JPS6045439U - stage equipment - Google Patents
stage equipmentInfo
- Publication number
- JPS6045439U JPS6045439U JP13816683U JP13816683U JPS6045439U JP S6045439 U JPS6045439 U JP S6045439U JP 13816683 U JP13816683 U JP 13816683U JP 13816683 U JP13816683 U JP 13816683U JP S6045439 U JPS6045439 U JP S6045439U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- pulse motor
- stop position
- stage equipment
- detection means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案のステージ装置の一部を断面に表わした
正面図、第２図は作動状況を示す正面図、第３図はロッ
ク機構の係合時における断面図、第４図は検出手段取付
部分の断面図、第５図はロック解除時の断面図、第６図
は装置のタイミングチャートである。
１・・・・・・固定ステージ、１１・・・・・・回転軸
、１２・・・・・・パルスモータ、１７・・・・・・検
出手段、２・・・・・・回転ステージ、３・・・・・・
ロック機構。
−六 ３ 図
ズ
３３／Fig. 1 is a front view showing a part of the stage device of the present invention in cross section, Fig. 2 is a front view showing the operating situation, Fig. 3 is a sectional view when the locking mechanism is engaged, and Fig. 4 is a detection FIG. 5 is a cross-sectional view of the means attachment part, FIG. 5 is a cross-sectional view when the lock is released, and FIG. 6 is a timing chart of the device. DESCRIPTION OF SYMBOLS 1... Fixed stage, 11... Rotating shaft, 12... Pulse motor, 17... Detecting means, 2... Rotating stage, 3...
Locking mechanism. -6 3 Figures 33/
Claims (1)
伏可能な回転ステージを配備したステージ装置において
、両ステージ間に設けられ、回転ステージの水平停止位
置を検出する検出手段と、該検出手段に連繋され回転ス
テージを停止位置にロックするロック機構およびロック
完了の一定時間経過後、前記パルスモータを停止させる
遅延手段とを備えたステージ装置。In a stage device in which a rotary stage driven by a pulse motor and capable of raising and lowering is disposed on the side of a fixed stage, a detection means is provided between the two stages and detects a horizontal stop position of the rotary stage, and the detection means is provided with a A stage device comprising: a locking mechanism that is linked to lock a rotary stage at a stop position; and a delay means that stops the pulse motor after a predetermined period of time has elapsed since locking is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13816683U JPS6045439U (en) | 1983-09-05 | 1983-09-05 | stage equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13816683U JPS6045439U (en) | 1983-09-05 | 1983-09-05 | stage equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6045439U true JPS6045439U (en) | 1985-03-30 |
Family
ID=30310100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13816683U Pending JPS6045439U (en) | 1983-09-05 | 1983-09-05 | stage equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045439U (en) |
-
1983
- 1983-09-05 JP JP13816683U patent/JPS6045439U/en active Pending
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