JPS6049220A - Wavelength multiplex type optical position sensor - Google Patents
Wavelength multiplex type optical position sensorInfo
- Publication number
- JPS6049220A JPS6049220A JP15839783A JP15839783A JPS6049220A JP S6049220 A JPS6049220 A JP S6049220A JP 15839783 A JP15839783 A JP 15839783A JP 15839783 A JP15839783 A JP 15839783A JP S6049220 A JPS6049220 A JP S6049220A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- position sensor
- rod lens
- light
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 26
- 239000013307 optical fiber Substances 0.000 abstract description 14
- 230000003595 spectral effect Effects 0.000 abstract 2
- 239000000835 fiber Substances 0.000 description 3
- 241000257465 Echinoidea Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009193 crawling Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 210000003414 extremity Anatomy 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 208000013403 hyperactivity Diseases 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
Abstract
Description
【発明の詳細な説明】
この発明はθ（長り；Φ式の光位置センサ；／（−関す
るもし・）である。DETAILED DESCRIPTION OF THE INVENTION The present invention is a θ (length; Φ-type optical position sensor; / (-).
ｉル’ １ｔｔｌ定ｉ＋Ｊ動体の位置を本−ＩＩ・←：
Ｋ ｉｌｌ’ｌ定づ−る２１こ、め（′こ尤・・１）
及１、！を便ＩＩ した、いわゆる７１＊ Ｊミ多屯式
の光位置（′ンナが従来っ・らイ・）・川されている。i le' 1ttl constant i+J position of moving object Book-II・←:
K ill'l determined 21, me ('koy...1)
1,! The light position of the so-called 71* J Miton type light position ('nna is conventional) and river is used.
第１堅ｌ ’１ｌＪｉφ７１ぐ１・Ｊ・；１１されてい
るこの神の先位：１゛１センナの（１作成金示ず）県浬
）゛ス１て、入射光１，１か；ｒす（）・目・こ人１′
１・１さｊ＋、、ブリズ、＝１．１において入射光Ｌｉ
＋寸ぞれ〜、（−れ（’Ｄ ’、伎１＜”１〜７（ｎの
尤に各屈４１１泣置にうす光さＪ［、こ：？’Ｌら＋’
ｒ （”−Ｌ ’ｉ＜の光かそバーεｎ対し１５する屈
ｉ’ｌ＋’ ｉ−）“１・置（（二配、１悶、＼Ｊ１て
いるファイバ２−１．２−２・・・・２− ｎ （・Ｑ
］（射ｔ５７する。ファイバ２−１〜２−ｎのが１０′
ｌ−１へはＬ〉、１４．パ・・７）１゛３に取イー１け
られ、との送ｆへ−＼ット３に（ｒｉ −＋＝ ン−ｊ
−タブレート４が図の矢印Ａ、 ｉｌＣ示−Ｊ″よ５
Ｋ ３ ；ツノ′−ｆバ２−１．２−２・・・・２−
１１に中ｌ白Ｕ′こ桟１：□ｂ １１白に取付けられる
。エン−１−ダブｌ／−１・・ｌ＆こ（，１，各１１↓
こ１、λ、〜λ１．（℃対１−Ｃ１し７てＪＬに３１・
１Ｊ（ｌ仁配設され７Ｋ、フープ’ ・ｆバ２ １．２
２・・・・２・−！］の１台間シ（’−：Ｉ’−７’
Ｉ −９ブレート４の移動方向にＬ１′に中ｉＮこ、ソ
アイノ・２１．２−２・・・・２−！〕よジ（１、」′
１さ、１１ろ尤か−でれそれＩｌｉ’ｊ １ｌＪ）Ｉ−
する。ｌ二うてｌ！Ｉｉ’ｔ＋二の長さのスリットか耳
、６Ｉ戊されている５、
又エンコータプレー １・４の移動（＋ン；１゛・’Ｉ
： ｌ’ｔＺえ・１１心して各、・ノジ長２１〜，１１
．にｘ・Ｊむして形成ｚＮれ、らこね、らスリットの組
合せ７つ・異なる。ｌ：うにぞれそ、１１−のスリノ１
長う・設定さＦしている。従−ｐでエンニＪ−り一ル−
１−４の移動位置（ｌこ７４応して、エンコーダプレー
ト４かしその位置での各スリットをユｍじて取り出され
ろ光の波長の組合せが対応付けられる。このよう（℃し
てエンコーダプレー１・４からその位置に対応付けて取
り出された各波長の受１言光は受信ヘッド５に供給され
る。この受信ヘッド５にはそれぞれの波長に対応する位
置にそれぞれ光ファイバ６−１〜６−ｔ〕が取付けられ
ている。The first position of this god is 1. Su()・eyes・this person 1'
The incident light Li
+ Dimension ~, (-re('D', 似1<"1~7(n, but each 411 position has a faint light J[, ko:?'L et al+'
r ("-L 'i < optical fiber 2-1.2-2...・・2−n (・Q
] (shot t57. Fibers 2-1 to 2-n are 10'
L> to l-1, 14. Pa...7) 1゛3 takes E1 and sends it to f -\to3 (ri -+= n-j
- Tablet 4 is indicated by arrow A in the figure, ilC is indicated - J'' 5
K 3 ; horn'-f bar 2-1.2-2...2-
11 is attached to the middle white U' crosspiece 1: □b 11 white. en-1-dub l/-1...l&ko(,1, each 11↓
This1, λ, ~λ1. (℃ vs. 1-C1 and 7 to JL 31・
1J (l-ren arranged 7K, hoop'・f bar 2 1.2
2...2...! ] between one machine ('-:I'-7'
I-9 In the direction of movement of plate 4, in L1', Soaino・21.2-2...2-! ] Yoji (1,'''
1sa, 11ro?
do. l2 ute l! Ii't + two long slits or ears, 6I omitted 5, and encoder play 1 and 4 movements (+n; 1゛・'I
: l'tZe・11 cores each,・Noge length 21～,11
．． There are 7 different combinations of slits formed by zN, rakone, and r. l: Unizoreso, 11- no Surino 1
It's long/set F. Enni J-Riichi Ru- in J-p
Accordingly, the combinations of wavelengths of the light extracted from the encoder plate 4 through each slit at that position are associated. The received light of each wavelength extracted from 1 and 4 in correspondence with its position is supplied to the receiving head 5.The receiving head 5 has optical fibers 6-1 to 6-1 at positions corresponding to the respective wavelengths. 6-t] is installed.
図示していないが彼測定町動体の移動に対応して工／コ
ーダプレ−１・４が移動し、彼４（す’；ｊｌ ”Ｊ動
体の位置に対応してエンコーダプレー１・４の位置が、
’ｌＪ応付けられるような構成となっている。従って１
７−ｊ’イバ６−１〜６−１］には、エンコーダプレー
１・４の移動位置に対むした位置におけゐ０支１しの
６１１合せの光信号が得られる。この光信号によってｊ
−ンローダプレート４の位置、即し彼測定用動体の位置
を測定することができる。Although not shown, the encoder plays 1 and 4 move in response to the movement of the measuring moving object, and the positions of encoder plays 1 and 4 change in response to the position of the moving object. ,
'lJ is configured so that it can be attached. Therefore 1
7-j' 6-1 to 6-1], optical signals of 611 combinations of 0 and 1 are obtained at positions opposite to the moving positions of the encoder plates 1 and 4. By this optical signal
- The position of the loader plate 4, ie the position of the measuring moving object, can be measured.
第２図（ｌこ同一部分に対して同一イで１号を伺してそ
の構成を示したのは、従来使用されているこの神の元位
置センサの（１口の構成例を示すもので、プリズム１で
分光された入射光Ｌｉか直接エンコーダプレート４に供
給される。エフ′Ｊ−ダゾレ−１・４の各波長位置に対
応する位置に形成さｊｔたスリットからの出力光は集光
レンズ７で（１−尤さ１１７、−ｅの（ｆ、点位置に受
光側の光ファイバ８が設けらｔ’ｌ−；＜）、、この構
成のものにおいても、ｒル測定τＩＪ動トドのムシ置に
対応するエンコーダプレー１・４の位置Ｑこ鴫、（−２
だ波長の組合せの受射光が光ファイバｓ ｖｃ 貨しシ
れ、彼ｒ則定弓動体の位置を測定することができる。Figure 2 shows the configuration of the conventionally used original position sensor (1), with the same part being referred to as No. 1. , the incident light Li separated by the prism 1 is directly supplied to the encoder plate 4.The output light from the slits formed at positions corresponding to each wavelength position of the F'J-dazolets 1 and 4 is condensed. With the lens 7 (1-likelihood 117, -e (f), the optical fiber 8 on the receiving side is provided at the point position t'l-; The position Q of encoder plays 1 and 4 corresponding to the position of the head is (-2
When the received light with a combination of different wavelengths is transmitted through the optical fiber svc, the position of the arcuate moving object can be measured.
このように１π来使用されでいる光位置−し・ンザ（：
［プリズムコード板、集光レンズがそれぞれ独立ｊｌｉ
ｒｉ造を有し、これらが組合されてｔｆ’； Ｉ或され
るためＶこ全体が大型化するという欠点がある１、又動
作−４−５も外部振動などの影響全受は易く、光位置七
ン−すとして必要な重粘度動作が実現されないことか５
ちる１゜この発明は従来のこの神の光位置センダーに、
１・・ＩｒＪる欠点を解決し、分光手段、コード板、集
光レンズを一体に組イ」けた構成として全体を太幅しこ
小）１１す化すると共に、光ファイバ；を使用した構成
として光位置センサを電気部分からげ絶保し、夕ｉ部卸
旨の影響を受けることのない構造としたρＵ長多Ｉ式光
位置センサを提供するものである。In this way, the optical position that has been used since 1π (:
[Prism code plate and condensing lens are independent]
ri structure, and these are combined to form a tf'; Is it possible that the heavy viscosity operation required for the position 7 seat is not achieved?
Chiru1゜This invention replaces the conventional God's light position sender.
1. Solving the drawbacks of IrJ, the spectroscopic means, code plate, and condensing lens are integrated into a single structure, making the entire structure wide and small.In addition, the structure uses optical fibers. To provide an optical position sensor of the ρU long type I, which has a structure in which the optical position sensor is completely protected from electrical parts and is not affected by the influence of the external circuit.
この発明ではロッドレンズの一嬬ａｉ１の第１の領域に
人力用光ファイバがｅ、伺けられ、このロッドレンズの
池端面近傍には一体Ｋ例えばグし／−テングなどの分光
手段が設けられる。一方「ロッドレンズの一端而、！ｊ
傍にロッドレンズの光軸に直角に移動自在にコード板が
取付けられ、第１領域以外のロッドレンズの一端面に集
光レンズが設けられ、この集光レンズの焦点位置に出力
用光ファイバが取付けられている。In this invention, an optical fiber for human power is installed in the first region of the rod lens, and a spectroscopic means such as a splitter is provided near the end surface of the rod lens. . On the other hand, ``A part of the rod lens!
A code plate is attached to the side of the rod lens so as to be movable at right angles to the optical axis of the rod lens, a condenser lens is provided on one end surface of the rod lens other than the first area, and an output optical fiber is placed at the focal point of this condenser lens. installed.
す、ドこの発明の波長多重式光位置センサ２その実施例
に、１１１づき図１Ｔｉｉを使用して詳和１に説明する
。An embodiment of the wavelength multiplexed optical position sensor 2 of the present invention will be explained in detail using FIG.
第：３図ｔまこの発明の波長多重式光位置センサの実施
例の構成を示す図でロッドレンズ１１が設けられ、この
Ｌ７ツドレンズ１１の一☆；ｌ＋ｉ面の第１の１ｉｌｌ
ｌ」・・（にＺＪ Ｌで人力用光ファイバ１３が＋＋ｙ
伺けらｆｌ−る。Figure 3 shows the configuration of an embodiment of the wavelength multiplexed optical position sensor of the present invention, in which a rod lens 11 is provided, and the first 1 ill of the L7 rod lens 11 is
l''...(ni ZJ L and the optical fiber 13 for human power is ++y
I'll ask you fl-ru.
人力１１１元ノアイバ１３全通して１′辷送される入射
光を１２、この第１の領域１２からロッドレンズ１１内
ε′ＣＩ攻射すれる。ロッドレンズ１１の曲偏１而ｈ
ｂｔに分光手段として実施例では回折！’ｉ’ｉ ｊ’
Ｌ ４が−イトに設けられている。The incident light 12, which is transmitted by 1' through the entire Novaiba 13 using human power, is struck from this first area 12 to the inside of the rod lens 11 by ε'CI. Curvature of rod lens 11
In this example, diffraction is used as a spectroscopic means for bt! 'i'i j'
L4 is provided at the -ite.
従ってロッドレンズ１１内Ｖこ放１１・ｊさｊ）だＩＪ
（射尾はロッドレンズ１１内で屈折され、はぼ十ｆｌ
）ＹＬ 、１：してこの回折格子１４に入射する。即ち
ＩＪツドレ・ンズ１１の光軸方向においてロット゛レン
ズの焦点距離ノ。の近傍（／こ回折格子１４が設けられ
た構成とされている。回折格子１４による回４八光に１
、ＩＪソドレンズ１１の光軸に直角な方向においてそれ
・されの波長に対Ｅして所定部！４（ｌ：１７ｉ＋ｆ位
した荀ｉｌ′・Ｉ″に回イ）１する。Therefore, the V inside the rod lens 11 is radiated 11.j).
(The firing tail is refracted within the rod lens 11, and approximately 10 fl
)YL, 1: and enters this diffraction grating 14. That is, in the optical axis direction of the IJ lens 11, the focal length of the lens. The configuration is such that a diffraction grating 14 is provided in the vicinity of the diffraction grating 14.
, in the direction perpendicular to the optical axis of the IJ sodolens 11, a predetermined portion E for that wavelength! 4 (Turn to the position 17i+f) 1.
ロン１゛レンズ１１の回析格イｌ ４１ｌｔｌｌと対向
する側の一端面近１帝に、ロッドレンズの光＋Ｉｑ１＋
ｉｒ＋二的角Ｖこその１戊板側から切１７ｆ）１．５
が形成される。このＬ７す’ｈ’（＋１５に対して切溝
１５に沿ってロッドレンズ１１の光軸に直角に移動自在
にコード板１ＧがＩＢ！ （１けられる。コード４反１
６は’ＪＪ １７１１ｉ １５ＶＣｌｉｄイ：１けられ
／（−状態で板面の長手方向に直角な方向が回イｉｉ′
格−ｒｉ４による回折光の１１，１位方向に一致するＪ
二うに（（ＩＪ ｉｌ’１“ｊ１５位置でロッドレンズ
１１にズ・１して数個けられろ、。Rod lens light +Iq1+
Cut ir + two angles V from the 1st plate side 17f) 1.5
is formed. The code plate 1G is movably moved perpendicular to the optical axis of the rod lens 11 along the kerf 15 against this L7su'h' (+15).
6 is 'JJ 1711i 15VClid A: 1 vignetting/(In the - state, the direction perpendicular to the longitudinal direction of the plate surface is rotated ii'
J that corresponds to the 11,1 direction of the diffracted light due to case-ri4
Two sea urchins ((IJ il'1"j1) Z-1 the rod lens 11 at the 15th position and hit it several times.
ス第・１区ｉｔ：点線で示すようにコード板１６のヒ’
Ｊ ｒ、’η１５に／はっての移動は、彼ｉｉｉ！ｌ定
ｉｊＪ動体２０の矢印Ｘで示ず多動シζ対１＝、するよ
うな構成となっている。1st section it: As shown by the dotted line, the cord plate 16 is
J r, 'η15/crawling move is he iii! The configuration is such that the hyperactivity ζ vs. 1=, as shown by the arrow X of the moving object 20, is constant.
丁Ｊ−１１反１Ｇに（は第５図に示すように長手移動方
向い二重−イ］にスリンｌ−２１−１，２１−２・・・
・・。To the J-11 side 1G (as shown in Fig. 5, the longitudinal movement direction is double-A), the sulin l-21-1, 21-2...
....
２２−１．２１−２・・・・、２５ １．２５−２・・
・・が形成されている。スリン）２１−１．２１−２
・・（・よ回折格子１４での波長λ１の回折光位置に同
一間隔で形成される。スリンｌ−２２−１、２２−２・
・・・は回折格子１４での波長）２０回折光位置に同一
間隔−ご形成される。同様にしてスリット２３−１．２
３−２・・−・、 ２４−１ 、２４−２・・・・。22-1.21-2..., 25 1.25-2...
... is formed. Surin) 21-1.21-2
(...) are formed at the same intervals at the diffracted light position of wavelength λ1 on the diffraction grating 14. Surin l-22-1, 22-2
. . . are wavelengths at the diffraction grating 14) formed at the same intervals at 20 diffracted light positions. Similarly, slit 23-1.2
3-2..., 24-1, 24-2...
２５−１はそれぞれ回折格子１４での波長λ３．λ４及
びλ５、の回折光位置に形成される。25-1 are the wavelengths λ3. They are formed at the diffracted light positions of λ4 and λ5.
父波長ｖｒｃ対応するスリットのコード板１Ｇの１〉１
ツノ向の１．ｌＪり始め位置はそろえられる。波長λ２
のスリンｌ−２２−１，２２−２・・・・・はθシ畏λ
１のスリンｌ□２１−１．２１−２・・・−の連、涜す
る２個に対し１−１して１個か形成され、長手方向にお
いてそのＬ！Ｊすｂｆｉめ位置が連）・、“Ｌする２個
の波長λ、のスリットの最初のものと一致するように形
成され、７１＊ Ｊい７２・・′）スリットの切り７終
り位置は波長・ン、の７（リットの１９ぐに連続するも
のの切り始め位置と一致さ龜る。、同様に波長λ３のス
リット２３−１ ．２３−２・・・・（１波長λ２のス
リット２２−１ ．２２−２・・・・・の連続する２個
に対［１ｓシて１個が形成され、長「、方向においてそ
の（りり始め位置が連続する２個の波長λ２のスリット
の最初のものと一致するように形成され、波長λ３のス
リットの１υり終り位置は波ＪＱλ２のスリットの次に
連続するものの切り始め位置と一致される。波長λ４．
λ５のスリットについても全く同様にスリット２４−１
．２４−２・・・・・、２５−１・−・・の長さが設定
される。Father wavelength vrc corresponding slit code plate 1G 1〉1
1 towards the horn. The lJ starting positions are aligned. Wavelength λ2
The Surin l-22-1, 22-2... are θ and λ
1 Surin l □21-1.21-2...-, one is formed by 1-1 for each two, and its L! in the longitudinal direction! It is formed so that the position of the slit coincides with the first of the two slits with the wavelength λ, and the end position of the slit is the wavelength.・N, No. 7 (This coincides with the cutting start position of the 19th consecutive lit.Similarly, the slits 23-1, 23-2, with wavelength λ3, 22-1, 23-2, etc., with wavelength λ2, 23-2, 22-1, 23-2, 1 wavelength, λ2, etc.). 22-2..., one slit is formed every 1s for two consecutive slits, and the starting position of the slit in the long direction is the first of the two successive slits of wavelength λ2. The end position of the slit of wavelength λ3 after 1υ coincides with the starting position of the next successive slit of wave JQλ2.
The slit 24-1 is exactly the same for the slit λ5.
．． The lengths of 24-2..., 25-1... are set.
なおこのコード板１６はＪ、（本的な一例であって、例
えばグレーコードを使＋１’ｌＪ したコ−ド（段を用
いることもできる。Note that this code plate 16 is a J, (this is just one example, and for example, a +1'lJ code (stage) using a gray code may also be used.
第１の領域１２以夕１のロッドレンズ１１の一端面に集
光レンズ３ｏが設けられている。１）ｌＪ述の、Ｊ二う
にコート′（及１６は［ｊッドレンズ１１の一台；へ１
曲）Ｊ１傍に設けられ、図示していない受光スリンｉ・
丁１２によりコード板１６上においてその移動方向の一
点に／］応する位置で移動方向に直角な線上の光のみが
集光レンズ３０に入光されるように構成されているので
、コード板１６により各波長に対応してスリットから取
り出されるコード板１６の位置に対応する各波長成分の
受信光の中心光軸ｔｉｔ、集光レンズ３０内には３平行
光として入射される。A condenser lens 3o is provided on one end surface of the rod lens 11 in the first region 12. 1) J2 sea urchin coat' (and 16 is one of [jd lens 11;
song) A light-receiving system installed near J1 and not shown in the figure.
Since the code plate 16 is configured such that only light on a line perpendicular to the moving direction is incident on the condenser lens 30 at a position corresponding to a point on the code plate 16 in the moving direction, the code plate 16 Accordingly, the central optical axis tit of the received light of each wavelength component corresponding to the position of the code plate 16 taken out from the slit corresponding to each wavelength is incident on the condenser lens 30 as three parallel lights.
す、光レンズ３０の光軸方向の長さＱまは′・焦点距：
ｊｊｌｊＪ１１（設定され、この焦点位置に出力用光フ
ァイバ：３１がｌ■付けられている。Length Q or' in the optical axis direction of the optical lens 30 Focal length:
jjjljJ11 (set, and an output optical fiber: 31 is attached to this focal position.
従ってコード板１６のスリットを通４・いして集光レン
ズ３０内に入射する受１３光は、この出力用Ｊ）′Ｌツ
ノ′・イバ３１位置に集光することになり、出力用毘フ
ァイバ３１から出力受信光としてｌｊｌ、、り出さｈる
。Therefore, the received light 13 that passes through the slit of the code plate 16 and enters the condensing lens 30 is condensed at the output J)'L horn' fiber 31 position, and the output beam fiber is 31 as output reception light.
肢？則定弓動体２０の位置に対応してコード板１６」ゾ
Ｃ（＋１Ｊ弁」は第５図のＡ −Ａ’ ｖｃ対応する位
置の光が１ｉ−丸レンズ３０に上り集光された場合（〆
（は、波長がλ１．λ４及びλ５の光の多重元が光ノア
ｒハ：３１すこ出］Ｊ受信元として得られるので、光位
置セー′ザの入射光（１）と出力受信光（２）と・すｌ
皮１〈閏（−ｊｌ、’Ｊ’、’Ｅ ；ｔ＞ ６ ｊ（１
に示すような構成となり、この吃１合Ｑこ６−ｊ： ｌ
： ）Ｊ ｉ：、ニー ｆ、、光に対応するデ・ｆジク
ル符刊は１． ｌ Ｏ（］１とな、・ａｏ、このように
して彼１ｉｉ１１定１１１動体のｌ＞’Ｉ置に灯１□１
゛１、して設定されるコード板１６の各イ装置しこ対［
７て、；５１シ：ＣＩｔ異なる彼畏の糺１合せの出力受
１．−８′尤か帽らＩし、この出力受信光にそれぞれデ
ィジタル１、ｉＹ′Ｊか利Ｌ５．．１・１けられるので
コード板１６の光検出位置ににｌ巳、して波測定用動体
の位置をれ１Ｊ密に測定することか一〇きる。Limbs? Corresponding to the position of the fixed arc moving body 20, the code plate 16 ``C (+1J valve)'' will be used when the light at the position corresponding to A-A' vc in FIG. (The multiplex source of light with wavelengths λ1, λ4, and λ5 is obtained as the optical Noah r:31) J receiving source, so the incident light (1) of the optical position laser and the output received light (2 ) and sl
skin 1〈leap (-jl, 'J', 'E;t> 6 j (1
The configuration is as shown in , and this 吃1go Qko6-j: l
: ) J i:, Knee f,, the de f zicle marking corresponding to light is 1. l O(]1,・ao, in this way he 1ii11 constant 111 the light 1□1 at l>'I position of the moving object
゛1, Each device of the code plate 16 set as [
7, ;51: CIt different outputs of the same combination 1. -8' output from the cap, and digital 1, iY'J and L5. ．． Since 1.1 is lost, the position of the moving object for wave measurement can be precisely measured by 1 J at the light detection position of the code plate 16.
ロッドレンズ１１に対１７て分光１没と（２ての回折！
ｈ子１４、コード板］６及び東）′（、レンズ３０かコ
ンパクトに一体化され／こ構成を（ｌ’Ｌ、、分光■ビ
ン、集光レンズを内蔵シ７、光ファイバも人力、帛力倶
（にそ江それ１本設けれはよく、センサ全１１・盆大幅
に小（１，す化することがｉｉＪ能である１、動イ’ｌ
十’ＩＬ： ”、：ｉ的１．１号（を便ＩＮせず、光信
号のみ☆−［ｌソ扱うのでプロ位置トノ−！７−に〉体
か電気的６・こ分離きれｉＬ ４７’ｊ成と々゛つてい
るので外部性）−１の影ｉ”ｌうを受けることか／Ｃく
、安′、ｉ−，−Ｃ且つ高精度動作が実現されろ。The rod lens 11 has a pair of 17 spectra with 1 reflection and (2 diffraction!
h 14, code plate] 6 and east)' (, lens 30 is compactly integrated / this configuration (l'L,, spectroscopy bottle, built-in condensing lens) 7, optical fiber is also manually operated, It is good to have one sensor, and it is possible to reduce the number of sensors to 11.
10'IL: ``,: i's No. 1.1 (I don't carry it in, only the optical signal ☆-[I handle it so I put it in the pro position! 7-) I can separate the body and the electrical 6-this iL 47 Since the structure of 'j' is very large, it is not affected by the externality (i'1), and high-precision operation can be realized.
わ、上、１−翁）１に説明したよう（・てこの究明によ
ると、１・体の４１４逓が堅固であり、Ｈつ太幅（・こ
その小型（ヒか月１（い］ｊｊであって、使用」−便利
で小１．（ｊｊ 、ンバクＥ ：’ｌ’、 ｊ＋４成と
することができ、さらに外部Ｊ％ｆ（；１の影ｉ’ｌ’
を受け４３、その倹１」寵１１１度が優れ、動作か友５
１Ｌまた（皮長多市式光位置センサを提供することがｊ
ｊ」能となる。As I explained to 1, (・According to Leko's investigation, the 414th scale of 1. body is solid, and the small size of 1. , use '-convenient and small 1.(jj, mbakE :'l', j+4 composition, and further external J%f(;1's shadow i'l'
Uke 43, its thrift 1" favor 111 degree is excellent, action or friend 5
1L also provides (Hinagataichi type optical position sensor)
j” becomes Noh.
第」図及び第２図はそれぞれ従来使用されている成長多
・Ｒ式九位ｉｉ！＋′セノザの構成を示ず図、第；３Ｉ
イ１ｔまこの発明のｊＪＩ−長多市式光位置センザの実
施汐１１の構成を示す！仇面１↓；Ｌ卯図、第４図は（
−の発明の波１（多・１１式光位置センサの実施例の構
成を示す斜視１ハ１、第５図（はこの発明の波長多屯式
光代置センヅ゛に用いるコード板１６の構成を示す［ヌ
１、第６図はこの発明にも・ける人力光と出力光の関係
４〜示す図である。
１１ ： ＬＪツドンンズ、１３：入力用光ファイバ、
１４ ：１リロＦ１格子、 １６ ：コード板、 ２０
：被、’、１ｔ１ｊ定Ｉ＋■動体、２１−１．２１−
２・・・・、２２−１゜２２−２ ・・ ・・ 、２：
３−１．２３−２ ・・ 、 ２ ・１−１．２４−１
・ ・・ 、２５ ＝ １．２５−２ ・−・・：ス
ソツト、３０：束゛・１−レンズ゛、３１ ： ＋ｂ
１１月］光ファイバ。
特許出願人 日本航空ｉ［ｊ子丁業林式会ン１代 理
人 ＜、’１： ζ：１： 、ｔｒｉ丼 １ 図
弓
７
１、し５、、
オ ３ 口
１Figures 1 and 2 are respectively the conventionally used growth multi-R formula 9th place ii! +'Diagram showing the composition of Cenoza, No. 3I
Illustrating the configuration of the implementation of the jJI-Nagata city type optical position sensor of this invention! Enemy side 1 ↓; L map, Figure 4 is (
Wave 1 of the invention (a perspective view 1 showing the configuration of an embodiment of a multi-wavelength type optical position sensor) and Fig. 5 (showing the configuration of the code plate 16 used in the wavelength multi-type optical position sensor of this invention) Figure 6 is a diagram showing the relationship between human power light and output light that can also be used in this invention. 11: LJ Tsudonens, 13: Input optical fiber,
14: 1 lilo F1 grid, 16: code board, 20
: Covered, ', 1t1j constant I+■ moving object, 21-1.21-
2..., 22-1゜22-2..., 2:
3-1.23-2... , 2 ・1-1.24-1
・・・・25 = 1.25−2 ・−・・: Soot, 30: Bundle ゛・1-lens゛, 31: +b
November] Optical fiber. Patent Applicant: Japan Airlines I
Person <, '1: ζ:1: , tri bowl 1 figure bow 7 1, shi 5,, o 3 mouth 1
Claims (1)
こ人力用遁Ｌ７ｊ′てバ、つ・ｔＨ又ベイ−ｊけられ、
１１１Ｂ己［１ツＩＪレンズの（ｌ入Ｕ：ｆＡ ＩＧＩ
近（・力に一体に二分光手段か設けられ、前記１ゴツト
レンズの−＜１ｉ１１ｆｔｌ近傍Ｋ １ｊｉｊ記【Ｊツ
１゛レンズの光・Ｉｂンこ【内角に１多動白イＪ：にコ
ード４反がＩｆ！／ （Ｉけらノシ、１円１．己第１の
１偵域り、夕）の１）す１□Ｑ、 ｌコツトレンズの−
Ｑ：：、： １ｆｌｌに（Ｊ、イ、レンズか没けられ、
この集光レレズリ焦点位置（／こ１′１；力用光−・・
ア１′バカ１取（１けられてなることを′（１ｆＩ′：
：’＜とするｌル長多小式光位置センサ。(1) First 11'1 area 1 of one end surface of Rondo lens
This person's power is L7j' Teba, Tsu・tH Matabai-j Kerare,
111B self [1 IJ lens (1 U: fA IGI
A bipolarizing means is integrally provided in the near (force), and the -<1i11ftl vicinity of the 1 Gottle lens is set to 1. The opposite is If!/ (I Keranoshi, 1 yen 1. Self's first reconnaissance area, evening)'s 1) Su1□Q, l Kottorenzu's -
Q::,: 1fl (J, I, the lens disappeared,
This condensing lens focal position (/ko1'1; force light...
A1' Idiot 1'(1fI':
:'< L length multi-small type optical position sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15839783A JPS6049220A (en) | 1983-08-29 | 1983-08-29 | Wavelength multiplex type optical position sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15839783A JPS6049220A (en) | 1983-08-29 | 1983-08-29 | Wavelength multiplex type optical position sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6049220A true JPS6049220A (en) | 1985-03-18 |
Family
ID=15670844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15839783A Pending JPS6049220A (en) | 1983-08-29 | 1983-08-29 | Wavelength multiplex type optical position sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049220A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01202679A (en) * | 1988-02-08 | 1989-08-15 | Teijin Seiki Co Ltd | Optical sensor |
| JPH01202621A (en) * | 1988-02-08 | 1989-08-15 | Teijin Seiki Co Ltd | Optical encoder |
| US6592046B2 (en) | 2000-04-28 | 2003-07-15 | Nippon Thermostat Co., Ltd. | Thermostat device |
| JP2008261745A (en) * | 2007-04-12 | 2008-10-30 | Ojima Shisaku Kenkyusho:Kk | Detection part for encoder, and encoder |
-
1983
- 1983-08-29 JP JP15839783A patent/JPS6049220A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01202679A (en) * | 1988-02-08 | 1989-08-15 | Teijin Seiki Co Ltd | Optical sensor |
| JPH01202621A (en) * | 1988-02-08 | 1989-08-15 | Teijin Seiki Co Ltd | Optical encoder |
| US6592046B2 (en) | 2000-04-28 | 2003-07-15 | Nippon Thermostat Co., Ltd. | Thermostat device |
| JP2008261745A (en) * | 2007-04-12 | 2008-10-30 | Ojima Shisaku Kenkyusho:Kk | Detection part for encoder, and encoder |
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