JPS6080852U - ２層式研磨皿容器 - Google Patents

２層式研磨皿容器

Info

Publication number
JPS6080852U
JPS6080852U JP1983171869U JP17186983U JPS6080852U JP S6080852 U JPS6080852 U JP S6080852U JP 1983171869 U JP1983171869 U JP 1983171869U JP 17186983 U JP17186983 U JP 17186983U JP S6080852 U JPS6080852 U JP S6080852U
Authority
JP
Japan
Prior art keywords
dish container
polishing dish
layer polishing
polishing
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983171869U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236600Y2 (enrdf_load_stackoverflow
Inventor
孝幸 鈴木
彦良 馬場
Original Assignee
東北金属工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東北金属工業株式会社 filed Critical 東北金属工業株式会社
Priority to JP1983171869U priority Critical patent/JPS6080852U/ja
Publication of JPS6080852U publication Critical patent/JPS6080852U/ja
Application granted granted Critical
Publication of JPS6236600Y2 publication Critical patent/JPS6236600Y2/ja
Granted legal-status Critical Current

Links

JP1983171869U 1983-11-08 1983-11-08 ２層式研磨皿容器 Granted JPS6080852U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983171869U JPS6080852U (ja) 1983-11-08 1983-11-08 ２層式研磨皿容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983171869U JPS6080852U (ja) 1983-11-08 1983-11-08 ２層式研磨皿容器

Publications (2)

Publication Number Publication Date
JPS6080852U true JPS6080852U (ja) 1985-06-05
JPS6236600Y2 JPS6236600Y2 (enrdf_load_stackoverflow) 1987-09-17

Family

ID=30374798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983171869U Granted JPS6080852U (ja) 1983-11-08 1983-11-08 ２層式研磨皿容器

Country Status (1)

Country Link
JP (1) JPS6080852U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6236600Y2 (enrdf_load_stackoverflow) 1987-09-17

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