JPS6071138U - Resist coating equipment - Google Patents

Resist coating equipment

Info

Publication number
JPS6071138U
JPS6071138U JP16198883U JP16198883U JPS6071138U JP S6071138 U JPS6071138 U JP S6071138U JP 16198883 U JP16198883 U JP 16198883U JP 16198883 U JP16198883 U JP 16198883U JP S6071138 U JPS6071138 U JP S6071138U
Authority
JP
Japan
Prior art keywords
resist coating
coating equipment
tube
view
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16198883U
Other languages
Japanese (ja)
Inventor
明 渡辺
Original Assignee
沖電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沖電気工業株式会社 filed Critical 沖電気工業株式会社
Priority to JP16198883U priority Critical patent/JPS6071138U/en
Publication of JPS6071138U publication Critical patent/JPS6071138U/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のレジストコーティング装置を示す断面図
、第2図はこの考案のレジストコーティング装置の第1
の実施例を示す断面図、第3図は第1の実施例のチュー
ブの縦断面図および横断面図、第4図はこの考案の第2
の実施例を示す縦断   。 面図および横断面図である。 11・・・・・・レジストコーティング用チューブ、1
2・・・・・・細線。
Fig. 1 is a sectional view showing a conventional resist coating device, and Fig. 2 is a cross-sectional view showing a resist coating device of the present invention.
3 is a longitudinal sectional view and a cross sectional view of the tube of the first embodiment, and FIG. 4 is a sectional view showing the second embodiment of the invention.
A longitudinal section showing an example of. They are a top view and a cross-sectional view. 11...Resist coating tube, 1
2...Thin line.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] レジストコーティング用チューブ内に、そのチューブ先
端から導出して細線を有することを特徴とするレジスト
コーティング装置。
A resist coating device characterized in that a resist coating tube has a thin wire led out from the tip of the tube.
JP16198883U 1983-10-20 1983-10-20 Resist coating equipment Pending JPS6071138U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16198883U JPS6071138U (en) 1983-10-20 1983-10-20 Resist coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16198883U JPS6071138U (en) 1983-10-20 1983-10-20 Resist coating equipment

Publications (1)

Publication Number Publication Date
JPS6071138U true JPS6071138U (en) 1985-05-20

Family

ID=30355843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16198883U Pending JPS6071138U (en) 1983-10-20 1983-10-20 Resist coating equipment

Country Status (1)

Country Link
JP (1) JPS6071138U (en)

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