583 U JP17982583 U JP 17982583U JP 17982583 U JP17982583 U JP 17982583U JP S6086441 U JPS6086441 U JP S6086441U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum vessel
- vessel structure
- vacuum
- container
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す容器の縦断面図、第２
図は同壁面の拡大縦断面図である。
１・・・真空容器本体、２・・・配管、ａ・・−ＴｉＢ
２、ｂ−−−ＴｉＢ、 ｃ−Ｔｉ。Fig. 1 is a vertical sectional view of a container showing one embodiment of the present invention;
The figure is an enlarged longitudinal sectional view of the same wall surface. 1...Vacuum container body, 2...Piping, a...-TiB
2, b---TiB, c-Ti.
Claims (1)
れに連なる排気系の内壁面にチタン硼化物の膜を形成し
たことを特徴とする真空容器構造。1. A vacuum container structure for use in a device requiring a high degree of vacuum, characterized in that a titanium boride film is formed on the inner wall surface of the container and an exhaust system connected thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17982583U JPS6086441U (en) | 1983-11-21 | 1983-11-21 | Vacuum vessel structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17982583U JPS6086441U (en) | 1983-11-21 | 1983-11-21 | Vacuum vessel structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6086441U true JPS6086441U (en) | 1985-06-14 |
Family
ID=30390063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17982583U Pending JPS6086441U (en) | 1983-11-21 | 1983-11-21 | Vacuum vessel structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6086441U (en) |
-
1983
- 1983-11-21 JP JP17982583U patent/JPS6086441U/en active Pending
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