JPS6045428U - heat treatment furnace - Google Patents

heat treatment furnace

Info

Publication number
JPS6045428U
JPS6045428U JP13808183U JP13808183U JPS6045428U JP S6045428 U JPS6045428 U JP S6045428U JP 13808183 U JP13808183 U JP 13808183U JP 13808183 U JP13808183 U JP 13808183U JP S6045428 U JPS6045428 U JP S6045428U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment furnace
reaction tube
abstract
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13808183U
Other languages
Japanese (ja)
Inventor
小川 明直
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP13808183U priority Critical patent/JPS6045428U/en
Publication of JPS6045428U publication Critical patent/JPS6045428U/en
Pending legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の熱処理炉の模式的側断面構造図、第2図
は本考案の一実施例の熱処理炉の模式的側断面構造図、
第3図は第2図のA−A断面図である。 図において11は炉体、12は環状の加熱ヒータ、13
は反応管、14は石英キャップ、15は補助ヒータ用炉
体、16は補助ヒータ、17は試料載置用ボート、18
は試料を示す。
FIG. 1 is a schematic side cross-sectional structural diagram of a conventional heat treatment furnace, and FIG. 2 is a schematic side cross-sectional structural diagram of a heat treatment furnace according to an embodiment of the present invention.
FIG. 3 is a sectional view taken along the line AA in FIG. 2. In the figure, 11 is a furnace body, 12 is an annular heater, 13
14 is a reaction tube, 14 is a quartz cap, 15 is a furnace body for an auxiliary heater, 16 is an auxiliary heater, 17 is a boat for mounting a sample, 18
indicates a sample.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 反応管中央部に環状加熱ヒニタが設けられた横型熱処理
炉において、該反応管の試料挿入口側の側部底面に補助
ヒータが設けられた構造を有することを特徴とする熱処
理炉。
1. A horizontal heat treatment furnace including an annular heating heater provided at the center of the reaction tube, characterized in that an auxiliary heater is provided at the bottom of the side of the reaction tube on the sample insertion port side.
JP13808183U 1983-09-05 1983-09-05 heat treatment furnace Pending JPS6045428U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13808183U JPS6045428U (en) 1983-09-05 1983-09-05 heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13808183U JPS6045428U (en) 1983-09-05 1983-09-05 heat treatment furnace

Publications (1)

Publication Number Publication Date
JPS6045428U true JPS6045428U (en) 1985-03-30

Family

ID=30309940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13808183U Pending JPS6045428U (en) 1983-09-05 1983-09-05 heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS6045428U (en)

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