JPS6068478U - 回転型ビ−ム電流測定装置 - Google Patents

回転型ビ−ム電流測定装置

Info

Publication number
JPS6068478U
JPS6068478U JP16122083U JP16122083U JPS6068478U JP S6068478 U JPS6068478 U JP S6068478U JP 16122083 U JP16122083 U JP 16122083U JP 16122083 U JP16122083 U JP 16122083U JP S6068478 U JPS6068478 U JP S6068478U
Authority
JP
Japan
Prior art keywords
electrode
rotationally movable
movable electrode
charged particle
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16122083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522864Y2 (enrdf_load_stackoverflow
Inventor
横瀬　豊司
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP16122083U priority Critical patent/JPS6068478U/ja
Publication of JPS6068478U publication Critical patent/JPS6068478U/ja
Application granted granted Critical
Publication of JPH0522864Y2 publication Critical patent/JPH0522864Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Electron Sources, Ion Sources (AREA)
JP16122083U 1983-10-17 1983-10-17 回転型ビ−ム電流測定装置 Granted JPS6068478U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16122083U JPS6068478U (ja) 1983-10-17 1983-10-17 回転型ビ−ム電流測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16122083U JPS6068478U (ja) 1983-10-17 1983-10-17 回転型ビ−ム電流測定装置

Publications (2)

Publication Number Publication Date
JPS6068478U true JPS6068478U (ja) 1985-05-15
JPH0522864Y2 JPH0522864Y2 (enrdf_load_stackoverflow) 1993-06-11

Family

ID=30354378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16122083U Granted JPS6068478U (ja) 1983-10-17 1983-10-17 回転型ビ−ム電流測定装置

Country Status (1)

Country Link
JP (1) JPS6068478U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07302563A (ja) * 1994-05-06 1995-11-14 Shimadzu Corp 分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07302563A (ja) * 1994-05-06 1995-11-14 Shimadzu Corp 分析装置

Also Published As

Publication number Publication date
JPH0522864Y2 (enrdf_load_stackoverflow) 1993-06-11

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