JPS6056209U - Non-contact displacement detection device - Google Patents

Non-contact displacement detection device

Info

Publication number
JPS6056209U
JPS6056209U JP14859183U JP14859183U JPS6056209U JP S6056209 U JPS6056209 U JP S6056209U JP 14859183 U JP14859183 U JP 14859183U JP 14859183 U JP14859183 U JP 14859183U JP S6056209 U JPS6056209 U JP S6056209U
Authority
JP
Japan
Prior art keywords
detection device
gap sensor
measured
sensor
contact displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14859183U
Other languages
Japanese (ja)
Other versions
JPH0342328Y2 (en
Inventor
達道 花田
竹下　興二
中沢　邦泰
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP14859183U priority Critical patent/JPS6056209U/en
Publication of JPS6056209U publication Critical patent/JPS6056209U/en
Application granted granted Critical
Publication of JPH0342328Y2 publication Critical patent/JPH0342328Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来例を示す断面図、第２図はギャップセンサ
出力の経時的変化を示す線図、第３図は本考案の一実施
例を示す断面図、第４図はギャップセンサ出力および差
動トランス出力の経時的変化を示す線図である。 １・・・・・・被測定物、２・・・・・・ギャップセン
サ、６・・・・・・スリーブ、９・・・・・・ホルダー
、１１・・・・・・圧縮コイルばね、１２・・・・・・
差動トランス、１４・・・・・・可動軸、１８・・・・
・・ガ久供給管。Fig. 1 is a sectional view showing a conventional example, Fig. 2 is a diagram showing changes in gap sensor output over time, Fig. 3 is a sectional view showing an embodiment of the present invention, and Fig. 4 is a diagram showing gap sensor output and FIG. 2 is a diagram showing temporal changes in differential transformer output. 1...Object to be measured, 2...Gap sensor, 6...Sleeve, 9...Holder, 11...Compression coil spring, 12...
Differential transformer, 14... Movable shaft, 18...
・Gaku supply pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被測定物に対向して進退自在に設けられ被測定物との間
の隙間に応じて出力を変化させるギャップセンサと、こ
のギャップセンサの出力にもとづいて被測定物とギャッ
プセンサとの間の隙間を一定の検出可能範囲に保つよう
にギャップセンサの位置制御を行なう手段と、前記ギャ
ップセンサの移動量を検出するセンサ移動検出手段とを
具備し、前記ギャップセンサの出力とセンサ移動検出手
段の出力とを加算することにより被測定物の変位を検出
することを特徴とする非接触形変位検出装置。A gap sensor that is movable forward and backward facing the object to be measured and changes its output according to the gap between the object and the object to be measured, and a gap sensor between the object to be measured and the gap sensor based on the output of this gap sensor. and sensor movement detection means for detecting the amount of movement of the gap sensor, the output of the gap sensor and the output of the sensor movement detection means are provided. A non-contact displacement detection device characterized by detecting displacement of an object to be measured by adding .
JP14859183U 1983-09-26 1983-09-26 Non-contact displacement detection device Granted JPS6056209U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14859183U JPS6056209U (en) 1983-09-26 1983-09-26 Non-contact displacement detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14859183U JPS6056209U (en) 1983-09-26 1983-09-26 Non-contact displacement detection device

Publications (2)

Publication Number Publication Date
JPS6056209U true JPS6056209U (en) 1985-04-19
JPH0342328Y2 JPH0342328Y2 (en) 1991-09-05

Family

ID=30330091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14859183U Granted JPS6056209U (en) 1983-09-26 1983-09-26 Non-contact displacement detection device

Country Status (1)

Country Link
JP (1) JPS6056209U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113450A1 (en) * 2009-04-03 2010-10-07 オムロン株式会社 Three-dimensional shape measuring device, three-dimensional shape measuring method, and three-dimensional shape measuring program

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499259U (en) * 1972-04-24 1974-01-26
JPS51149050A (en) * 1975-05-13 1976-12-21 Rolls Royce Measuring device
JPS5786710A (en) * 1980-11-19 1982-05-29 Yokogawa Hokushin Electric Corp Measuring device for three-dimensional configuration
JPS5793202A (en) * 1980-12-01 1982-06-10 Toyota Motor Corp Measurer for three-dimensional displacement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499259U (en) * 1972-04-24 1974-01-26
JPS51149050A (en) * 1975-05-13 1976-12-21 Rolls Royce Measuring device
JPS5786710A (en) * 1980-11-19 1982-05-29 Yokogawa Hokushin Electric Corp Measuring device for three-dimensional configuration
JPS5793202A (en) * 1980-12-01 1982-06-10 Toyota Motor Corp Measurer for three-dimensional displacement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113450A1 (en) * 2009-04-03 2010-10-07 オムロン株式会社 Three-dimensional shape measuring device, three-dimensional shape measuring method, and three-dimensional shape measuring program
JP2010243296A (en) * 2009-04-03 2010-10-28 Omron Corp Device, method and program for measuring three-dimensional shape
CN102365522A (en) * 2009-04-03 2012-02-29 欧姆龙株式会社 Three-dimensional shape measuring device, three-dimensional shape measuring method, and three-dimensional shape measuring program
KR101257188B1 (en) 2009-04-03 2013-04-22 오므론 가부시키가이샤 Three-dimensional shape measuring device, three-dimensional shape measuring method, and computer readable recording medium for three-dimessional shape measuring program
TWI414750B (en) * 2009-04-03 2013-11-11 Omron Tateisi Electronics Co Dimensional shape measuring device, three-dimensional shape measurement method and three-dimensional shape measurement program

Also Published As

Publication number Publication date
JPH0342328Y2 (en) 1991-09-05

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