JPS6055576U - クリ−ンル−ム用搬送台車 - Google Patents
クリ−ンル−ム用搬送台車Info
- Publication number
- JPS6055576U JPS6055576U JP14906183U JP14906183U JPS6055576U JP S6055576 U JPS6055576 U JP S6055576U JP 14906183 U JP14906183 U JP 14906183U JP 14906183 U JP14906183 U JP 14906183U JP S6055576 U JPS6055576 U JP S6055576U
- Authority
- JP
- Japan
- Prior art keywords
- shielding material
- storage chamber
- clean room
- wheel storage
- bogie
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14906183U JPS6055576U (ja) | 1983-09-26 | 1983-09-26 | クリ−ンル−ム用搬送台車 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14906183U JPS6055576U (ja) | 1983-09-26 | 1983-09-26 | クリ−ンル−ム用搬送台車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6055576U true JPS6055576U (ja) | 1985-04-18 |
JPH0332459Y2 JPH0332459Y2 (enrdf_load_stackoverflow) | 1991-07-10 |
Family
ID=30330994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14906183U Granted JPS6055576U (ja) | 1983-09-26 | 1983-09-26 | クリ−ンル−ム用搬送台車 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6055576U (enrdf_load_stackoverflow) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5587651A (en) * | 1978-12-27 | 1980-07-02 | Tokyo Shibaura Electric Co | Dusttproof conveyor |
JPS568722A (en) * | 1979-06-29 | 1981-01-29 | Hitachi Ltd | Transporting vehicle |
JPS5733567U (enrdf_load_stackoverflow) * | 1980-08-05 | 1982-02-22 |
-
1983
- 1983-09-26 JP JP14906183U patent/JPS6055576U/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5587651A (en) * | 1978-12-27 | 1980-07-02 | Tokyo Shibaura Electric Co | Dusttproof conveyor |
JPS568722A (en) * | 1979-06-29 | 1981-01-29 | Hitachi Ltd | Transporting vehicle |
JPS5733567U (enrdf_load_stackoverflow) * | 1980-08-05 | 1982-02-22 |
Also Published As
Publication number | Publication date |
---|---|
JPH0332459Y2 (enrdf_load_stackoverflow) | 1991-07-10 |
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