JPS6070843U - Shielding plate for reticle masking - Google Patents
Shielding plate for reticle maskingInfo
- Publication number
- JPS6070843U JPS6070843U JP16067783U JP16067783U JPS6070843U JP S6070843 U JPS6070843 U JP S6070843U JP 16067783 U JP16067783 U JP 16067783U JP 16067783 U JP16067783 U JP 16067783U JP S6070843 U JPS6070843 U JP S6070843U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- reticle
- reticle masking
- masking
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のレチクルマスキング用遮蔽構造を示す斜
視図、第2図は本考案レチクルマスキング用遮蔽板の分
解斜視図、第3図は同じ(その遮蔽板を取り付けた状態
の一部切欠側面図である。
11・・・遮蔽板、12・・・開口部、13・・・取枠
、14・・・円筒部(保持機構)、15・・・レチクル
フレーム、16・・・レチクル押え板、17・・・螺子
。Figure 1 is a perspective view showing a conventional shielding structure for reticle masking, Figure 2 is an exploded perspective view of the shielding plate for reticle masking of the present invention, and Figure 3 is the same (partially cutaway side view with the shielding plate attached). It is a figure. 11... Shielding plate, 12... Opening part, 13... Frame, 14... Cylindrical part (holding mechanism), 15... Reticle frame, 16... Reticle holding plate , 17...Screw.
Claims (1)
沿って下部方向に突き出した光の廻り込みを防止するた
めの取枠とレチクルフレームのレチクル押え板取り付は
螺子に嵌合せしめるための保持機構を設けたことを特徴
とするレチクルマスキング用遮蔽板。A rectangular opening is provided in the center, and the mounting frame and reticle holding plate of the reticle frame are fitted with screws to prevent the light that protrudes downwards along the edges of this opening from going around. A shielding plate for reticle masking characterized by being provided with a holding mechanism for
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16067783U JPS6070843U (en) | 1983-10-19 | 1983-10-19 | Shielding plate for reticle masking |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16067783U JPS6070843U (en) | 1983-10-19 | 1983-10-19 | Shielding plate for reticle masking |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6070843U true JPS6070843U (en) | 1985-05-18 |
Family
ID=30353340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16067783U Pending JPS6070843U (en) | 1983-10-19 | 1983-10-19 | Shielding plate for reticle masking |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6070843U (en) |
-
1983
- 1983-10-19 JP JP16067783U patent/JPS6070843U/en active Pending
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