JPS607006U - Film thickness measurement device using polarization spectrometer - Google Patents
Film thickness measurement device using polarization spectrometerInfo
- Publication number
- JPS607006U JPS607006U JP9855083U JP9855083U JPS607006U JP S607006 U JPS607006 U JP S607006U JP 9855083 U JP9855083 U JP 9855083U JP 9855083 U JP9855083 U JP 9855083U JP S607006 U JPS607006 U JP S607006U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- polarizer
- film thickness
- measurement device
- thickness measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の偏光分光計による膜厚測定装置を示す路
線的側面図、第２図は本考案による偏光分光計による膜
厚測定装置の一例を示す路線的側面図、第３図はスクリ
ーン上に投影きれた像の一例を示す正面図である。
１はレーザー光源、４は薄膜、６は偏光子、８は検光子
、１０はスクリーンである。Fig. 1 is a schematic side view showing a conventional film thickness measuring device using a polarization spectrometer, Fig. 2 is a schematic side view showing an example of a film thickness measuring device using a polarization spectrometer according to the present invention, and Fig. 3 is a screen FIG. 3 is a front view showing an example of an image projected onto the screen. 1 is a laser light source, 4 is a thin film, 6 is a polarizer, 8 is an analyzer, and 10 is a screen.
Claims (1)
薄膜測定資料面に対して斜めに上記レーザー光線を入射
させるレーザー光源と、該レーザー光源と上記資料との
間において上記レーザー光線上に配置される偏向子と、
上記資料の表面にて反射された上記レーザー光線を受光
するスクリーン又はテレビカメラと、該スクリーン又は
テレビカメラと上記資料との間のレーザー光線上に配置
された検光子と、上記偏光子と上記検光子との間におけ
る上記レーザー光線の通路上に配置された補償板と、上
記偏光子と上記資料との間において配置され、上記レー
ザー光線を、上記資料に達する以前においてホーカスさ
れるレンズとよりなることを特徴とする偏光分光計によ
る膜厚測定装置。a laser light source that emits a laser beam in parallel with a predetermined area and makes the laser beam incident obliquely to the surface of the thin film measurement material, and a polarizer that is placed on the laser beam between the laser light source and the material; ,
a screen or television camera that receives the laser beam reflected on the surface of the material; an analyzer placed on the laser beam between the screen or television camera and the material; the polarizer and the analyzer; a compensating plate disposed on the path of the laser beam between the polarizer and the material; and a lens disposed between the polarizer and the material to focus the laser beam before it reaches the material. A film thickness measurement device using a polarization spectrometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9855083U JPS607006U (en) | 1983-06-24 | 1983-06-24 | Film thickness measurement device using polarization spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9855083U JPS607006U (en) | 1983-06-24 | 1983-06-24 | Film thickness measurement device using polarization spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS607006U true JPS607006U (en) | 1985-01-18 |
Family
ID=30233926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9855083U Pending JPS607006U (en) | 1983-06-24 | 1983-06-24 | Film thickness measurement device using polarization spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS607006U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63159271U (en) * | 1987-04-04 | 1988-10-18 |
-
1983
- 1983-06-24 JP JP9855083U patent/JPS607006U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63159271U (en) * | 1987-04-04 | 1988-10-18 | ||
| JPH0313976Y2 (en) * | 1987-04-04 | 1991-03-28 |
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