JPS6059801U - サ−ボバルブ - Google Patents

サ−ボバルブ

Info

Publication number
JPS6059801U
JPS6059801U JP15270683U JP15270683U JPS6059801U JP S6059801 U JPS6059801 U JP S6059801U JP 15270683 U JP15270683 U JP 15270683U JP 15270683 U JP15270683 U JP 15270683U JP S6059801 U JPS6059801 U JP S6059801U
Authority
JP
Japan
Prior art keywords
micro
oscillating member
servo valve
diaphragm
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15270683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0224963Y2 (enEXAMPLES
Inventor
中務　栄治
英文 斎藤
三郎 佐々木
末藤　敏一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15270683U priority Critical patent/JPS6059801U/ja
Publication of JPS6059801U publication Critical patent/JPS6059801U/ja
Application granted granted Critical
Publication of JPH0224963Y2 publication Critical patent/JPH0224963Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP15270683U 1983-09-30 1983-09-30 サ−ボバルブ Granted JPS6059801U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15270683U JPS6059801U (ja) 1983-09-30 1983-09-30 サ−ボバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15270683U JPS6059801U (ja) 1983-09-30 1983-09-30 サ−ボバルブ

Publications (2)

Publication Number Publication Date
JPS6059801U true JPS6059801U (ja) 1985-04-25
JPH0224963Y2 JPH0224963Y2 (enEXAMPLES) 1990-07-10

Family

ID=30338057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15270683U Granted JPS6059801U (ja) 1983-09-30 1983-09-30 サ−ボバルブ

Country Status (1)

Country Link
JP (1) JPS6059801U (enEXAMPLES)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4725005U (enEXAMPLES) * 1971-04-10 1972-11-21
JPS4934228U (enEXAMPLES) * 1972-06-28 1974-03-26
JPS57137704U (enEXAMPLES) * 1981-02-25 1982-08-28

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4725005U (enEXAMPLES) * 1971-04-10 1972-11-21
JPS4934228U (enEXAMPLES) * 1972-06-28 1974-03-26
JPS57137704U (enEXAMPLES) * 1981-02-25 1982-08-28

Also Published As

Publication number Publication date
JPH0224963Y2 (enEXAMPLES) 1990-07-10

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