JPS6069532A - Indentation hardness tester - Google Patents

Abstract

PURPOSE:To obtain length signals of the 1st and the 2nd diagonals of an indentation given to a sample by using a linear scanning image pickup device to makes a linear scan on the indentation and pick up its image. CONSTITUTION:Light from a light source 44 is made incident to the sample 2 mounted on a sample placing table 1 through the lens 45 provided in a cylinder 42, the half-mirror provided in a cylinder 41, and the lens 47 provided in the cylinder 41. Its reflected light is made incident to the linear scanning image pickup device 21. Solid-state image pickup elements are arrayed linearly in a line on the reverse surface of a movable board 22 so that the array line passes the axis (a) of a holding base 23 and coincides with a line c-c crossing a line b-b at right angles. The linear scanning image pickup device 21 is driven and controlled with pulses from a clock pulse generating circuit 50. Then, the linear image pickup device 21 makes the linear scan on the indentation 3 of the sample and picks up its image in an in-focus state.

Description

Detailed Description of the Invention The present invention applies an indenter to a sample such as a metal material to make a square pyramid-shaped or spherical indentation on the sample. Measure the lengths of the first and second diagonal lines, and measure the hardness of test 1 from the lengths of the first and second square lines. Also, if the pressure line is spherical, , measure the diameter of the indentation, and from that diameter, try l
This paper relates to the method for measuring the hardness of indented sand Iα.

In this way, when the indentation type hardness d1 is applied, a square pyramid-shaped pressure that is conventionally applied to the sample is applied using the scanning source imager 4.
Scan the layer image, and from the layer image output, the first and second indentation j2
Obtain first and second diagonal length signals representing the length of the diagonal of A specially designed structure has been proposed.

However, with the conventional indentation type hardness J1 and A3 having such a configuration, it is difficult to scan the entire area of the indentation two-dimensionally as a scanning imaging device. The configuration for obtaining the first and second diagonal length signals from the silver image output of the first scanning imager may be extremely complex, or the first and second
It has the disadvantage that it takes a relatively long time to obtain the diagonal length information.

J, one (, the present invention is a novel one (
11 is proposed as a hardness tester and is spelled lυ, which will become clear from the detailed explanation below.

FIGS. 1 and 2 show an example of the mechanical configuration of a push-in sand I-destructor according to the present invention, which has a sample mounting table 1 that can be moved up and down.

This sample mounting table 1 is used in the same way as a normal push-in type hardness tester (Fig. 3). It is used to make a four-sided pyramid-shaped indentation 3 as shown.

The sample mounting table 1 is configured to be raised and lowered by the configuration described below.

That is, the cylindrical body 5 is fixedly arranged on the base 4, and the cylindrical body 5
Inside, a cylindrical body 6 with the above-mentioned sample mounting table 1 attached to its free end is housed so as to be movable up and down. In this case, a base [7 is attached to the inner peripheral surface of the cylinder 6. On the other hand, a screw shaft 9 is pivotally attached to the base 4, and is screwed into the base vA7 of the cylinder 6 (above), and has a gear 8 attached to its free end. Also, a motor 10 is mounted on the base 4, and its rotating shaft 11 is
A gear 12 attached to it, a gear 13 pivoted to the base 4,
Top) It is connected to the screw shaft 9 via the bored screw @9 and the screwed gear 8.

Therefore, when the heater 10 is rotated in the forward direction, the screw 1119 is rotated in the forward direction, and accordingly, the cylindrical body 6 is loaded and the sample mounting table 1 is raised. Furthermore, when the motor 10 is driven to rotate in the opposite direction, the screw shaft 9 rotates in the opposite direction, and accordingly, the cylinder 6 descends, and therefore the sample mounting table 1 descends.

Further, an example of the push-in type hardness tester according to the present invention includes an imaging device body 20.

The imaging device mounting body 20 includes a movable platen 22 on which the -dimensional scanning imaging device 21 is mounted, and a holder 23 on which the movable platen 22 is movably mounted.

The holder 23 includes a cylindrical portion 24, an annular portion 25 integrally extending outward in the radial direction from the cylindrical portion 24, and an annular portion 25 integrally extending upwardly from the outer periphery of the cylindrical portion 25 from the outer peripheral portion of the cylindrical portion 24. It has an extending cylindrical portion 26 and a plate portion 27 that integrally extends inward in the radial direction from the upper end of the cylindrical portion 26. in this case,
A slit 29 is provided in the plate portion 27.

In the holder 23, the upper end of a cylindrical body 41 (described later) is fitted into the cylindrical part 24, and the lower end surface of the cylindrical part 24 is integrally moved from the outer periphery of the cylindrical body 41 in the radial direction. It is fixedly disposed around the cylindrical body 41 using suitable fixing means (not shown) while being received in a ring portion 42 extending outwardly.

Moreover, between the movable m 22 L and L mentioned above, the ring part 25 and the plate part 27 of the holding body 23, lines b- and t+ passing through the axis a of the holding body 23 and perpendicular thereto are formed. , arranged in a movable manner.

In addition, the movable platen 22 has, at its -L section, integrally with this,
A rod 33 is attached. This lever 33 passes through a slit 29 provided in the plate portion 27 of the holder 23 and extends upward and outward. l5 in a plane perpendicular to the axis a of the holding body 23
A lead screw 34 extending on a line parallel to ill)-11 is provided.

-h, as mentioned above, the motor 3 is placed on the plate portion 27 of the holder 23.
5 is removed (=J), and the screw 37, which is screwed into the center screw 34 installed in the bolt 33, is attached to the rotating shaft 36.
=J has been done.

Therefore, if the Tanabata 35 is rotationally driven in the forward direction, the movable QRA 22 will move along the line 1)-1] perpendicular to the axis a of the holder 23 in the first direction. and also,
When the motor 35 is driven to rotate in the opposite direction, the movable platen 22 rotates along the line 1) perpendicular to the axis a of the holder 23.
It moves in a second direction opposite to the Ij direction.

Furthermore, as will be clear with reference to FIG.
) solid state IgI detection (photoelectric conversion element) L: n'+
, "(1,1-+)', ---13+', Lo, E1,
E, .

As is clear with reference to FIG. 2, such a -dimensional scanning 1jd imaging device @21 has solid image removal elements IE IT' to E1' on the lower surface of the above-mentioned movable plate 22.

EO, E+ to En are arranged one-dimensionally on a line, and the arrangement line passes through the axis a of the holder 23 and aligns with the axis J1 of the holder 23 (see the above-mentioned line). It is arranged so as to coincide with the line C-C which is perpendicular to bb.

On the other hand, a support body 40 is provided on the base 4 described above, and the cylinder body 41 described above is removed from the holder 40.

This cylindrical body 41 has one end facing the sample mounting table 1 so that its axis (J = i) extends in the vertical direction of the mounting table 1. j! There are several words written in J type 40.

Further, the cylindrical body 41 is integrally provided with a piece plate 42 that extends outward in the radial direction.

Ru.

Therefore, the cylindrical body 41 and the plate 42 or the above-mentioned holder 23
The cylinder body 41 is fitted into the cylinder part 24, and the lower end surface of the cylinder part 2/I of the rotary plate 23 is fixed and mounted with the plate 42 receiving it. ing. Therefore, the axis a of the holding body 23 described above coincides with the axis d of the cylindrical body 711.

Further, a cylindrical body 713 communicating with the cylindrical body 41 is attached to the cylindrical body 41 from the side thereof, and a light source 44 is disposed within the cylindrical body 43.

However, the light from the light source 44 is placed inside the cylindrical body 42.
A half mirror/16 provided in the cylindrical body 41
The reflected light is transmitted through the lens 47 provided in the cylinder body 41 to the sample 2 placed on the sample mounting table 1. Through,
- It is configured so that QJ b can be input to the 21-dimensional scanning transport fΦ.

J: Mechanical 41 of the indentation type hardness tester according to the present invention
11, - an example clearly caused a roar.

Next, with reference to FIG.
An example of the electrical configuration of the push-in hardness tester according to the present invention is as follows:
Let me explain it along with its operation.

As described above, the light from the light source 44 enters the sample 2 via the lens 45, the half mirror 46, and the lens 47, and the reflected light passes through the lens 47 and the half mirror 46 to perform -dimensional scanning imaging. By entering the device 21,
Imaging output (generally referred to as S) that scans and images the sample one-dimensionally from the -dimensional scanning imaging device f121
is obtained.

In this case, the -dimensional scanning 1 imaging device 21 is shown in FIG.
As shown in FIG. 4B from the clock pulse generation circuit 50,
”: The drive is controlled by the beat lock pulse CP.

By the way, as described above, the -dimensional scanning imaging device 21 has a large number of solid-state image elements E,,',E(,.

-,)l......E+',E. ,E+
, E+ .

Therefore, the imaging output S is the solid-state yd image probe [11'+E(
n-+)'---E+', FD, [+, E+
-...E The photoelectric conversion outputs obtained at each of E n are generally S
n', 5(n-Q'---8z', So, S
l, S2...Sn are obtained as those that are sequentially boned.

Now, a diagonal line connecting opposite points PX and PX' of the quadrangular pyramid-shaped indentation 3 shown in FIG. As shown in Fig. 4A, the line extending including the first diagonal line is LXo, and the diagonal line connecting the other opposing points PY and PY' Draw the line that includes and extends the second diagonal line. Furthermore, the intersection point of the line LX and 1fALY'fl is moved.

J: The line LXO seen on the plane containing the surface of 12
and in the Flz line, from the line LXO in the direction orthogonal to IQ L 1
As shown in FIG.・・・・・・L
Let it be Xm. Further, parallel to the line LXO, in a direction perpendicular to the line LXo, toward the point PY' side,
LX1' is a plurality of m lines extending sequentially at equal intervals of 0 up to the range having the above-mentioned width f/2.

LX+',......Lx, 11'.

In addition, a line LY passing through the point PY, seen on a plane including the surface of the sample 2 of the indentation 3, attached to the sample F42 on the sample mounting table 1
, and a line perpendicular to the line LYO passing through point PY' is LXD o.

Also, in parallel to filL X' U, FAL
From LJ a, towards the point PY' side, a plurality of 0 lines are extended sequentially at the above-mentioned interval e to a range with a width 111 smaller than the length of the second diagonal line. , LXUI', LXLh', etc. as shown in FIG. 4A.
...LXLI,'. Furthermore, line L
Parallel to IJ a, from the line LXUO toward the side opposite to the point PY' side, the above-mentioned width 1) is a range with a width h2 equal to 1 but smaller than each of the above-mentioned widths. Interval e
As shown in Figure 4A, a plurality of q lines extending by taking .
X Uq and ゛.

Further, in parallel with the line L
The lines of the book are shown in Figure 4 Δ1: L X D +
, L X D+ ---L X Dp:, A'le,
-Also, parallel to the line L X D o, the line L'X D
From o toward the side opposite to the point PY side, the above-mentioned width h
Figure 4A shows a plurality of q lines extending sequentially at the above-mentioned intervals C up to a range of 1-J,
Sea urchin, I-XD+', LXD+' ---LXD
q Dozuru.

However, the above-mentioned FillXa on the sample 2 placed on the sample mounting table 1 is viewed from the direction along the axis 0 of the above-mentioned holder 23, and therefore from the direction along the above-mentioned axis d of the cylinder 41, The solid-state image sensing elements E1, '~E+'', Eo, E+~En of the one-dimensional scanning 1st tgA device 21 are parallel to the array line C-C, and the array line C-
It is assumed that the sample 2 is placed on the sample mounting table 1 with its position adjusted in advance so as to substantially coincide with C.

Further, the holder 23 and the sample mounting table 1 are located at a relative position (this is referred to as a focused position) where the -dimensional imaging device 21 performs a -dimensional scanning m image of the indentation 3 of the sample 2 in a focused state. too,
Relative position that is descending (this is called the reference position)
It shall be assumed that

In such a case, the outputs S n ′ to St ′ + So + S+ to Sn, which constitute the ml image output S obtained from the one-dimensional scanning bag imaging device 21 for each scan, are shown in FIG. tJ,′) shown in C is obtained.

That is, for example, the output 811'~·S(o −2)',
Output] S□-2 to Sn take almost the same level, and the output Sn-+' to S+', 80, S+ to 5(n
-I) is the output Sn'~5(n-2)' and S(n -
+l ~ Although it takes a small level compared to Sn, the output S(n
-2)' to 31', output S(u -+)'
The outputs in the vicinity of S(n -3)', S(n -hl
'-・=- takes on successively smaller levels from the level of output) rSn-2', and output 5( 11-3), 5
(11-1)...... is the output S (low +
), successively smaller levels are taken to obtain 1q.

In this case, the outputs Sn' ~ S(n - +)' and S
(,.

-2) ~S 11 are almost at the same level because
Their outputs S 11' to S(t, -7)' and S(n
-+) to the solid-state image sensor E11''.
〜・E(n −+)′ and E(n −r)〜E, are l
This is the output of fl Ii.

Yolζ1. Output S(n -1)', S(.-+1'
, S(.-4)' . . . take on successively smaller levels, and the outputs S(n - 1), S(n -
, ), S(n −+) , '・'・'・”' is,
The level that goes down sequentially is output l5(n-+
)' + S(n -1)' S(n -h)' , -
-- is the solid-state image sensor E(n -1
)', E(n-+)', E(.-1)'...
. . . is the output of the imaged image, and the output S(.

-2), S(n-+).

S (n = 1) ...... solid-state image sensor E (n - +), E (n − r)
, E(n-t)''... is the output of the imaged image.

Note that, as described above, the hollow line LXo (above) indicates the solid-state imaging probe E1. of the -dimensional scanning imaging device 21. '～E+'
, Eo, E+ to E11, the sample 2 is placed on the sample mounting table 1 so as to be parallel to and approximately coincident with the above-mentioned arrangement line C-C. There are, but
If the holder 23 and the sample mounting table 1 are relatively at the focused position described above, the above-mentioned outputs 811' to S+ obtained from the -dimensional scanning imaging device 21 for each scan are obtained.
' , So , St ~S+1 are obtained in the same way as described above in FIG. 4C, but in this case the outputs Sn ' ~
As shown in the fourth diagram, S+ ' + So + Si "Sn ' is 1!7 at a human level compared to the case where the relative position of the holder 23 and the sample mounting table 1 is at the above-mentioned reference position. and the above-mentioned output 5(n-+)',
5(n-i)', 5(n-+1'``''=''' becomes smaller sequentially, and the output S(n - r), 5(n
-+), S(n -i)...... are shown in the fourth diagram, depending on the relative relationship between the holder 23 and the sample mounting table 1. Compared to the case where the position is at the above-mentioned reference position, the position is increased by 1q per person.

From the one-dimensional scanning imaging device 21, for each scan, -F output S is given. The imaging output S obtained from the sequential array C of ' to S+', So, and Sz to S1 is supplied to the arithmetic processing circuit 51.

Now - from the one-dimensional scanning imager 21, for each scan 1!1
, the output S , n ′ ~ St ′ * So ,
Outputs S.'~Sz', So, S of Si''□ S u that are sequentially forwarded for 11 scans from E1 at a certain time.
i to S n, as shown in FIG.
, :2nd output S+n'~S++'
+S+ o * St +~Srn:・・・・・・・・・
・0th output Sun'~Su +', Su
01 Su + ~Su□.

At that time, the above-mentioned arithmetic processing circuit 51 performs the first (i=1
．． 2......U)th output Si 11'~
S + + ' ・Sin ・SKI 〜From Sin・
Δ S + n' = S i n' S i (
+1 − 1) 'ΔS+(n −+)' = St4n
−+)' 5z(n −+)'ΔS i + '=
Si I' Si fi△S+ + =S+ + S
z O ΔS + l =S+ r S: + to SIn =S+ II -8: (r+ -+)
)' , . . . △Si 1' , △s11
, △si+ ...... △S1,1 is obtained, and cl is used as the difference output Sr n ' ~ △St t '
The maximum difference output among N △s+ + ~ △Sz n (this is covered as △S1) is determined and memorized, and as shown in Fig. 6B, the output of the positive polarity pulse 1〕1 is overwritten. .

In this way, the arithmetic processing circuit 51 sequentially obtains pulses P+, , p, .

These positive polarity pulses P+, P+...P
u is the motor 1 described above through the [-all drive circuit 52
0 will be given 1 bar.

The seventh circuit 10 has positive polarity pulses P4, Pi...
...Pu is sequentially supplied in the negative direction, and the tube rotates sequentially in the forward direction.

For this reason, the above-mentioned sample mounting table 1 rises step by step from the upwardly bent reference position.

In this case, the gear ratio between the gears 12 and 13 described above is changed so that the position at which the sample mounting table 1 has finished stepping up is above the focused point position described above. The ratio, the pitch of the thread of the screw shaft 9 and the pitch of the main thread 7 of the cylindrical body 6 are selected.

Further, the arithmetic processing circuit 51 outputs the above-mentioned pulses P1 to P of positive polarity ↑4, -I"4't, and as shown in FIG. 6B, (" pulses p of negative polarity, 1. - Output P1' sequentially.

These negative pulses 1]1' to Pu' are supplied to the motor 10 via the motor drive circuit 52 described above.

The motor 10 receives negative polarity pulses P+', P+'...
. . . Each time Pu' is sequentially supplied, the step rotation is reversed in the opposite direction.

Therefore, in accordance with this, the above-mentioned trial 1 mounting table 1 is
From the above-mentioned -R position, the sample mounting table 1 returns to the -/C reference position.

The arithmetic processing circuit 51 also processes the above-mentioned 9-polarity pulse P.
Between J: when outputting pulses 1' to Pu' in sequence, or after outputting pulse Pu', upper) small l,: maximum output horn △ S ,, △ S 2 ,...
. . . Determine the maximum 1ii'j in ΔS1 (this is the maximum differential output ΔS of No. 1 among the maximum differential outputs).

However, after outputting the pulse Pu' described above, 1' positive pulses P1'' to P7'' are output, and these positive pulses P1'' to P,'' are used by the motor drive circuit 4L is supplied to the motor 10 via 52.

Accordingly, the motor 10 again rotates seven times in the forward direction, and in response, the sample mounting table 1 takes a step f2F and maintains the upper stomach position.

By the way, as mentioned above, the IC maximum difference output △St , △S7, ・
......The maximum difference output ΔS in ΔSu is the fourth
As is clear from the above description, when the device 21 is in the focused state and the 124th scan is the most focused image (, the -dimensional scanning imaging device 21, the output Srn obtained at a high level
'~Sr+', Sro+, Srl~s1°.

In addition, the maximum difference output △S+, △S7, etc. mentioned above
...The maximum difference output other than the maximum difference output ΔST in ΔSu is the -dimensional scan VQ l!, as is clear from the above description in FIG. 4C. 1; When the I device 21 scans and images the sample 2 in an out-of-focus state, there is 1q C that can be obtained from the output horn obtained at a low level from the -dimensional scanning image pickup device 21.

Therefore, based on the pulses [,)1'' to Pr'' mentioned above,
The position where the sample stage 1 is raised stepwise as described above is
- Dimensional scanning 1 The root image device 21 is scanning the sample 2 i[1* in a focused state, which is the above-mentioned focused point position.

Therefore, after the trial unit 1 maintains the in-focus position -C, the ll1i image output S obtained from the -dimensional scanning imaging device 21 is:
obtained at a high level.

After the sample stage 1 maintains the in-focus position as described above,
The arithmetic processing circuit 51 generates negative polarity pulses G1+ to G
Outputs 1 in.

These 111 negative polarity pulses G 1 + to G1□ are
It is supplied to the motor 35 mentioned above via the seven-star drive circuit 53.

'Shitata 35 is pulse G1+, G1+...
...G 1 m lfi Step rotation in the forward direction one after another when it is calmed down. In response to this, I have stated - ,+1
Board 22 is the above-mentioned l! Cured to JIb-b, line LX mentioned above.

Move sequentially towards the ' side. In this case, the pitch of the screw 37 attached to the rotating shaft 3G of the motor 35 and the main screw 34 of the rod 33 of the iiJ moving platen 22 is jil+a82
2 are sequentially selected to move stepwise by intervals e as described above.

j: So, the above-mentioned line LX,l+' on the sample 2 is parallel to the arrangement line C-C of the above-mentioned solid-state image sensor [1,'-E+'N EOl and 1-Fn, and - A relationship is obtained in which the wiring 'c-c' approximately match.

As I just said, try it! “l 2 J-’s above-mentioned line 1-
The above-mentioned outputs Sn' to St' are sequentially performed for (2m+1) scanning times from time t2 after a relationship in which X,' substantially coincides with the above-mentioned array line C7C is obtained.
So, S+ to Sn, as shown in FIG. 7A, as shown in FIG. 6A'C'', the first output QXL
m n ′ −□QXLm+ ′.

QXCmo ', QXRm + ' ”□QXRT1
111': Second output QXL(m - +1n'
~QXL(m-+)+', QXC(vn-+)
a', QXR(m-+)+'~QXRCm-l)
n': 1st output QXI+
n'~QXL+ +', QXC+. ', QXR+
+ ~QXR+ ,' :(n++1)th output QXLon ”QXLo + ,QXCo a ,Q
XRo I ~QXRO1: (Ill-1-2)th roll IQX L+ n ”QX L+ + , QX
C+ 0 , QXRr + ~QXR1n :th (m
+3) th output QxL+ n ~QxL+ + , Q
XC+ o , QXRr + ~Q
L+++1+ “QX L−m +, QXCWl
o.

QXRm+ ~QXRm,, etc.

Then, the above-mentioned speech processing circuit 51 executes the j'th j'(j' = m, (m-1), . . .
・1) Second output QXLj,' ~QXLJ I'
.

QXCJO', QXR;
n −+)' △QXI−,=(n −+)′ =QXL, +(n −
+)'QX L, +(n -+)' △QXLj l ' -QXLj l ' - QXCJ0
' △QXRj l '-QXlnujl' - 〇XCJo'△QXRjn' =QXRj + '-QXR, +
+' △QXRj n' =QXRj n'-QXR-(n
-+)', the difference outputs ΔQXLin', ΔQXLJ(n
−, )+ +−・・−+−QXLJI ', △QXR
j+', ΔQXRJ 2' ・・・・・・・・・・・・
...QXI is 44. ′ is obtained.

In addition, the above-mentioned differential output ΔQXLi+'~QXL.

′ are sequentially stored in an array in that order.

Then, when looking at the array sequentially from the difference output △QXL=+' side to the difference output △QXL, +n' side, after the plurality of difference outputs with positive values are sequentially 1q, the difference output with a value of zero is The position on the array where the difference output (this is overwritten as ΔQXLj') where the difference output is obtained first is determined.

Then, output (G) representing the array length from the position on the array where the difference output ΔQXLj' is 1q to the array position J'L where the difference output ΔQXLJI' is obtained (this is written as WXLJ
' ) is memorized.

Similarly, when looking at the above array in order of difference output △QXRJ+'hrt difference output △QXRj,,',
After a plurality of output horns with positive values are obtained sequentially, the difference output with a value of zero;
' ), determine the position on the resulting array.

Then, the output corner representing the array length from the position on the array where the difference output △QXRj' is obtained to the position on the array where the difference output
j ').

] From the outputs WXL, ′ and WXR, +′, which do not represent the array length mentioned above, IVIXJ ′ = WXl−J ′ −+ WXRJ
Obtain the output MXj which is divided into four tables and store it. As shown in Figure 7B, pulsed 1×,
′ is output.

-, the arithmetic processing circuit 51 which has been improved is the above-mentioned IC number (
m+1)th output Q X l-On ~ Q X l-
o + , QXCo O, QXRo + ”QXRo
Store n, and then ΔQX LO+1=QX LOn −QXLo(n−+1 ΔQX Lo(, + −1)−QX l n(n −t
)QX Lo(+1- +) △QXLo + =QXl-o + QXCo OΔQ
XRD I =QXRD l -QXCQ C△ QX
RD r =QXRo y −QXROl△QXROn
The difference output △QXI-on, △Q
)---QXLo+ , △QXRO1, △QXRa r
・・・・・・・・・・・・・・・・・・QXRD、、
get.

Further, the above-mentioned differential output ΔQXLOI to QXL. . of,
The array is stored sequentially in this order.

Then, when looking at the array sequentially from the differential output △QXLo+ side to the differential output △QXLO11 side, after a plurality of differential outputs with positive values are obtained sequentially, the differential output of zero (+0 C is obtained first) Determine the position on the array where the obtained difference output (denote this as Δ) X L O) is obtained.

Then, the output representing the array length to the position on the array where the 9 output △Q WXL+) is stored.

Also, when looking at the above array sequentially from the differential output △QXRo+ to the differential output △QXR,, similarly, multiple differential outputs with positive values are obtained sequentially, and 1 and 0 values are obtained sequentially. Determine the ``seconds place'' of the resulting array of the difference output (which is defined as ΔQ X Ro) where the difference output is obtained first.

Then, the position on the array where the difference output △QXRゎ can be obtained,
, the position in the array - where the difference output △Q
I remember RO Dozuru).

Then, the outputs WXLO and W representing the array length mentioned in -
XRohlt et al., the output MXO is 19 and is stored as MXO=WXLO-4-WXRO.

Therefore, as shown in FIG. 7B, the pulse l'X.

output layer.

Furthermore, the above-described arithmetic processing circuit 51 performs the J-th (j=1.
2...m)th output QXLj.

~QXLj+,QXC,+0,QXR=+~
Store QXRjn, and ΔQXL, + n =QX1. ．． = ,,-QXLj(
. −1) △QXL, +(n −+) = QXl−, +(n −+)
QX Lj(n −+1 △QXLJ + =QXLJ+ −QXCJO△QXR
= +-QXR= +-QXC=.

△QXRi r =QXR, + + QXRJ+△QX
R, t n =QXR; n - Q X Rj (□-1) Difference output △QXL; n, △QXLj (++
-+)...QXLJ +, ΔQXR;
+ , △QXRi+ ・・・・・・・・・・・・・・・
...QXRj, , is obtained.

Also, the difference output ΔQXLJI ~QXL, 11
are sequentially arrayed and stored in that order.

Then, when looking at the array sequentially from the differential output △QXLJ+ side to the differential output △QXLj, l side, after multiple differential outputs with positive values are sequentially performed, the differential output with a value of zero is 1 for the first time in T2
Determine the position on the array where q is output (deliver this by △QXLj).

From the position on the array where the difference output △Q Store the output (overwrite this as W X L j ).

Also, when looking at the above array sequentially from the difference output △QXRJ + to the difference output △QXR, trt side, similarly, after the plurality of difference outputs with positive values are sequentially fWed, the difference outputs with a value of zero are The position on the array where the difference output is first obtained (this is covered by ΔQXRj) is determined.

Then, write an output representing the array length from the position of the array -[ where the difference output ΔQXRj is obtained to the position on the array where the difference output ΔQXR; + is obtained (this is referred to as WXR).

Then, from the outputs WXI-j and WXRj representing the array lengths above, 1q is stored as the output MXj represented by MXJ = WXLJ + WXRJ.

Then, as shown in FIG. 7B, the positive polarity pulse, ST IX
Output j.

As described above, positive polarity pulses HXm', 1-IX(+n-
'+)'...=-HX+', HXo, 1
-lX+, I''X+ ``'''''''Beak l-lXT11 is obtained.

These pulses t-1Xm', I'X(T11-1
1"-'...IX+', HXo'
, HX+ , l"X+ -・=-HX 11 is
It is supplied to the above-mentioned motor 35 via the motor drive circuit 53.

Sat-ri 35 (Pulse HXm', tl X(m
-1')', ---HX+', l-1Xo,
HX+, HX+...HXtn is 147
Each time the sub-assembly is rotated, the sub-assembly rotates in the forward direction. Accordingly, the above-mentioned movable rA22 moves along the above-mentioned line 1)-11
, and move step by step by the above-mentioned intervals ().

Regarding the sequential step movement of the driving pin 22,
The above-mentioned line C-C is the above-mentioned! From which relative position of the holder 23 approximately coincides with the ζ line LX Ill', the lines lX(m-+)', LXon'-7'
......lX+', LXo', l
X+ ・・・・・・1×, almost matching relationship is calculated by 1q.

Therefore, the output WXj% of the output MXj' mentioned above is
It represents the length of the indentation 3 of test 1812 from the center position O of the indentation 3 on the above-mentioned line LX4' to the side edge on the point PX' side.

The reason for this is that the output WXLJ' is equal to the difference output △Q mentioned above.
It is a point representing the array length from the position on the array where x L ;' is obtained to the position on the array where the difference output ΔQXL=+' is obtained by 1q. On the other hand, when the differential output △QXL;' sequentially arranges the differential outputs △QxLJ1' to QXLjn' and views the array sequentially from the differential output △QXLj+' side to the differential output ΔQLjn' side, After a plurality of difference outputs with positive values are obtained sequentially, the difference output with a value of zero is the first difference output obtained. Therefore, the differential output ΔQXLj
The positions on the array where ' is obtained are shown in Figure 4 C and D, and the general output S n ' + 5 (n- + n'...
...S+', So, S+, Sz...
As is clear from the above description of the levels of S(+, -+) and S11, C corresponds to the side edge of the indentation 3 on the point PX' side on the double line LX4' Because there is.

Furthermore, the output WXR4' of the output MXj' mentioned above is
For the same reason as mentioned above, the length C of the indentation 3 of the sample 2 from the center position O of the indentation 3 to the side edge on the point PX side is expressed along the line LXjM- mentioned above.

Therefore, the above-mentioned denomination, JMXJ', of the indentation 3,
-represents the length on the line IXj' mentioned above.

Roughly speaking, the above-mentioned outputs M
It represents the length on XO and LXj.

Also, tube manufacturing processing circuit 511, 10) output pulse HXv
n', HX(m-+)', ---1-IX+
', l-1Xo, LI X+, l-I
((4 positive polarity pulses G2+, G2,...
...outputs C2 wa.

These pulses G2t, G2z,...
02g (Ma, Shi - Through the entire drive circuit 53, the motor 35
supplied to

The recorder 335 outputs pulses G2+, G2+...
. . 02g is supplied, and sequentially rotates stepwise in the forward direction, and accordingly, the above-mentioned movable plate 22 becomes such that the above-mentioned line C-C is approximately aligned with the above-mentioned line LX. 23 From which relative position, the above line 1+-
Along line b, it sequentially moves step by step towards line LXU2', which is indicated by 2). In this case, line LXtn and line 1-XU
, ' is nine times the interval e described above.

Therefore, when the forward step rotation of the motor 35 stops and the step movement of the movable a 22 stops, the movable plate 22 moves along the line 1-XU on the sample 2, ' is the solid-state image element E n '~[I' + [O
The relative position with respect to the holder 23 is maintained, which approximately coincides with the arrangement line C-C of r E I ""-E T+.

As just mentioned, the holder 23 is connected to the above-mentioned array line C-C
However, a relationship is obtained in which the line L
-1-1) The above-mentioned output So that is sequentially scanned 19 times
'~St', So, 81~Sn are shown in FIG.
"Time 1" output QXUI.

n'~QXULp+',QXLJCP+'
, QX1noRF+'・~QXURPn' : Second output QXUL(P −+)n'□"QXUt
−(p −+)+ ′, QX Shino C(r −+)
o', QXLノR(r-1)+'~
QXUR'(, -1). :・・・・・・・・・1st) output QXU11 IT'□"QXUl-+ +
' , QXUC' to.

QXLJR+ + '~QXUR+ n': No. (
, +> +1)th output QXUlo 11~QXU
LO+, QX and ICon, QXUI o+ ~
QXL Ran: (u+2)th output QXU
L+ n~QXUL1 +, QXLノC+ o,
QXUR+ + ~QXUR111; (+1+3)th output QXUl+n ~ QXU 1-+ +, (:1
XUC+ 0, QXUR+ + ~QXL) Rin:
・・・・・・・・・(ll − Ill + 1)th output QXI to LFII+・Q X U l−q+
, Q X U C5゜, QXURql~QXUR,
,,.

Then, the above-mentioned I performance processing circuit 51 performs the h'th
(k ′=+1, (p −11・・・・・・・・・
2, 1) + to the 1st output QXULhn'~QXUl-
', QX(JCh o', QXIJRk+'
~QXURkn' is written tQ 1. /, deshi1C1 ΔQXULh n' =QXULh +,'-QX
ULII(i-) 1 △ QXULb(n -+) ' =QXULb(n
□ 1 '-QXULi, (n -2)' △QXULk+ ' -QXUl- + '-QXUC
k o ' △ QXURk + ' -QXLノ Ri:+'QX
UCko'△QXURkr' = QXURb + '-QXUR
k,' ΔQ X U Rh n' = Q X U F? h
Difference output △QX U lkn ', △QX expressed as 11QXURk(rl -+)'
U Lk(n −+)' ・・・・・・・・・QXUL
k+', △QX(ノRk,', △QXURk+'...
・・・・・・・・・・・・・・・QXL month is 11′
get.

t/;1m, difference output ΔQXtJLh +
' ~Qxul-, , ' are sequentially arrayed and stored in their order.

Then, when looking at the array sequentially from the output horn ΔQXULk+' side to the differential output ΔQ
Determine the position on the jq array of the difference output (this is △QXIJI, 'delete>) where the first protruding horn of the mouse is obtained first.

Then, the array length from the array position where the 4 outputs △QX(J1m' can be obtained to the array position where the difference output ΔQXUL, l++' can be obtained is expressed as C).
XULTI').

Manoko, set the above array to the left output △Q X IJ Rh
When looking sequentially from 1' to the differential output △QXURbn' side,
Similarly, after a plurality of difference outputs with positive values are sequentially lrl, the position on the array where a difference output with a value of zero is obtained first (this is written as △QXURk') is obtained. to determine.

Then, output (WXU
Rk') is stored.

Then, expressing the above array length, from ``output WXU'' and WXU+nu'', MXh' = WXtJl-'' -1-WXURb
Obtain an output MXUi, ' represented by ' and store it.

Then, as shown in FIG. 8B, the pulse t-+
′ is output.

Further, the above-mentioned arithmetic processing circuit 51 has the above-mentioned first) +
First output QXUL. 11~QXU1-o + ,Q
Store XIJCo a, QXURo + ~QXURon, and then C1 △QXU La r, =QXUL, OnQXLJL
o(n −11 /1QXULo(n −+)=QXULo(.−1)−
QXtJL. (n −,) ΔQXLJLD + =QXULn +−QXUCo.

△Q X (J Ro + = Q X URo +-
QXUCo.

△Q X U r< 1 + = Q X U Ro
)−(1)XURo+ △Q X U ROo= Q X IJ ROn, −
In Q X tJ l. , 1-1 C expressed difference output △QXUI-on, △QXULo(
1,-+)・・・・・・QXULa + , △
QXUR81, △QXtノRM・・・・・・・・・・・・
・・・・・・QXUR.

, is 1''7.

In addition, the above-mentioned difference output ΔQXULo+ to QXULo1.
are sequentially stored in an array in that order.

Then, convert that array to the difference output 〇 The difference output is the first difference output (this is △QXULa)
), determine the position of the array -L that is 1q.

Then, an output representing the array length from the position on the array where the difference output ΔQ X U L, + is obtained to the position on the array where the difference output ΔQ to remember).

Moreover, the above-mentioned array is used as the difference output △Q　X　(J　R.

+ Color difference m))△QXIJRa1. Similarly, when looking at the side sequentially, the plurality of difference outputs with positive values are sequentially 1'? After the difference output at the value of zero is first (q), the difference output at the value of zero is
Do this as △Q
From the position on the array where X U RO is obtained, the difference output △Q
The array from which XU, Ro+ can be obtained represents the length of the array up to the position of - and stores the starting point (this is returned as W X U Ro ).

- From the outputs WXULo and WXURo, which do not represent the array length as described above, tvl
Obtain the output M
(Outputs X U a.

Furthermore, the above-mentioned performance processing circuit 51 has the k-th (
k=1.2・・・・・・q)th output QXIJ
+ to l- ”QXUl- to +, QXUCkO, QX
, U I'<←1~QXURk, , and ΔQ X IJ L−h n = Q X U l−
kn-Q
. −1) QXtJ Lk(n −r) ΔQXLJ Lk+ =QXtJ l− +−QXUC
k.

△Q X U Rh + = Q X U Rk + QX
UCk.

ΔQXURk r = QXUr7k.

-QXtJ! So 11 △Q　X　U　Rb　n””　Q　X　U　Rkl.

−Q
(n-+)・・・・・・QXUIt + , △Q
×Old h1, △QXURk+ ・・・・・・・・・・・・
...QXURb.

get.

In addition, the above-mentioned difference output △QXU l-b k”□QXU
Lk11 are sequentially arranged and stored in that order.

Then, when looking at this array sequentially from the differential output △QXLJLb+ side to the Z output Jt\QXUI-kn side, the positive Hani-te differential output '$i'lli is obtained sequentially, and then zero. The value of (・) is the difference output that is calculated first.
(spelled as ULk), determines the iS device on the iq array.

・t' L "'c, an output representing the array from the position on the array where the difference output △QXLJI-b is obtained to the position on the array where the difference output △QXULk+ is obtained (this is designated as WXULk) ).

In addition, the above-mentioned array is changed to the sending horn △QXURk+'
Similarly, when looking at the bl I and sender/JAQXIJRkn sides in sequence, the difference output with a positive value? ! Two numbers are obtained in sequence, and after 'C, the difference output in the fraction of zero is obtained first; 1' Determine the position of the resulting array of output j (this is △Q X IJ Rk). do.

From the position of the array J- where the Z output △QXURk is obtained, the array where the difference output △QXURk+ is 1q.''
-Output representing the array length up to the f17 position (this is W
LI Rh).

Then, the outputs WXU, k and W, representing the above-mentioned array
From X U Rk, M X U h = W X U L k+ W X
The output M X U k represented by U Rk is stored as 111 . Then, as shown in FIG. 8B, the pulse I-
Output IXUk.

As described above, the stem processing circuit 5 Ibl sequentially pulses IXUp', HXU(p-1)', .
・・・・・・HXU+', HXUo, 1-IX
U+ ,)-IX(J+ ......day X t
J q is '+FJ.

Those pulses HXIJP', HXU(r −+1
'...=-l-lXU+', HXUo,
l-1XU+, HXU2...HX L
Jq is supplied to the above-mentioned motor 35 via the motor drive circuit 53.

Tanabata 35 is pulse 11 X IJ P', ll
X LJ(P-1)'+・・・・・・・・・1-IX
(J1', 1-IXIJo, l-4XU+, HX
U+ ・・・・・・・・・HX Every time U, falls, it rotates forward in the forward direction, and in response to this (, the above-mentioned possible i! IJl board 22 changes to From which relative position of the holder 23, the line 1.
．． X Move step by step to the side opposite to the m side.

By such sequential step movement of the movable platen 22,
From the relative position of the above-mentioned line OC to the holding body 23, which approximately coincides with the above-mentioned line LxuP', the line L
XUP-r', LX1--+' ””””l
UX+', 1-XUo, LXU+,...
. . . A relationship that almost matches LXUq is obtained.

Therefore, the output JWXUL of the output MXUk' mentioned above is
k' is the above-mentioned ICC10XDk of indentation 3 of test 12
'1- represents the length from the center position O of the indentation 3 to the side edge on the point PX' side.

The reason (j, the output WXULk' is the difference output △
(,)position of the array ``2'' that yields XLJLk'/)+
I et al., difference output △QX U 1. The J output represents the array length from the position of the array where +' is 1g to -. −
10,000, difference output △QXULk' is + to difference output △QXU1-
'=-QXLJI-t,,' is sequentially stored in an array, and when the array is sequentially viewed from the differential output △QX, ULk+' side to the differential output △QLko' side, the plurality of differential outputs with positive values. are sequentially 1q'd and C, and the difference output at a value of zero is the first difference output that is q'd.

Therefore, the positions on the array where the differential output ΔQXULk' is obtained are shown in FIG. 4C and D, and the general output Sn', 5(n
-+)'---8t', So, St.

As is clear from the above, point 1 of indentation 3 on the above-mentioned line LXUk'] X′
This is because it corresponds to the side edge.

Furthermore, the output WXURk' of the output MxUk' mentioned above is
The same buried peak as described above represents the length of the sample 2ρ indentation 3 from the center position of the indentation 3 to the side edge on the point PX side on the above-mentioned line LXUk'.

Therefore, the output MXUk' shown above represents the length of the indentation 3 along the line LXUk' mentioned above.

Furthermore, the above-mentioned outputs M X U o and M X U
h of the indentation 3 for the same reason as mentioned above.
The lengths on the above-mentioned lines L.sub.XU and L.sub.XUk are shown in four tables. However, the outputs M X U o and M
tJ k is obtained as zero since the lines LXUo and LXUk do not cross the indentation 3.

Further, the arithmetic processing circuit 51 processes the above-mentioned pulse N
P', 1''X U(p~,)',...
...1-IXU.

', llX, Uo, l-1XU+, HX, U+
......After outputting l-I XU9, one Ω polarity pulse G3+, G3')...
...G3. is supplied to the Tanabata 35 via the motor drive circuit 53.

The motor 35 has pulses G3+, G3+...
. . . G3° is supplied and rotates step by step in the opposite direction, and in response to this, the above-mentioned movable 51ii 22 moves the above-mentioned!, : line C- to the above-mentioned line 1- q
From the relative position with the holding body 23, which is quite large,
1j along the line b-b, stepwise movement is made toward the above-mentioned line LXD1 side. In this case, line LIjF and line 1.
'
(The number of pulses G31·−G3□ described in zL, J) times.

Therefore, when the step rotation of the motor 35 in the above-mentioned opposite direction is stopped and the above-mentioned step movement of the movable plate 22 is stopped, the re-movement plate 22 moves along the line LXD on the sample 2. , are the solid-state imaging elements En '~E+', EO, It~ of the one-dimensional scanning imaging device 21 mentioned above.
[Holding IA that approximately coincides with the array line C-C of Io
23 relative to sample 2 is obtained.

As just mentioned, the holder 23 is connected to the above-mentioned array line Ca.
is the above-mentioned line IXD on sample 2.

11′ after obtaining a relationship that is consistent with ! From one point t1, the above-mentioned outputs Sn' to S+', SO, St to S are sequentially scanned for (p→-q→-1) times.
11, as shown in FIG. 9A, the first outputs QXDL,...'~QXDLP, in the same way as described above in FIG.
+', QXDCro', QXDRP1'~
QXDRPo′: Second output QXDL(P −1
)It' ~QXD L(P-+)+', QXD
C(p −+)o′, QXDR(P −+) +
' ~ Q X I) R' (F -1) + 1:...
......0th output QXDL+n' ~QX
I) l-+ 1', QXDC' I O, QXD[
So, go to 1'・QXDt dog 11. '; (p-1-1)th output QXDLOn~QXDLO+, QXDC0+
, QXDRol ~ QXDROn: No. (1) + 2
)th output QXOL+ n ”QXDL+ + .

QXDC+ , QXDR, , ~QXDR+n:th (
p→-3) times [output of 1 Q X D L 2n ~Q
X DL ) , , QX1 C+ Q , QXDR
2,...QXDRan,...No.(1)
Senden I 11) th output QX DL q +, ~Q
XD L,,+,QXDC,0,QX I) Rq
+ ~ Q X D Rq n.

Then, the above-mentioned arithmetic processing circuit 51 first calculates '(k'
=-1), +1-1. ......2, 1) 1st output QXI) 1' to l-...QXDI- to +'
,QXl)C5゜',QXDRk+' ~QXDI
Memorize 1,' in the dog, and write ΔQX[')Lh n'-QXDLkn'()X
D1. -++(n -+1 '△Q X D L w
, (i-1'l' = Q,X I]Lb(n-
+)'-QXD Lb(n -+)' △QXDLk+ ' =QXDLk+ 'QXDCh
0'△QXDRkt'=QXDRb,'QXDCk
n' ΔQXDRh r'=QXDRk)'QXDRk
+' △QXDRh b ' -QXDRk ■ 'QXDR
Difference output △QXDI~k lT 'l△Q expressed by b(n - +)'
XDLk(n −1')' ・=・・・・−QXl)l
-kl', △Q×DRb +', ΔQXDR,'・・・・・・・・・・・・・・・QXDRk
+, ′ by 1q.

In addition, the above-mentioned difference output △QXDL, h'+' ~QXD
l-k II ''i, are sequentially arranged and stored in that order.

Then, convert the array to the difference output △QXDLb +' 0
1ll D r et al. difference output △Q・80, XDLm'), determine the position of the arrangement that can be accommodated.

(t, 'U,, l'g output △QXDLWl'/j'm
'Bh array L (0th position; from 6, difference output △QXI) L,
, l+' is obtained.1) The output representing the array length up to position Ill is obtained.
Tozuru).

=1. In addition, the array described in 1 is converted to the difference output △Q
From 1' to the differential output △QXDRk, when looking at the ' side sequentially,
Similarly, after the plurality of difference outputs with positive values are sequentially 1q and C,
The difference output at the Ministry's Hani is the difference output obtained first (this is called ΔQ
XDRk′), the i! '7 Determine the position of the array.

Then, from the position on the array where the output △Q
q represents the array length up to the position on the array, and stores the output (denoted as WXDRk').

Then, from the above-described array length J output ~VXDLk' and WXDRk', an output MXDh' expressed as MXk'=WXDl*'+WXDI or 1 is obtained and stored.

And as shown in Figure 9 13 1j, sea urchin, parust I
, ′ is output.

In addition, the arithmetic processing circuit 51 mentioned above
+ 1st output Q X To Ol-0+1 -Q X I
) Lo 1, QXDCo O, QXr) Ro +
”-QXr)R8°, and then C1 ΔQXDLo , ,=QXDl-0,.

Q
+IQXD LQ(Tl −+) △Q X D l−o + = Q X D L c
+QXDCOO △QXDRo + "QXDRo + -QXDCOO △QXDR'o l =QXDRO+ -QXDROl △Q X D l'< OII = Q X D Ra
The difference output ΔQXDIa4. expressed as n-Q X D Ra (n −+). △QXDL,a
(n−+1−−−QX D 1., o + , △QXD
R61, /ki (:)XDRn+ ・ ・ ・・・・・・・
......QXDRo, 1 is obtained.

Also, -1=the difference output △QXDI ,, ~QXD
L, on are sequentially arrayed and stored in that order.

Then, convert the array to the difference output △Q'X D l o l
Differential output △QXDL from the side. , when looking at the 1 side sequentially, after a plurality of difference outputs with positive values are sequentially 1q, the difference output with a value of zero is obtained first (this is called △QXDLo
), determine the position on the resulting array.

Then, an output representing the array length from the position on the array where the difference output △QXDlo is 1q to the position on the array where the difference output △QXDLo+ is obtained (this is
Memorize LO and Jru).

In addition, when looking at the above array sequentially from the output ΔQXDRa1 to the output ΔQXI)RO, , similarly, a plurality of differential outputs in one positive shift are sequentially obtained. After C, The difference output at the value of zero is obtained first (this is △Q
D Ro), 1! ? Determine the position on the array that will be displayed.

Then, an output representing the array length from the position on the array where the difference output △Q
Let Ro) be memorized.

Then C1" represents the sequence length mentioned above. 1 horn WX DL
a and WX [month (., MX Do = WXD Lo
−1−WXI month<O'r Represented output M X D O
Obtain and memorize this. And, not shown in FIG. 9B, J: Sea urchin, Parust I X D. Outputs 1.

Furthermore, the above-mentioned arithmetic processing circuit 51
(k ==1.2...q)th output.

XI) Lkr, ~QXDLi, + , QXDCkD,
Store 1 to 6XDRk+ in QXDI, and then △
Q X D L kn' = Q X D L kn-
Q X D L, -k (n - +) △Q
n −+)QXD Lk(n −y) △Q X l) L k+ −Q X D I−k+−
QXDCk.

△Q X D Rk l = Q X [')Rk +
−QXDCk O ΔQ X DRk , = Q X DRk r−
QXDRk + ΔQXDRk 1, = QXDRk n Q X D Rk(n −+)′ Difference output ΔQ
X DLko-1・・・・・・・・・1 to QXDl-
, △QXDRk1, △QXDRi, r ・・・・・・
...... Get QXDRkn.

Also, the difference output △QXDI-h+ ~QXD[
kn are sequentially arrayed fQ in their order.

Then, the array is changed from the difference output ΔQXDLk+ side to the difference output ΔQXDLb. When looking at the side sequentially, after a plurality of difference outputs with positive values are obtained sequentially, the difference output at 11 times of zero is obtained first (this is assumed to be 4△QXDl-).
Determine the position on the array q.

Then, an output representing the distribution 1j length from the position of the array G where the difference output △QXDLb is obtained to the position of the array -[ where the difference output △QXDLk+ is obtained.
Let D L k) be stored.

In addition, when looking at the ``j'' array sequentially from the difference output △QXDRkl to the difference output △QXDRk0 side, in the same way, after a plurality of difference outputs with positive clay are obtained sequentially, a value of zero is obtained. The output horn is first 1q; Output (this is △QXD
The position of the array 1- in I' is determined from the obtained sequence 1-.

The difference output △QXDRk1 can be obtained from the position on the array where t,% output △Q Torque output (
This is written as 1tX.

7) From the output WXD1-7 representing the array length and WXD Rk, +WXDRk (represented output M do. Then, as shown in FIG. 8B, a pulse N x Dk is output.

As described above, from the arithmetic processing circuit 51, the lf4th order C)LtS HXDP', l-IXD(P-
+)'--・=1-IXDI', tIXDo,
HXI) + , HXD+ -... IXDq
is obtained.

Those pulses HXDP', t''XD(p −+1'
...--HXD+', )lXDo, 1-IXD
+ , )-1XD2......l-I X l
), t are supplied to the above-mentioned motor 35 via the motor drive circuit 53.

Tanabata 35 is pulse) IXI) P', 1-IXD
P-+,'-''-1-IXD+',1lXDo
, 1-IXDl, tIXD+ ......I
-I
The above-mentioned line b
-1), it sequentially moves smoothly from the line LX, , side to the side opposite to λj.

By such sequential step movement of the movable platen 22,
From the relative position 1 with the holding body 23, which approximately coincides with the above-mentioned line C- or the above-mentioned line LXDP, the lines XD are sequentially drawn.
(p-+), 1-XD(p-r).

・・・・・・・・・LXI)1. LXDn, LXD+
' , . . . IXI), ' A nearly identical relationship is obtained.

Therefore, the output WX D of the output MXDk' mentioned above
L k ′ is the above-mentioned line of the sample 20 indentation 3,
The length from the center position O of the indentation 3 on Dk' to the side edge on the side of point 1]X' is expressed.

The reason for C (the output point WXDLk' is as described above; from the position on the array where the output ΔQ
There is an output C that represents the array up to the position. -Jino, the difference output △(:) + '1111
Output △Q lkn ' from 1; When looking at the side sequentially, multiple difference outputs of 11 candy can be obtained sequentially.
It is the shift output of 1 shift (゛) or the difference output obtained at the beginning of D.

Therefore, the position of array 1' where '' is obtained for the differential output ΔQXDI- is the general output point Sn' +
5o-t'...=...=...S+', So r
S+.

From the above description of the level of S, ......Sn-++Sn, it is clear that corresponding to the side edge of the indentation 3 on the point PX' side of the line LXDk'10 mentioned above, Because there is.

Mako, the output WXDRk of the above-mentioned output MXDb'
' represents the length of the indentation 3 of test 'A12 from the center position of the indentation 3 to the side edge on the point PX side on the line LXD' mentioned above for the same reason as mentioned above. There is.

Therefore, the above-mentioned output MXDk' represents the (length) on the line I XDh', which is marked [[at the top of trace 3].

Furthermore, the outputs MXDD and M X D k described above are
Top) With the same filling 111 as E, respectively, indentation 3, Top) Ho L L X D O and L X I) k
, -1-( represents the length. However, the output M
DO and MXDk are lines IXDo and l-XD
Since h does not cross the indentation 3, it is zero.

The arithmetic processing circuit 51 outputs the above output MXTIl'=M
X+', MXO, MX+ to MXm are sequentially stored in an array, and the above-mentioned output MXUp' ”□
MXLJ+, MXUD, MXU+ ~MXU9 etc.
Output MXl)p'~MXDI', MXD.

and M X [) q are sequentially stored in an array.

The arithmetic processing circuit 51 has the above-mentioned output MX'.

~MX+', 1vlXo, MX+ ~MX+n
Among them, the output that takes the maximum value (let this be MX) is determined, and the output is overridden by that output MX. This output MX is the output MXi' to MX,' as described above.

MXo, if MX1 to MX+n are obtained, the output MX. It is.

`` /j Output MX is `` As is clear from the series, the first
represents the length NX of the diagonal line.

Further, as described above, the arithmetic processing circuit 51 outputs MX
UP', ~IX U(F -+)' ・・・・・・・・・
・M X U+ ' MXUo, 1vlXLノ +
, M X U 2 , ...=...-MXU9,
They are sequentially arranged and stored in that order.

Then, output that array from the output MXUP' side to the output M
When looking at the X U q side sequentially, after output j is obtained with a value other than zero, the output obtained by the first correction of zero, (take this as MYU) the obtained array "2" position Determine.

Then, an output representing the array length from the position on the array where the output MYU is obtained 1q to the position on the array where the above-mentioned output M X U o is obtained (this is assumed to be WYU) is stored.

Further, the arithmetic processing circuit 51 outputs 1 as shown in above).
vlXDp', IVIXD(P-+>"...-
・-・1vlXn+ ', MXDO, MXD+,
MXD+ ---MXDq are sequentially arranged and stored in that order.

Then, convert the array from output MXD to output MX from ' side.
After sequentially looking at the Dq side and obtaining outputs such as I with non-zero values, first find the position on the array where the output that becomes zero (“1 at I”) (set this to 1 by MYD) is obtained. Discern.

- Z ``c, output) J MY D /) < The output corner ( This is taken as W Y +)) and stored.

(From the outputs WYU and WYD, ~I Y = W
The output M Y 4r represented by Y U and W Y +)
obtain.

This output ~IY is the point PY and 0” P of the indentation 3 on the sample 2.
It represents the length NY of the second diagonal line connecting Y'.

As mentioned above, according to the indentation hardness J1 according to the present invention, the first and second of the indentation 3 made on the sample 2;
The lengths of the l-1 square wires NX and NY can be measured8.
Ru.

From the values of B N X and NY, the hardness 1α of sample 2 can be measured η.

In this case, if the hardness of the indentation mold according to the present invention described above is 1:1, the indentation 3 made on the sample 2 can be C-dimensional Shoka dance statue,
[l1ij Iρ; From the output, an output representing the first and second diagonal lengths with pressure≧3 is obtained.

Therefore, according to the indentation type hardness tester according to the present invention, the first
Another great feature is that a simple, compact, and inexpensive one-dimensional scanning imaging device can be used as the imaging device used to obtain the second diagonal length signal. In addition, according to the indentation mold 11'F according to the present invention, since the -dimensional scanning imaging device does not perform the indentation scanning imaging over the entire area of the indentation, it is possible to scan the first part of the indentation at high speed. and a second diagonal length signal can be obtained.

Furthermore, if the indentation type hardness is J1, the present invention has certain characteristics such as the simplicity of the entire device.

In the above description, an example has been described in which the present invention is applied to an indentation type hardness tester that is designed to make an indentation in the shape of a square t1 on the specimen 31. It will be obvious that the present invention can be applied to the push-in type RZ+1 tear made by RZ+1.

In addition, various changes will be made without departing from the original spirit.

[Brief explanation of drawings]

FIG. 1 is a linear sectional view showing an example of the mechanical configuration of the indentation type hardness η1 according to the present invention. FIG. 2 is a sectional view taken along line II-H. FIG. 3 is a diagram showing an indentation made on a sample. FIG. 4A is a diagram for explaining the case where a sample is imaged in one dimensional scan by a -dimensional image carrier, and FIGS. 4B to D
1 is a waveform diagram for explaining a case where a sample is scanned one-dimensionally. FIG. 5 is a systematic connection diagram of an example of the so-called electrical coupling according to the present invention. Wi Figure 6, Figure 17, Figures 8 and 9 are the explanations (the arrangement of the Buddha names with two offerings). 1. Try, l'il
Mounting table 2・・・・・・・・・・・・・・・Sample 3
・・・・・・・・・・・・・・・Jl mark 10...
......Motor 20 for raising and lowering the sample mounting table 1 ...... Image carrier equipment frame 2
1.......-Dimensional scanning image carrier 22...Movable plate 23...
.........Holding body 35...
...Motor E1. ~E+, Eo, E+
'~E11......Solid-state image sensor C-C......Solid-state image sensor E-
Line 36 where E is arranged...Rotation axis 37...
・・・・・・・・・Screw 40・・・・・・・・・
・・・・・・Support body 44・・・・・・・・・・・・・・・
・Light source 45.47 ・・・・・・・・・・・・・Lens 46・・・・
・・・・・・・・・Half mirror-50・・・・・・・
......Clock pulse generation circuit: 51...
...... Enshi processing circuit 52, 53...
...Motor drive circuit applicant Matsuzawa Seiki Co., Ltd.

Claims (1)

[Scope of Claims] A sample mounting table on which a sample with a quadrangular pyramidal (or spherical) indentation is placed, one-dimensional scanning 1 that produces a scanning line image of the indentation made in the above-mentioned test.
1i1 device mounting body having a movable plate on which a 1i1 imaging device is mounted; including the Ml line representing the diameter)
A first region having a width smaller than 1 compared to the length of the second diagonal line (the length of the second diagonal line or the diameter in the direction perpendicular to the first line) Along a plurality of lines parallel to the line of °C, a plurality of sliding positions each covering the rth 1Gli, and the above-mentioned -dimensional scanning 1-most imaging W are set along the -h of the above-mentioned second line.
A second region having a length of the second line and a smaller width, which meets the j14 ends of
a sliding plate driving means for sliding the sample mounting table to a plurality of sliding positions that cover each scanned image separately; 1
a first length signal representing the length of the line;
and a length signal generating means for generating a second length signal representing the length of the line.