JPS6084059U - ion pump - Google Patents
ion pumpInfo
- Publication number
- JPS6084059U JPS6084059U JP17432383U JP17432383U JPS6084059U JP S6084059 U JPS6084059 U JP S6084059U JP 17432383 U JP17432383 U JP 17432383U JP 17432383 U JP17432383 U JP 17432383U JP S6084059 U JPS6084059 U JP S6084059U
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- anode
- cathode
- titanium cathodes
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置の構成図、第２図は第１図装置のＡ−
Ａ断面図、第３図は本考案の一実施例装置の構成図、第
４図は一実施例を説明するための図、第５図は他の実施
例を説明するための図である。
１：ポンプ容器、２ａｐ２ｂ：陰極、３ａ、３ｂニブラ
ケツト、５ ａ ｔ ５ ｂ ：取り付は金具、７：陽
極、８ａｔ８ｂ：絶縁碍子。Figure 1 is a configuration diagram of the conventional device, and Figure 2 is the A-A diagram of the device in Figure 1.
A sectional view, FIG. 3 is a configuration diagram of an apparatus according to an embodiment of the present invention, FIG. 4 is a diagram for explaining one embodiment, and FIG. 5 is a diagram for explaining another embodiment. 1: pump container, 2ap2b: cathode, 3a, 3b nib bracket, 5at 5b: metal fittings for mounting, 7: anode, 8at8b: insulator.
Claims (1)
枚のチタン陰極間に設けられた複数の中空筒状セルから
なる陽極と、前記陰極と陽極との間に高電圧を印加する
手段を備えた装置において、前記陰極と陽極との相対的
位置を可変に構成したことを特徴とするイオンポンプ。A high voltage is applied between two titanium cathodes placed opposite to each other in a magnetic field, an anode consisting of a plurality of hollow cylindrical cells provided between the two titanium cathodes, and the cathode and anode. An ion pump characterized in that the relative position of the cathode and the anode is configured to be variable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17432383U JPS6084059U (en) | 1983-11-11 | 1983-11-11 | ion pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17432383U JPS6084059U (en) | 1983-11-11 | 1983-11-11 | ion pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6084059U true JPS6084059U (en) | 1985-06-10 |
Family
ID=30379537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17432383U Pending JPS6084059U (en) | 1983-11-11 | 1983-11-11 | ion pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6084059U (en) |
-
1983
- 1983-11-11 JP JP17432383U patent/JPS6084059U/en active Pending
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