JPS6075947U - Exposure light source device - Google Patents

Exposure light source device

Info

Publication number
JPS6075947U
JPS6075947U JP16889683U JP16889683U JPS6075947U JP S6075947 U JPS6075947 U JP S6075947U JP 16889683 U JP16889683 U JP 16889683U JP 16889683 U JP16889683 U JP 16889683U JP S6075947 U JPS6075947 U JP S6075947U
Authority
JP
Japan
Prior art keywords
light source
source device
exposure light
window glass
peripheral part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16889683U
Other languages
Japanese (ja)
Inventor
耕一 飯田
栄 田中
敏夫 大星
修一 斉藤
Original Assignee
ソニー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニー株式会社 filed Critical ソニー株式会社
Priority to JP16889683U priority Critical patent/JPS6075947U/en
Publication of JPS6075947U publication Critical patent/JPS6075947U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の露光用光源装置の例を示す一部断面とす
る側面図、第２図は本考案による露光用光源装置の一実
施例を示す一部断面とする側面図、第３図は本考案の露
光用光源装置の他の実施例を示す要部の断面図である。 １はランプハウス、２は光源、３は窓ガラス、５は０リ
ング、６，１７は蓋体、１０は補正レンズ系である。FIG. 1 is a partially sectional side view showing an example of a conventional exposure light source device, FIG. 2 is a partially sectional side view showing an embodiment of the exposure light source device according to the present invention, and FIG. FIG. 2 is a sectional view of a main part of another embodiment of the exposure light source device of the present invention. 1 is a lamp house, 2 is a light source, 3 is a window glass, 5 is an O ring, 6 and 17 are lids, and 10 is a correction lens system.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 窓ガラスを有するランプハウス内に光源が配され、上記
窓ガラスの周辺部がテーパ状に形成されて、上記窓ガラ
スが上記テーパ状の周辺部において挾持的に固定されて
成る露光用光源装置。A light source device for exposure, wherein a light source is arranged in a lamp house having a window glass, a peripheral part of the window glass is formed in a tapered shape, and the window glass is fixed in a clamping manner at the tapered peripheral part.
JP16889683U 1983-10-31 1983-10-31 Exposure light source device Pending JPS6075947U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16889683U JPS6075947U (en) 1983-10-31 1983-10-31 Exposure light source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16889683U JPS6075947U (en) 1983-10-31 1983-10-31 Exposure light source device

Publications (1)

Publication Number Publication Date
JPS6075947U true JPS6075947U (en) 1985-05-28

Family

ID=30369116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16889683U Pending JPS6075947U (en) 1983-10-31 1983-10-31 Exposure light source device

Country Status (1)

Country Link
JP (1) JPS6075947U (en)

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