JPS6049629U - Photomask plate holder - Google Patents

Photomask plate holder

Info

Publication number
JPS6049629U
JPS6049629U JP14128183U JP14128183U JPS6049629U JP S6049629 U JPS6049629 U JP S6049629U JP 14128183 U JP14128183 U JP 14128183U JP 14128183 U JP14128183 U JP 14128183U JP S6049629 U JPS6049629 U JP S6049629U
Authority
JP
Japan
Prior art keywords
photomask plate
plate
photomask
plate holder
movers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14128183U
Other languages
Japanese (ja)
Other versions
JPS6325734Y2 (en
Inventor
上原　朗
敏夫 宮川
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP14128183U priority Critical patent/JPS6049629U/en
Publication of JPS6049629U publication Critical patent/JPS6049629U/en
Application granted granted Critical
Publication of JPS6325734Y2 publication Critical patent/JPS6325734Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の実施例を示す斜視図、第２図は第１
図の一部切欠拡大部分斜視図、第３図は第２図のＢ−Ｂ
断面図である。 １・・・・・・フォトマスクプレート、２・・・・・・
プレート台、３・・・・・・固定子、４・・・・・・移
動子、５・・・・・・駆動レバー、６・・・・・・ガイ
ド溝、７・・・・・・てこ、８・・・・・・ばね、９・
・・・・・分割バー。Fig. 1 is a perspective view showing an embodiment of the present invention, and Fig. 2 is a perspective view showing an embodiment of the present invention.
A partially cutaway enlarged partial perspective view of the figure, Figure 3 is B-B of Figure 2.
FIG. 1...Photomask plate, 2...
Plate stand, 3... Stator, 4... Mover, 5... Drive lever, 6... Guide groove, 7... Lever, 8... Spring, 9.
...Divided bar.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ＩＣ製造用の四角形フォトマスクプレートを載せるプレ
ート台と、前記フォトマスクプレートの外縁部４辺のう
ち互いに直交する２辺の中点を点接触しながら均等な圧
力で押圧し、他方の直交する２辺を前記プレート台に固
定された固定子へ押し付けて前記フォトマスクプレート
を保持する２個の移動子と、前記移動子を同時に駆動さ
せる駆動機構と、前記駆動機構の解放およびロックとを
行う駆動レバーとを含むフォトマスクプレート・ホルダ
。A plate stand on which a rectangular photomask plate for IC manufacturing is placed is pressed with even pressure while making point contact with the midpoints of two of the four outer edges of the photomask plate that are perpendicular to each other, and two movers that hold the photomask plate by pressing their sides against a stator fixed to the plate stand; a drive mechanism that simultaneously drives the movers; and a drive that releases and locks the drive mechanisms. A photomask plate holder including a lever.
JP14128183U 1983-09-12 1983-09-12 Photomask plate holder Granted JPS6049629U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14128183U JPS6049629U (en) 1983-09-12 1983-09-12 Photomask plate holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14128183U JPS6049629U (en) 1983-09-12 1983-09-12 Photomask plate holder

Publications (2)

Publication Number Publication Date
JPS6049629U true JPS6049629U (en) 1985-04-08
JPS6325734Y2 JPS6325734Y2 (en) 1988-07-13

Family

ID=30316033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14128183U Granted JPS6049629U (en) 1983-09-12 1983-09-12 Photomask plate holder

Country Status (1)

Country Link
JP (1) JPS6049629U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JPH1097985A (en) * 1996-09-24 1998-04-14 Canon Inc Scan type exposure device and manufacture of device
JP2004328014A (en) * 2004-08-10 2004-11-18 Nikon Corp Projection lithography system and pattern forming method using same
KR100965769B1 (en) 2006-07-31 2010-06-24 가부시키가이샤 다이후쿠 Load positioning apparatus
CN106356320A (en) * 2015-07-15 2017-01-25 苏斯微技术光刻有限公司 Spacer displacement device for a wafer illumination unit and wafer illumination unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521821Y1 (en) * 1966-05-10 1970-08-29
JPS5548942A (en) * 1978-10-04 1980-04-08 Hitachi Ltd Positioning device for very small components

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4521821Y1 (en) * 1966-05-10 1970-08-29
JPS5548942A (en) * 1978-10-04 1980-04-08 Hitachi Ltd Positioning device for very small components

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JPH1097985A (en) * 1996-09-24 1998-04-14 Canon Inc Scan type exposure device and manufacture of device
JP2004328014A (en) * 2004-08-10 2004-11-18 Nikon Corp Projection lithography system and pattern forming method using same
KR100965769B1 (en) 2006-07-31 2010-06-24 가부시키가이샤 다이후쿠 Load positioning apparatus
CN106356320A (en) * 2015-07-15 2017-01-25 苏斯微技术光刻有限公司 Spacer displacement device for a wafer illumination unit and wafer illumination unit
JP2017027028A (en) * 2015-07-15 2017-02-02 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ Spacer displacement device for wafer illumination unit and wafer illumination unit
CN106356320B (en) * 2015-07-15 2021-08-10 苏斯微技术光刻有限公司 Spacer shifting device for wafer irradiation unit and wafer irradiation unit

Also Published As

Publication number Publication date
JPS6325734Y2 (en) 1988-07-13

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