JPS6056715A - Vibration type conveying device for semiconductor device - Google Patents

Abstract

PURPOSE:To smoothly eject a preceding semiconductor which reaches a discharge port, by temporarily stopping the preceding semiconductor at a predetermined position together with semiconductors following the former. CONSTITUTION:When a detecting sensor 5 catches a preceding semiconductor 4 which has been transferred to a detecting position A where the preceding semiconductor 4 is detected by a detecting sensor 5 and which will enters into a discharge port 3a, the advance of the semiconductor 4 just after the preceding semiconductor 4 is stopped by a stopper 6 so that the preceding semiconductor 4 alone is advanced into the discharge port 3a. When the ejection of the preceding semiconductor 4 is completed, the stopper 6 returns its original position, and the advance of the succeeding semiconductors 4 is restarted. By repeating the above-mentioned operation, the ejection of the semiconductors are smoothly carried out so that it is possible to prevent the interruption of the operation due to the blocking by the semiconductors on their way.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a vibrating image transfer device that continuously transports a plurality of semiconductor elements Y, and in particular, the escape action of the preceding semiconductor element that has reached the extraction port is This is to ensure smooth operation without being affected by the semiconductor element.

[Prior art]

FIG. 1 shows a conventional vibrating type transport device for semiconductor devices. In this figure, 1 is a feeder body that oscillates up and down, and 2 is a trough-shaped conveyor rail that is integrally fixed to the top of this feeder body 1. When the feeder body 1 vibrates in the vertical direction, the conveyor Each semiconductor element within the rail 2 is conveyed toward an extraction port to be described later. Reference numeral 3 denotes a holding plate that holds the upper surface of the conveyor rail 2 so that the semiconductor devices inside the conveyor rail 2 do not fly out during the transfer. As shown in the figure, an extraction port 3a for escaping the semiconductor element is provided.

As described above, semiconductor devices transported within the conveyor rail 2 are always transported with adjacent semiconductor devices in front and rear thereof in contact with each other. 3a, the preceding semiconductor element and the immediately following semiconductor element are in contact with each other, so there is a drawback that the preceding semiconductor element to be escaped J5 gets caught by the succeeding semiconductor element, making it impossible to perform a smooth escape operation. Ta.

[Summary of the invention]

This invention was made in order to eliminate the above-mentioned drawbacks, and the following semiconductor element is temporarily stopped from the preceding semiconductor element that has reached the extraction port by a positioning mechanism, and the preceding semiconductor element is separated from the preceding semiconductor element when it has reached the extraction port. This is a device that allows for a smooth escape.

[Embodiments of the invention]

FIGS. 2 to 5 are diagrams showing an embodiment of the present invention.

The configuration and operation will be explained below.

In the figure of Kowara, the same parts as the first @ are indicated by the same symbols. 4
5 is a semiconductor device that is conveyed adjacent to each other in a conveyor rail 2 that vibrates up and down, and 5 is a light-emitting device and a light-receiving device that are provided opposite to each other at the entrance to the extraction port 3a provided at the tip of the conveyor rail 2. A detection sensor 6 is provided at a predetermined position immediately after this detection sensor 5 to detect the preceding semiconductor element 4 at the corresponding position, and the subsequent semiconductor element 4 is temporarily stopped at a fixed position away from the preceding semiconductor element 4. 7 is an L-shaped plate-shaped spring that presses the stopper 6 in an upright state; 8 is a rotating plate 9 to which this plate-shaped spring 7 is fixed; A rotation support shaft, 10 is a solenoid of the electromagnetic drive device M for driving the rotation plate 9, and 11 is a spring for returning the stopper 6 stretched between the stopper 6 and the conveyor rail 2.

In the above configuration, when the feeder body 1 is operated to convey the semiconductor chips 4, the conveyor rail 2 integrated with the kneading device vibrates slightly up and down. will be transported towards.

Then, as shown in FIG. 5, the preceding semiconductor element 4 is transported to the detection position tA by the detection sensor 5, and when the detection sensor 5 catches the preceding semiconductor element 4 that is about to advance into the extraction port 3a. , the advancement of the succeeding semiconductor element 4 immediately after the preceding semiconductor element 4 is temporarily stopped at position B in FIG. The semiconductor element 4 is separated from the preceding semiconductor element 4, and only the preceding semiconductor element 4 is allowed to advance into the extraction port 3a, and is allowed to advance from this extraction port 3a in its own state.

1st step, the stopper 6 of the subsequent semiconductor element 4
The temporary stopping action is performed through a plate-shaped spring 7Y having a predetermined elastic force attached to the rotary plate 9, so that the vibration of the feeder body 1 cannot be prevented by the suppressing force of this stopper 6. It has become.

When the escape of the preceding semiconductor element 4 is completed as described above, for example, the solenoid 10 is deenergized, the rotary plate 9 is restored, and the stopper 6 is returned to its original position by the action of the return spring 110. As a result, the succeeding semiconductor element 4 that has been temporarily stopped at position B starts advancing again. Such an operation is repeated, and each semiconductor element 4 is transferred and released one after another.

In the above embodiment, the succeeding semiconductor element 4 is stopped by being sandwiched between the holding plate 3 on the support rail 2 and the stopper 6; You may also stop the advance.

In addition, in order to avoid disturbing the vibration of the feeder body 1 due to the operation of the electromagnetic drive device iM, a plate-shaped spring 7 is used, but other means may be used as long as it has the same function as this. Of course.

In addition, the detection sensor 5 is not limited to the one in the above embodiment, and various detection sensors may be used as appropriate.

〔Effect of the invention〕

As explained above, in the present invention, the preceding semiconductor element that has reached the extraction port is isolated from the succeeding semiconductor element, and
Since it can be made to escape from the extraction port, the escape operation is performed smoothly, and there is no possibility of clogging during transportation and stopping the operation.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a conventional semiconductor transfer device v, FIG. 2 is a perspective view showing an embodiment of the present invention, FIG. 3 is an enlarged perspective view of main parts showing stopping and escape positions of semiconductor elements, and FIG. 4 is an enlarged sectional view of the main part of FIG. 2, and FIG. 5 is a plan view showing the detection position of the preceding semiconductor element by the detection sensor and the stopping position of the succeeding semiconductor element. In the figure, 2 is a conveyor beer, 3a is an extraction port, 4 (calf conductor element, 5 is a detection sensor, 6 is a stopper, T is a plate spring, and M is a magnetic drive device. The same reference numerals indicate the same or equivalent parts. Agent Masuo Oiwa (2 others) Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Procedural amendment (voluntary) 1゜Indication of case Patent application 1982- 185978 No. 2, Title of the invention: Vibrating type conveyor stirrup for semiconductor devices 3, Person making the amendment Representative Hitoshi Katayama Department 4, Agent 5, Drawing subject to the amendment 6, Contents of the amendment Drawing 4 as attached. The above is corrected to Figure 4.

Claims (2)

[Claims] (1) At the entrance to the extraction port for the transferred semiconductor devices, which is installed at the tip of the conveyor rail that vibrates up and down, there is a sensor for detecting the preceding semiconductor device advancing into the extraction port, and immediately after that, a sensor for detecting the advancement of the succeeding semiconductor device. 1. A vibration type image transmitting device for a semiconductor device, characterized in that a stopper is provided for temporarily stopping the detection sensor when the detection sensor is in operation, and releasing the stoppage after the escape of the preceding semiconductor device is completed. (2) A vibratory image transfer device for a semiconductor device, characterized in that the stopper is made of a bottle and is driven by an electromagnetic drive device via a spring.