JPS6052259A - Lapping machine - Google Patents

Lapping machine

Info

Publication number
JPS6052259A
JPS6052259A JP58160391A JP16039183A JPS6052259A JP S6052259 A JPS6052259 A JP S6052259A JP 58160391 A JP58160391 A JP 58160391A JP 16039183 A JP16039183 A JP 16039183A JP S6052259 A JPS6052259 A JP S6052259A
Authority
JP
Japan
Prior art keywords
workpiece
lapping
spherical
holder
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58160391A
Other languages
Japanese (ja)
Inventor
Koji Nakazawa
中沢 宏治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58160391A priority Critical patent/JPS6052259A/en
Publication of JPS6052259A publication Critical patent/JPS6052259A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To eliminate such a risk that a workpiece trips over or turns over in the case of the small diameter of the workpiece, by attaching the workpiece to the convex spherical surface side of a spherical bearing, and as well by applying both pressing force for lapping and driving force for sliding to the concave spherical seat side. CONSTITUTION:The convex spherical part of a workpiece holder 17 to which a workpiece 2 is secured is fitted into the concave spherical seat of a concave spherical part 18, and a load P is applied to a loading rod 5 which is also applied with slide force by means of a drive arm 7. With respect to the sliding direction of the workpiece for lapping, indicated by the arrow A, the workpiece is stable irrespective of its shape within a range of 0<=h2-h1<=b even though the diameter (a) of the workpiece is small, where h1 is the vertical distance between the lapping surface 1 and the center point O' of the convex spherical surface of the workpiece holder 17, and h2 is the height of the action point of a resultant force F for thrusting the holder 17 from the lapping surface 1, thereby occurrence of scratches is limited to be minimum. Further, (b) is the diameter of a circular plane-projection of the holder 17.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明はラッピング加工を施すだめの加工機械に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a processing machine for performing lapping processing.

〔発明の背景〕[Background of the invention]

第1図は従来一般に用いられているラップ加工機の1例
の構造を示す部分断面図である。1はラップ定盤、2は
ラッピング加工されるワークである。上記のワーク2は
ワークホルダ3に取付けられ、該ワークホルダ3は球面
軸受4を介して荷重棒5によって支承されている。
FIG. 1 is a partial cross-sectional view showing the structure of one example of a conventional lapping machine. 1 is a lapping surface plate, and 2 is a workpiece to be lapped. The work 2 described above is attached to a work holder 3, and the work holder 3 is supported by a load rod 5 via a spherical bearing 4.

一般にワークホルダ3に球面座が設けられ、荷重棒5が
玉梓状に構成され、上記双方の部材が嵌合されて球面軸
受4を構成している。
Generally, the work holder 3 is provided with a spherical seat, the load rod 5 is configured in the shape of a bead, and both of the above members are fitted to form the spherical bearing 4.

上記の荷重棒5に矢印Pの如く抑圧荷重を加えると共に
、駆動アーム7の先端に設けたすべり軸受6によって摺
動自在に抱持し、かつ、上記駆動アーム7の他端を軸受
8を介して偏心軸9に嵌合する。上記の偏心軸9は七−
ク120回転軸に取付けられた回転円板INに対して偏
心して取付けられている。10は偏心i+調節するため
の送りネジである。これにより荷重棒5はX方向(図に
おいて左右方向)に往復駆動される。
A suppressing load is applied to the load rod 5 as shown by the arrow P, and the drive arm 7 is slidably supported by a slide bearing 6 provided at the tip thereof, and the other end of the drive arm 7 is held by a bearing 8. and fit onto the eccentric shaft 9. The above eccentric shaft 9 is
The rotary disk IN is mounted eccentrically with respect to the rotating disk IN mounted on the rotary shaft of the rotor 120. 10 is a feed screw for adjusting eccentricity i+. As a result, the load rod 5 is reciprocated in the X direction (left-right direction in the figure).

図示を省略したが、上記のX方向往復駆動手段と同様の
手段により上記荷重棒5T−Y方向(紙面と垂直方向)
にも往復駆動される。
Although not shown, the load rod 5 is driven in the T-Y direction (perpendicular to the plane of the paper) by a means similar to the X-direction reciprocating drive means described above.
It is also driven back and forth.

上記の如<x、y方向に往復駆動される荷重棒5、及び
これによって支承されているワーク2は水平面内で第2
図に示すようなりサージュ軌跡13を描く。
As described above, the load rod 5 that is reciprocated in the x and y directions and the workpiece 2 supported by it are placed on the second
A surge locus 13 is drawn as shown in the figure.

上に述べた従来のラップ加工機において、ワーク2が一
様な圧力でラップ定盤に圧接せしめられつつ第2図のよ
うなりサージュ図形を描いて摺動することが望ましい。
In the conventional lapping machine described above, it is desirable that the workpiece 2 be pressed against the lapping surface plate with uniform pressure and slide in a serge pattern as shown in FIG.

第3図はワーク2に揚力)る力の説明図である。FIG. 3 is an explanatory diagram of the force exerted on the workpiece 2.

ワーク2を固定したワークホルダ3が矢印入方向に進行
する場合、ワークのつまづき、又は転倒という問題があ
る。
When the work holder 3 to which the work 2 is fixed moves in the direction of the arrow, there is a problem that the work trips or falls.

ワーク2の研摩面における摩擦カフ1l−F1研摩面か
ら球面軸受4の中心Oまでの高さをhとすると、摩擦力
によって生じるモーメントMFはMp = F @h となる。
When the height from the polished surface of the friction cuff 11-F1 on the polished surface of the workpiece 2 to the center O of the spherical bearing 4 is h, the moment MF generated by the frictional force is Mp = F @h.

一方、ラップ油のくさび作用によるモーメントy2Mo
とし、ワーク20半径faとすると、P e a 十M
O≧My が安定な拘置条件である。
On the other hand, the moment y2Mo due to the wedge action of the wrap oil
If the radius of workpiece 20 is fa, then P e a 1 M
O≧My is a stable detention condition.

Pea十M。< M F になると不安定になる。Pea ten M. < M F It becomes unstable.

以上の検討により、ワーク2が安定してランプ研摩を受
け得るための条件は、 P> (MF−M□)−一(i’sh−Mg)−a a となる。
Based on the above study, the conditions for the workpiece 2 to undergo lamp polishing stably are as follows: P>(MF-M□)-1(i'sh-Mg)-a a.

C点におりるワークのつまづきを考える場合、M o 
<< M Fであるから上式はP≧−Jl’ h (!
:f、fる。
When considering the stumbling of a workpiece that falls at point C, M o
Since << MF, the above formula is P≧−Jl' h (!
:f, fru.

摩擦係数μ=−を考えると上式はμSπ、ここで通常の
ラップ加工においては、μ≦1であるから1≦KがC点
における安定条件となる。
Considering the friction coefficient μ=-, the above equation becomes μSπ, where μ≦1 in normal lapping processing, so 1≦K is the stable condition at point C.

このように従来のラップ加工におけるワーク支持法(第
3図)ではワーク前端部での安定性は、ワーク半径aと
研摩面から球面軸受中心0才での高さhとの比によって
決まるため、背の高いワークや幅のせまいワークでは、
ランプ加工においてワークがラップ定盤面でつま丈”い
て、第4図のように半固定状態にあるラップ砥粒19を
削り取ってしまい研摩面の良好な表面品位を損なう(ス
クラッチが発生する)等の問題があった。最悪の場合に
は、ワークが転倒しラップ定盤面に深い傷を付けてラッ
プ加工を不能にする。
In this way, in the conventional workpiece support method in lapping (Fig. 3), the stability at the front end of the workpiece is determined by the ratio of the workpiece radius a and the height h from the polished surface to the center of the spherical bearing. For tall workpieces or narrow workpieces,
During ramp machining, the workpiece is at its toe level on the surface of the lapping surface, and the lapping abrasive grains 19, which are in a semi-fixed state, are scraped off as shown in Figure 4, resulting in damage to the good surface quality of the polished surface (scratches occur), etc. There was a problem. In the worst case scenario, the workpiece would fall and cause deep scratches on the surface of the lapping plate, making lapping impossible.

従来のラップ加工機においては、上に述べたようにワー
ク2の半径(若しくは@)aが小さいと力学的安定性が
失われるため、ワーク外周にダミーのワーク(図示せず
)を配置して見かけ上aを大きくし安定性を得ていたが
、これでは必要とするワークの研摩能率が低下するとと
もに、ラップ定盤面の面積も本来必要とする以上に大き
くせねばならず、効率、経済性ともに悪かった。
In conventional lapping machines, as mentioned above, if the radius (or @) a of the workpiece 2 is small, mechanical stability is lost, so a dummy workpiece (not shown) is placed around the outer circumference of the workpiece. Stability has been obtained by apparently increasing a, but this reduces the required polishing efficiency of the workpiece and also requires the surface area of the lapping surface to be larger than originally required, resulting in poor efficiency and economic efficiency. Both were bad.

〔発明の目的〕[Purpose of the invention]

本発明は上記の事情に鑑みて為され、ワークの半径若し
くは幅が小さい場合、ダミーのワークを用いなくてもつ
談づいたり転倒したりする虞れの無いラップ加工機を提
供することを目的とする。
The present invention was made in view of the above-mentioned circumstances, and an object of the present invention is to provide a lapping machine which is free from the risk of colliding or falling even when a dummy work is not used when the radius or width of the work is small. do.

〔発明の概要〕[Summary of the invention]

上記の目的を達成する為、本発明のラップ加工機は、球
面軸受を介し゛Cワークを支承し、このワークをランプ
定盤に向けて押しつけつつ該ラップ定盤に対して摺動せ
しめるラップ加工機において、ワークを前記球面軸受の
凸球面τ(Uに取りつけ、該球面軸受の凹球間座にラッ
プ加工用の押圧力と摺動用の駆動力とを与えるように構
成したことを特徴とする。
In order to achieve the above object, the lapping machine of the present invention supports a C workpiece via a spherical bearing, and performs lapping processing in which the workpiece is pushed toward a ramp surface plate and slid against the lapping surface plate. The machine is characterized in that the workpiece is attached to the convex spherical surface τ (U) of the spherical bearing, and a pressing force for lapping and a driving force for sliding are applied to the concave spherical spacer of the spherical bearing. .

〔発明の冥施例〕[Example of invention]

次に、本発明の1実施例を第5図について説IJJする
。この実施例は前衛の従来装置に本発明を適用して改良
したもので、第3図と同一の図面参照番号を附したラッ
プ定盤J1ワーク2、荷重棒5、すべり軸受6は第3図
の従来例におけると同様乃至は類似の構成部材である。
Next, one embodiment of the present invention will be explained with reference to FIG. This embodiment is an improvement by applying the present invention to an avant-garde conventional device, and the lap surface plate J1 work 2, load rod 5, and sliding bearing 6 are shown in FIG. 3 with the same drawing reference numbers as in FIG. 3. The components are the same or similar to those in the conventional example.

球面状の凹形の座を形成した凹球面体軸受18を荷重棒
5の下端に取付け、上記の凹球面体軸受18に適合する
凸球面を形成したワークホルダ17を構成する。
A concave spherical bearing 18 having a concave spherical seat is attached to the lower end of the load rod 5 to form a work holder 17 having a convex spherical surface that matches the concave spherical bearing 18 described above.

ワーク2をワークホルダ17にネジ止め等の適宜の方法
(接着、粘着)で固定する。
The work 2 is fixed to the work holder 17 by an appropriate method (adhesion, adhesive) such as screwing.

ワークホルダ17の凸球面部を凹球面体軸受18の球面
座に嵌め合わぜ、荀重俸5に荷重Pを負荷するとともに
、荷重停5に対して駆動アーム′7を介して摺動力を与
える。説明の便直上矢印へ方向の摺動を行わせる場杵5
こついて述べる。
The convex spherical part of the work holder 17 is fitted into the spherical seat of the concave spherical bearing 18, and a load P is applied to the load stop 5, and a sliding force is applied to the load stop 5 via the drive arm '7. . For convenience of explanation: Pestle 5 where sliding is performed in the direction of the arrow directly above.
Let me explain.

ワークホルダ17に形成した凸球面の中心そげ。The center of the convex spherical surface formed on the work holder 17 is shaved.

球間の半径そ」tとする。Let the radius between the spheres be t.

本例においてはワークボルダ17の平面投影形状を円形
tこ構成し、その直径−?1l−2bとする。
In this example, the planar projection shape of the work boulder 17 is circular, and its diameter -? 1l-2b.

凹球面体軸受18が凸球面を介してτソークホルダ1フ
を送り方間に押ず力の合力をFとし、上記の合力Fの作
用点の研摩面からの高さをhl、研麟面から凸球面の中
心点0′までの垂直距離ソh1とする。
The concave spherical bearing 18 pushes the τ soak holder 1f in the feeding direction via the convex spherical surface. The resultant force of the force is F, and the height of the point of application of the resultant force F from the polishing surface is hl, and from the polishing surface Let the vertical distance to the center point 0' of the convex spherical surface be soh1.

ラップ研摩のためのワーク摺動方向矢印入方向に関して
、ワークの前端をC1後端をBとする。これらの点C,
Hにおける力学的安定条件は次の如くである。即ち、0
点ではMy 1十MO十P(a−1−b)≧OただしM
FI = F (hl−hl)であり、B点ではMF 
1 + M□ −Pa≦0となる。ここでラップ油の動
圧によるモーメン) Moは相対的Jこツノ)さいので
無視するさ、安定条件は一一≦h2− b】5世 1、、A となる。
Regarding the sliding direction of the workpiece for lap polishing in the direction indicated by the arrow, the front end of the workpiece is C and the rear end is B. These points C,
The mechanical stability conditions for H are as follows. That is, 0
At the point, My 10MO1P(a-1-b)≧O but M
FI = F (hl - hl), and at point B MF
1 + M□ -Pa≦0. Here, Mo due to the dynamic pressure of the lap oil is ignored because it is relatively small, and the stability condition becomes 11 ≤ h2- b] 5th 1,, A.

ただし斯擦係数μ”Pは通常のラップ加工においてはμ
≦1であるから、−a≦h2− hx≦a十すが本発明
におりる球面軸受の安定41件となる。
However, the friction coefficient μ”P is μ in normal lapping processing.
Since ≦1, -a≦h2-hx≦a10 is 41 cases of stability of the spherical bearing according to the present invention.

従って、本発明によればワーク手gBがいくら小さくな
ってもO≦h2− h工≦bの範囲で球面軸受を使用し
ていれば力学的安定性が得られるため、ワーク形状によ
らず安定性を得ることができる。
Therefore, according to the present invention, no matter how small the workpiece hand gB becomes, mechanical stability can be obtained as long as the spherical bearing is used in the range O≦h2−hwork≦b, so it is stable regardless of the workpiece shape. You can get sex.

ワークの高さが高い場合には球面軸受の半径Rを大きく
すればよい。才た第5図の例では、凸球面を形成したワ
ークホルダ7の中心0′はワークとラップ定盤の接触面
(研摩面)よりラップ定盤側(本図1こおいて下方)I
ζ位公し、h1≧0となっているが、該凸球面体7の中
心O′が研摩面よりワーク側に位置(hl<0)となっ
た場合においても、このhlの寸法が従来装置(第3図
)の6寸法に比してhl(hであれば、従来装置に比し
てワークの安定性が良くなり、本発明の効果が得られる
If the height of the workpiece is high, the radius R of the spherical bearing may be increased. In the example shown in FIG. 5, the center 0' of the work holder 7, which has a convex spherical surface, is located closer to the lap surface plate (lower in this figure) than the contact surface (polished surface) between the workpiece and the lap surface plate.
ζ, and h1≧0, but even if the center O' of the convex spherical body 7 is located closer to the workpiece than the polishing surface (hl<0), the dimension hl is different from that of the conventional machine. If the dimension is hl (h) compared to the 6 dimensions shown in FIG.

本実施例(第5図)において、凸球面体を形成したワー
クホルダ7と凹球面体8との摺動面は油潤滑されている
。凹、凸画球面体の摺動面は必ずし、も全回で接する必
要はなく、m@面に適宜に油孔若しくは油溝を設けて間
層することもできる。
In this embodiment (FIG. 5), the sliding surfaces of the work holder 7, which has a convex spherical body, and the concave spherical body 8 are lubricated with oil. The sliding surfaces of the concave and convex spherical bodies do not necessarily have to be in contact with each other at all times, and may be interlayered by appropriately providing oil holes or oil grooves on the m@ surface.

〔発明の効果〕 以上詳述したように、本発明によれば、簡単な構成でラ
ップ加工におけるワークの力学的安定性をイ与ることが
でき、これによりラップ加工で問題となるスクラッチの
発生を最小限におさえることができ、研摩面の表面品位
を向上させることができる。
[Effects of the Invention] As detailed above, according to the present invention, it is possible to impart mechanical stability to a workpiece during lapping processing with a simple configuration, thereby preventing the occurrence of scratches that are a problem during lapping processing. can be kept to a minimum, and the surface quality of the polished surface can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のラップ加工機の1例の部分断面図、第2
因はラップ加工におけるリサージュ図形の説明図、第3
図は従米すラツブ加工機におけるワークの女だ状態の説
明σコ、第4因は同じく年女定状態cv説肋図、編5図
は本発明のラップ加工機の要部#AAl1ある。 1・・・ラップ定盤、 2・・・ワーク。 3・・・ワークホルダ、4・・・球面軸受。 5・・・荷麓作、 6・・・すべり軸受。 7・・・MA駆動アーム ・ 8・・・軸受。 9・・・偏ル軸、lO・・・送りネジ。 11・・・回転置載、12・・・モータ。 13・・・す→ノーーシュ軌跡。 17・・・凸球面体を形成したワークホルダ。 18・・・四球歯体軸受、 19・・・砥粒。 代理人弁理士 高 橋 明 夫 第1図 Y 第2図 第3図 第φ図
Figure 1 is a partial cross-sectional view of an example of a conventional lapping machine;
The reason is the illustration of the Lissajous figure in lapping processing, Part 3.
The figure is an explanation of the female state of the workpiece in the lapping machine according to the present invention, the fourth factor is also the constant state CV diagram, and the fifth figure is the main part #AAl1 of the lapping machine of the present invention. 1... Lap surface plate, 2... Work. 3... Work holder, 4... Spherical bearing. 5...Log production, 6...Sliding bearing. 7...MA drive arm ・8...Bearing. 9...Occurrence axis, lO...Feed screw. 11...Rotation placement, 12...Motor. 13...su → Noosh trajectory. 17... Work holder in which a convex spherical body is formed. 18... Four ball tooth body bearing, 19... Abrasive grain. Representative Patent Attorney Akio Takahashi Figure 1 Y Figure 2 Figure 3 Figure φ

Claims (1)

【特許請求の範囲】 1、球面軸受を介してワークを支承し、このワークをラ
ップ定盤に向けて押しつけつつ該ラップ定盤に対して摺
動せしめるラップ加工機において、ワークを前記球面軸
受の凸球面側に取りつけ、該球面軸受の凹球間座にラッ
プ加工用の押圧力と摺動用の駆動力とを与えるように構
成したことを特徴とするラップ加工機。 2 前記球面軸受の球面の中心点をラップ定盤のラップ
面よりもラップ定盤側に設定したことを特徴とする特許
請求の範囲第1項に記載のランプ加工機。
[Claims] 1. In a lapping machine that supports a workpiece through a spherical bearing and slides the workpiece against the lapping surface plate while pressing the workpiece toward the lapping surface plate, the workpiece is supported by the spherical bearing. A lapping machine, characterized in that it is attached to a convex spherical surface side and is configured to apply a pressing force for lapping and a driving force for sliding to a concave spherical spacer of the spherical bearing. 2. The lamp processing machine according to claim 1, wherein the center point of the spherical surface of the spherical bearing is set closer to the lap surface plate than the lap surface of the lap surface plate.
JP58160391A 1983-09-02 1983-09-02 Lapping machine Pending JPS6052259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58160391A JPS6052259A (en) 1983-09-02 1983-09-02 Lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58160391A JPS6052259A (en) 1983-09-02 1983-09-02 Lapping machine

Publications (1)

Publication Number Publication Date
JPS6052259A true JPS6052259A (en) 1985-03-25

Family

ID=15713941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58160391A Pending JPS6052259A (en) 1983-09-02 1983-09-02 Lapping machine

Country Status (1)

Country Link
JP (1) JPS6052259A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020138323A (en) * 2015-01-30 2020-09-03 株式会社荏原製作所 Rotation center position determination method for connection mechanism, rotation center position determination program for connection mechanism, maximum pressing load determination method for rotating body and maximum pressing load determination program for rotating body

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020138323A (en) * 2015-01-30 2020-09-03 株式会社荏原製作所 Rotation center position determination method for connection mechanism, rotation center position determination program for connection mechanism, maximum pressing load determination method for rotating body and maximum pressing load determination program for rotating body
JP2022042516A (en) * 2015-01-30 2022-03-14 株式会社荏原製作所 Method of determining maximum pressing load of rotating body and program of determining maximum pressing load of rotating body
KR20220133153A (en) * 2015-01-30 2022-10-04 가부시키가이샤 에바라 세이사꾸쇼 Method of determining position of rotational center of coupling mechanism, computer-readable medium recording program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and computer-readable medium recording program of determining maximum pressing load of rotating body
KR20230124872A (en) * 2015-01-30 2023-08-28 가부시키가이샤 에바라 세이사꾸쇼 Method of determining maximum pressing load of rotating body, and computer-readable medium recording program of determining maximum pressing load of rotating body

Similar Documents

Publication Publication Date Title
JP6369649B1 (en) Film wrap processing equipment
JPS6052259A (en) Lapping machine
KR101527420B1 (en) Mirror finish processing machine for circular Tip saw and Method of that
US5498198A (en) Grinding machine
JPH1034528A (en) Polishing device and polishing method
JP2941134B2 (en) Spherical grinding device and grinding method
CN1196993A (en) Magnetic substrate semi-products, its making method and grinding processing appts.
JP3224619B2 (en) Offline roll mill
CN213258836U (en) Device for angle polishing of silicon wafer sample
JP3912296B2 (en) Polishing apparatus and polishing method
JPS58149176A (en) Abrasive grain finishing tool
JP3985700B2 (en) Roller burnishing method
SU1306695A1 (en) Method of finishing treatment of spherical surfaces
JPH08281548A (en) Sander
JPS632290Y2 (en)
JPS59219152A (en) Mirror finishing machine
US3455067A (en) Lapping device
JP2861541B2 (en) Crankshaft grinding machine
JP3102581B2 (en) Grinder
JP3577097B2 (en) Processing method of cylindrical roller for cylindrical roller bearing
JPH0655424A (en) Grinder
JPS5835409Y2 (en) centerless grinder
JPH11207585A (en) Wafer chamfering method
JPS59115152A (en) Grinder
JPH0569309A (en) Super finishing method