JPS6071138U - Resist coating equipment - Google Patents
Resist coating equipmentInfo
- Publication number
- JPS6071138U JPS6071138U JP16198883U JP16198883U JPS6071138U JP S6071138 U JPS6071138 U JP S6071138U JP 16198883 U JP16198883 U JP 16198883U JP 16198883 U JP16198883 U JP 16198883U JP S6071138 U JPS6071138 U JP S6071138U
- Authority
- JP
- Japan
- Prior art keywords
- resist coating
- coating equipment
- tube
- view
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のレジストコーティング装置を示す断面図
、第2図はこの考案のレジストコーティング装置の第1
の実施例を示す断面図、第3図は第1の実施例のチュー
ブの縦断面図および横断面図、第4図はこの考案の第2
の実施例を示す縦断 。
面図および横断面図である。
11・・・・・・レジストコーティング用チューブ、1
2・・・・・・細線。Fig. 1 is a sectional view showing a conventional resist coating device, and Fig. 2 is a cross-sectional view showing a resist coating device of the present invention.
3 is a longitudinal sectional view and a cross sectional view of the tube of the first embodiment, and FIG. 4 is a sectional view showing the second embodiment of the invention.
A longitudinal section showing an example of. They are a top view and a cross-sectional view. 11...Resist coating tube, 1
2...Thin line.
Claims (1)
端から導出して細線を有することを特徴とするレジスト
コーティング装置。A resist coating device characterized in that a resist coating tube has a thin wire led out from the tip of the tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16198883U JPS6071138U (en) | 1983-10-20 | 1983-10-20 | Resist coating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16198883U JPS6071138U (en) | 1983-10-20 | 1983-10-20 | Resist coating equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6071138U true JPS6071138U (en) | 1985-05-20 |
Family
ID=30355843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16198883U Pending JPS6071138U (en) | 1983-10-20 | 1983-10-20 | Resist coating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6071138U (en) |
-
1983
- 1983-10-20 JP JP16198883U patent/JPS6071138U/en active Pending
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