JPS6047888A - Manufacture of adsorption panel for adsorption pump - Google Patents
Manufacture of adsorption panel for adsorption pumpInfo
- Publication number
- JPS6047888A JPS6047888A JP15550083A JP15550083A JPS6047888A JP S6047888 A JPS6047888 A JP S6047888A JP 15550083 A JP15550083 A JP 15550083A JP 15550083 A JP15550083 A JP 15550083A JP S6047888 A JPS6047888 A JP S6047888A
- Authority
- JP
- Japan
- Prior art keywords
- adsorption
- support plate
- adsorbent
- metallic
- adsorption material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
- F04B37/04—Selection of specific absorption or adsorption materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、例えばヘリウムガス（Ｉ−Ｉ ｅガス）の排
気に使用される吸着ポンプの主要部である吸着パネルの
製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an adsorption panel, which is a main part of an adsorption pump used for evacuation of helium gas (I-Ie gas), for example.
核融合炉では、重水素、三重水素の反応によって生成す
るＨｅガスを高真空下で排気する必要がある。このＨｅ
ガスの排気のため、極低温下での吸着現象を利用する吸
着ポンプ（ソープションポンプ）が考えられている。In a nuclear fusion reactor, it is necessary to exhaust He gas produced by the reaction of deuterium and tritium under high vacuum. This He
Adsorption pumps that utilize adsorption phenomena at extremely low temperatures have been considered for gas exhaust.
吸着ポンプは第１図に示す如く吸着パネル１を主要部と
する。すなわち＠着／（ネノν）は冷却用液体ヘリウム
貯槽２の側壁を構成する金属板製吸着材支持板３の外表
面に１尺着層４′ｆ：形成してなるものである。そして
冷却用液音用−４槽２より蒸発したＴ（ｅガスは配管５
全通して排気され、吸着ガス冷却用シェブロン６へ送ら
れた後、熱シールド板２′ｆｒ、通して外部へ放出され
る。The main part of the suction pump is a suction panel 1 as shown in FIG. That is, @adhesion/(nenov) is formed by forming a one-thick adhesion layer 4'f on the outer surface of the adsorbent support plate 3 made of a metal plate that constitutes the side wall of the liquid helium storage tank 2 for cooling. Then, the T (e gas) evaporated from the cooling liquid sound tank 2 is pipe 5.
After being completely exhausted and sent to the adsorbed gas cooling chevron 6, it is discharged to the outside through the heat shield plate 2'fr.
なお、図中矢印はＨｅガスの流れを示す。Note that arrows in the figure indicate the flow of He gas.
従来考えられている吸着７Ｊ？ンプ吸尤）ぐネル１は、
吸着層４を形成する吸？Ｆ−側として粒状もしくは円筒
状のモレキュラシープ、活性炭、破細炭等を用い、これ
をエチキシ樹脂等の有機系接着剤にて銅、アルミニウム
合金、ステンレス鋼等よりなる吸着祠支持板３の外表面
に接尤して製造されていた。Adsorption 7J as conventionally thought? Neru 1 is
The suction that forms the adsorption layer 4? Granular or cylindrical molecular sheep, activated carbon, crushed carbon, etc. are used for the F- side, and this is attached to the adsorption shrine support plate 3 made of copper, aluminum alloy, stainless steel, etc. using an organic adhesive such as ethoxy resin. It was manufactured by attaching it to the outer surface.
上記構成の吸着ポンプにおいて、排気すべきＨｅガスが
吸着層４の表面に吸着されると吸着熱が発生する。この
ため吸着層４は局部的に温度が上昇するが、Ｕ着熱の一
部は吸着材支持板３を通じて液体Ｈｅで除去される。と
ころが上記の方法で製造された吸着パネル１では吸着層
４と吸着材支持板３との間に有機系接着剤が介在し、こ
の接着剤の熱伝導率が低いため、吸着熱の除去率はきわ
めて低い。In the adsorption pump configured as described above, when the He gas to be exhausted is adsorbed on the surface of the adsorption layer 4, heat of adsorption is generated. Therefore, the temperature of the adsorption layer 4 locally increases, but a part of the U heat is removed by liquid He through the adsorption material support plate 3. However, in the adsorption panel 1 manufactured by the above method, an organic adhesive is interposed between the adsorption layer 4 and the adsorption support plate 3, and this adhesive has low thermal conductivity, so the removal rate of adsorption heat is low. Extremely low.
一般に、吸着デンゾの性能は吸着パネル−門着速度、吸
着量によって表わされるが、上記の方法で製造された吸
着パネル１では吸着熱の除去率が低いため吸着速度が低
く、かつ吸着量も平衡吸着量の数％程度に抑えられてし
まい、高性能の吸着ポンプが得られないという問題があ
った。Generally, the performance of adsorption denzo is expressed by the adsorption panel-gate deposition rate and adsorption amount, but in adsorption panel 1 manufactured by the above method, the adsorption rate is low because the removal rate of the heat of adsorption is low, and the adsorption amount is also in equilibrium. There was a problem in that the adsorption amount was suppressed to about several percent of the adsorption amount, making it impossible to obtain a high-performance adsorption pump.
そこで、有機系接着剤に代えて熱伝導率の高い銀ロウや
半田等の金属系接着剤を使用することも考えられるが、
モルキュラシーブ、活性炭、破細炭等の吸着剤はそのま
までは金属系接着剤で接着することができないという問
題があった。Therefore, it may be possible to use metallic adhesives such as silver solder or solder, which have high thermal conductivity, instead of organic adhesives.
There is a problem in that adsorbents such as molecular sieves, activated carbon, and pulverized carbon cannot be bonded as they are with metal adhesives.
本発明はこのよりな問題を解消するべくなされたもので
、その目的は、吸着パネルでの吸着速度を高め、吸着量
を増大させて吸着ポンプの性能を高めうる吸着ポンプ用
吸着パネルの製造方法を提供することにある。The present invention was made to solve this problem, and its purpose is to increase the adsorption rate in the adsorption panel, increase the amount of adsorption, and improve the performance of the adsorption pump. Our goal is to provide the following.
そして本発明の製造方法は、この目的達成のため、吸着
層を構成する吸着材の表面に金Ｒ薄膜を付着させたのち
、この吸着材を金属系接着剤により金属製吸着材支持板
に接着して吸着層を形成するものである。In order to achieve this objective, the manufacturing method of the present invention involves attaching a gold R thin film to the surface of the adsorbent constituting the adsorption layer, and then bonding this adsorbent to a metal adsorbent support plate using a metal adhesive. to form an adsorption layer.
この方法によれば、モレキュラシープ、活性炭、破細炭
等の吸着材を、銀ロウや半田等の金属系接着剤により、
銅、アルミニウム合金、ステンレス鋼等よりなる吸着材
支持板に接着することができる。したがって吸着層の吸
着熱は。According to this method, an adsorbent such as molecular sheep, activated carbon, or finely divided carbon is bonded with a metallic adhesive such as silver solder or solder.
It can be adhered to an adsorbent support plate made of copper, aluminum alloy, stainless steel, etc. Therefore, the heat of adsorption in the adsorption layer is.
接着剤および吸着材支持板を通じて冷却用液化ガス貯槽
内の液化ガスへ効率よく伝達され、除去されるので、吸
着パネルでの吸着速度が高められ、吸着量も増加して、
吸着ポンプの性能が高められることになる。It is efficiently transferred to the liquefied gas in the cooling liquefied gas storage tank through the adhesive and adsorbent support plate and removed, increasing the adsorption rate on the adsorption panel and increasing the amount of adsorption.
The performance of the adsorption pump will be improved.
以下、本発明の製造方法を第２図および第３図に示す一
実施例にもとづいて説明する。The manufacturing method of the present invention will be explained below based on an embodiment shown in FIGS. 2 and 3.
第２図において、図中１１は吸着層４を構成するモリキ
ュラシープ、活性炭、破細炭等の吸着材である。乙の吸
着材１ノは粒子状または円筒状のもので、素面には、予
め、真空蒸着法や化学メッキ法等により、ニッケル、錫
、銀、銅等の金属薄膜１２を付着させておく。In FIG. 2, reference numeral 11 indicates an adsorbent such as molecular sheep, activated carbon, and finely divided carbon that constitutes the adsorption layer 4. In FIG. The adsorbent 1 is in the form of particles or cylinders, and a thin metal film 12 of nickel, tin, silver, copper, etc. is previously attached to the bare surface by vacuum evaporation, chemical plating, or the like.
一方、銅、アルミニウム合金、ステンレス鋼等の金属板
よりなる吸着材支持板３の外表面には、銀ロウ、半田等
の金属系接着剤１３を一定の厚さで付着させ、この接着
剤１３の層の上に前記金属薄膜１２を付着した吸着材１
１を載置する。なお、上記接着剤１３の層の厚さは吸着
材１１が約半分埋まる程度が望ましい。On the other hand, a metal adhesive 13 such as silver solder or solder is attached to the outer surface of the adsorbent support plate 3 made of a metal plate such as copper, aluminum alloy, or stainless steel at a constant thickness. Adsorbent material 1 with the metal thin film 12 attached on top of the layer of
Place 1. Note that the thickness of the layer of the adhesive 13 is preferably such that about half of the adsorbent 11 is buried therein.
次に、第３図の如く吸着層１１の上から押え板１４で押
えて吸着材１１を固定し、真空炉に入れて所定の温度に
一定時間保持し、吸着材１１を吸着材支持板３に接着す
る。なお、この接着時には通常使用されるフラックスは
、吸着材１１の性能を低下させるので使用しないが。Next, as shown in FIG. 3, the adsorbent 11 is fixed by pressing the adsorbent layer 11 with a presser plate 14, and placed in a vacuum furnace and maintained at a predetermined temperature for a certain period of time. Glue to. Note that flux, which is normally used during this bonding, is not used because it degrades the performance of the adsorbent 11.
金属薄膜１２と接着剤１３との「ヌレ性」が良好のため
吸着材１１は支持板３に確実に接着される。Since the metal thin film 12 and the adhesive 13 have good "wetability", the adsorbent 11 is reliably bonded to the support plate 3.
そしてこのように形成された吸着パネルは吸着材１１か
ら吸着材支持板３への熱伝導が良好になるので、吸着材
１ノの吸着熱が冷却用液体へジクム貯槽２中の液体へ９
ウムにより除去され、吸着材１１の温度上昇が抑制され
る。したがって吸着材１ノの吸着速度が高められ、吸着
量も増大して吸着ポンプの性能が高められることになる
。また再生温度が高くとれるため、吸着材支持板３の再
生が容易となる。The adsorption panel formed in this way has good heat conduction from the adsorbent 11 to the adsorbent support plate 3, so that the adsorption heat of the adsorbent 1 is transferred to the cooling liquid and the liquid in the ZIQUM storage tank 2.
The temperature rise of the adsorbent 11 is suppressed. Therefore, the adsorption rate of the adsorbent 1 is increased, the amount of adsorption is also increased, and the performance of the adsorption pump is improved. Furthermore, since the regeneration temperature can be kept high, the adsorbent support plate 3 can be regenerated easily.
なお本発明の製造方法は上記の実施例に限定されるもの
ではない。例えば吸着材１１の全表面に金属薄膜１２ｆ
ｔ付着する必要はなく、第４図の如く接着剤１３に接触
する面（全表面の約半分）にのみ蒸着法によって金属薄
膜ｌ〆全付着するものとしてもよい。Note that the manufacturing method of the present invention is not limited to the above embodiments. For example, the metal thin film 12f is coated on the entire surface of the adsorbent 11.
It is not necessary to attach the metal thin film 1 to the entire surface by vapor deposition only on the surface (approximately half of the total surface) that contacts the adhesive 13 as shown in FIG.
以上詳述したように１本発明の製造方法によれば、吸着
材の表面に金属薄膜を付着することにより金属系接着剤
による吸着材と支持板との接着が可能になり、吸着パネ
ルでの吸着速度を高め、吸着量を増大させて吸着ポンプ
の性能を高めることができる。As detailed above, according to the manufacturing method of the present invention, by attaching a metal thin film to the surface of the adsorbent, it is possible to bond the adsorbent and the support plate with a metal adhesive, and the adsorption panel The performance of the adsorption pump can be improved by increasing the adsorption rate and increasing the amount of adsorption.
第１図は吸着ポンプの概略構成図、第２図および第３図
は本発明の製造方法の一実施例を工程順に示す概略断面
図、第４図は変形例を示す概略断面図である。
１・・・吸着パネル、２・・・冷却用液体〜リウム貯榴
（冷却用液化ガス貯槽）、３・・・吸着材支持板、４・
−・吸着層、１ノ・・・吸着材、１２．１２’・・・金
属薄膜、１３・・・金属系接着剤。
出願人復代理人 弁理士 鈴 江 弐 武第１図
第２図
第３図
第４図FIG. 1 is a schematic configuration diagram of an adsorption pump, FIGS. 2 and 3 are schematic sectional views showing an embodiment of the manufacturing method of the present invention in the order of steps, and FIG. 4 is a schematic sectional view showing a modification. 1... Adsorption panel, 2... Cooling liquid ~ lium storage tank (cooling liquefied gas storage tank), 3... Adsorbent support plate, 4...
- Adsorption layer, 1 No. Adsorption material, 12.12'... Metal thin film, 13... Metal adhesive. Applicant Sub-Agent Patent Attorney Takeshi Suzue Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
持板の外表面に吸着層を形成してなる吸着ポンプ用吸着
パネル全製造するにあたり、前記吸着層を構成する吸着
材の表面に金属薄膜を付着させたのち、この吸着材を金
属系接着剤により前記金属板吸着材支持板に接着して吸
着層を形成することを特徴とする吸着ポンプ用吸着パネ
ルの製造方法。When manufacturing all the adsorption panels for adsorption pumps, which are formed by forming an adsorption layer on the outer surface of a metal plate adsorbent support plate that constitutes the entire side wall of a cooling liquefied gas storage tank, metal is applied to the surface of the adsorption material that makes up the adsorption layer. A method for manufacturing an adsorption panel for an adsorption pump, which comprises: adhering a thin film, and then adhering the adsorbent to the metal adsorbent support plate using a metal adhesive to form an adsorption layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15550083A JPS6047888A (en) | 1983-08-25 | 1983-08-25 | Manufacture of adsorption panel for adsorption pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15550083A JPS6047888A (en) | 1983-08-25 | 1983-08-25 | Manufacture of adsorption panel for adsorption pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6047888A true JPS6047888A (en) | 1985-03-15 |
Family
ID=15607403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15550083A Pending JPS6047888A (en) | 1983-08-25 | 1983-08-25 | Manufacture of adsorption panel for adsorption pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047888A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63256259A (en) * | 1987-04-10 | 1988-10-24 | Toray Ind Inc | Production of cylindrical fiber reinforced metallic composite material |
-
1983
- 1983-08-25 JP JP15550083A patent/JPS6047888A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63256259A (en) * | 1987-04-10 | 1988-10-24 | Toray Ind Inc | Production of cylindrical fiber reinforced metallic composite material |
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