JPS6045924U - air bearing device - Google Patents

air bearing device

Info

Publication number
JPS6045924U
JPS6045924U JP13816583U JP13816583U JPS6045924U JP S6045924 U JPS6045924 U JP S6045924U JP 13816583 U JP13816583 U JP 13816583U JP 13816583 U JP13816583 U JP 13816583U JP S6045924 U JPS6045924 U JP S6045924U
Authority
JP
Japan
Prior art keywords
air bearing
bearing device
recess
fixed guide
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13816583U
Other languages
Japanese (ja)
Inventor
博史 後藤
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to JP13816583U priority Critical patent/JPS6045924U/en
Publication of JPS6045924U publication Critical patent/JPS6045924U/en
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本案空気軸受装置の一例を示す断面図、第2図
は第1図の要部の拡大図、第3図は従来例の概略図であ
る。 1・・・・・・定盤、2・・・・・・固定ガイド、3・
・・・・・可動体、4,4a・・・・・・空気軸受パッ
ド、46・・・・・・パッド面、47・・・・・・凹部
、5,5a・・・・・・磁気ロック機構、51・・・・
・・電磁石、52・・・・・・磁極、53・・・・・・
永久磁石=
FIG. 1 is a sectional view showing an example of the air bearing device of the present invention, FIG. 2 is an enlarged view of the main part of FIG. 1, and FIG. 3 is a schematic diagram of a conventional example. 1... Surface plate, 2... Fixed guide, 3.
...Movable body, 4,4a...Air bearing pad, 46...Pad surface, 47...Recess, 5,5a...Magnetic Lock mechanism, 51...
...Electromagnet, 52...Magnetic pole, 53...
Permanent magnet =

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)可動体の下面へ定盤上の固定ガイドを挾み一対の
軸受パッドを取付けた空気軸受装置において、前記軸受
パッドには、固定ガイドと対向する軸受パッド面に凹部
を形成し、該凹部には、凹部から出没して固定ガイドに
対しロックする・磁気ロック機構を設けてなる空気軸受
装置。
(1) In an air bearing device in which a pair of bearing pads are attached to the lower surface of a movable body with a fixed guide on a surface plate in between, the bearing pad has a recess formed on the surface of the bearing pad facing the fixed guide, The air bearing device is equipped with a magnetic locking mechanism in the recess that moves in and out of the recess and locks against the fixed guide.
(2)磁気ロック機構は、凹部の底部に配備され電流方
向(どよりN、  S変換する磁極を有する電磁−石と
、前記磁極に対向してN、 S何れかの磁極を有す永久
磁石である実用新案登録請求の範囲第1項記載の空気軸
受装置。
(2) The magnetic locking mechanism includes an electromagnet disposed at the bottom of the recess and having a magnetic pole that converts the current direction (N or S), and a permanent magnet facing the magnetic pole and having either an N or S magnetic pole. An air bearing device according to claim 1 of the utility model registration claim.
JP13816583U 1983-09-05 1983-09-05 air bearing device Pending JPS6045924U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13816583U JPS6045924U (en) 1983-09-05 1983-09-05 air bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13816583U JPS6045924U (en) 1983-09-05 1983-09-05 air bearing device

Publications (1)

Publication Number Publication Date
JPS6045924U true JPS6045924U (en) 1985-04-01

Family

ID=30310098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13816583U Pending JPS6045924U (en) 1983-09-05 1983-09-05 air bearing device

Country Status (1)

Country Link
JP (1) JPS6045924U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200283A (en) * 1986-02-28 1987-09-03 株式会社東芝 Noncontact type feed-table
JPS63163042A (en) * 1986-12-23 1988-07-06 Smc Corp Linear actuator
JPS641826U (en) * 1987-06-23 1989-01-09
JPH063532U (en) * 1992-06-17 1994-01-18 株式会社ハーモニック・ドライブ・システムズ Fine movement stage with table base fixing mechanism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200283A (en) * 1986-02-28 1987-09-03 株式会社東芝 Noncontact type feed-table
JPS63163042A (en) * 1986-12-23 1988-07-06 Smc Corp Linear actuator
JPS641826U (en) * 1987-06-23 1989-01-09
JPH063532U (en) * 1992-06-17 1994-01-18 株式会社ハーモニック・ドライブ・システムズ Fine movement stage with table base fixing mechanism

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