JPS6055575U - クリ−ンル−ム用搬送台車 - Google Patents

クリ−ンル−ム用搬送台車

Info

Publication number
JPS6055575U
JPS6055575U JP14906083U JP14906083U JPS6055575U JP S6055575 U JPS6055575 U JP S6055575U JP 14906083 U JP14906083 U JP 14906083U JP 14906083 U JP14906083 U JP 14906083U JP S6055575 U JPS6055575 U JP S6055575U
Authority
JP
Japan
Prior art keywords
clean room
transport trolley
room transport
chambers
ventilation hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14906083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141646Y2 (enrdf_load_stackoverflow
Inventor
赤根 晴雄
幸雄 北村
修司 河上
Original Assignee
ティー・シー・エム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ティー・シー・エム株式会社 filed Critical ティー・シー・エム株式会社
Priority to JP14906083U priority Critical patent/JPS6055575U/ja
Publication of JPS6055575U publication Critical patent/JPS6055575U/ja
Application granted granted Critical
Publication of JPH0141646Y2 publication Critical patent/JPH0141646Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
JP14906083U 1983-09-26 1983-09-26 クリ−ンル−ム用搬送台車 Granted JPS6055575U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14906083U JPS6055575U (ja) 1983-09-26 1983-09-26 クリ−ンル−ム用搬送台車

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14906083U JPS6055575U (ja) 1983-09-26 1983-09-26 クリ−ンル−ム用搬送台車

Publications (2)

Publication Number Publication Date
JPS6055575U true JPS6055575U (ja) 1985-04-18
JPH0141646Y2 JPH0141646Y2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=30330992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14906083U Granted JPS6055575U (ja) 1983-09-26 1983-09-26 クリ−ンル−ム用搬送台車

Country Status (1)

Country Link
JP (1) JPS6055575U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5587651A (en) * 1978-12-27 1980-07-02 Tokyo Shibaura Electric Co Dusttproof conveyor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5587651A (en) * 1978-12-27 1980-07-02 Tokyo Shibaura Electric Co Dusttproof conveyor

Also Published As

Publication number Publication date
JPH0141646Y2 (enrdf_load_stackoverflow) 1989-12-08

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