JPS6041731A - Glow discharge device for emission spectral analysis - Google Patents

Abstract

PURPOSE:To enable surface analyze of a specimen with a rough surface by providing a tube for flowing an inert gas such as Ar in a groove located outside an O ring for dual shield and by introducing the inert gas therein. CONSTITUTION:A gas introduction tube 16 for introducing inert gas such as argon is provided outside an O ring 14 for maintaining a vacuum degree, and an O ring groove 15 n in which an O ring 17 is titled is provided. The inert gas is introduced through the gas introduction tubes 8, 16 and is exhausted through the gas exhaust tubes 10, 11, and when a high voltage is applied between an electrode 2 and an electrode 7, the inert gas is ionized to produce positive ions, and since a specimen 1 is suppered the excitation and the emission are generated, after atoms in the specimen 1 are scattered. At this time, since the inert gas is pressed into a glow discharge device through the rough surface of the specimen from the gas introduction tube 16, the impure gases such as oxygen and nitrogen in the atmosphere cannot be enter. As a result, even when a specimen with a rough surface allowed to is analyzed, it is possible to carry out the stable glow discharge.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a glow discharge device for emission spectroscopic analysis, and in particular to a novel improvement for stably performing glow discharge on a sample with a rough surface.

There are many types of devices that have been used in the past, but for samples with rough surfaces, Q
It is impossible to maintain a vacuum level of about 10-3 Torr with a ring, it is difficult to perform glow discharge stably, and for samples with compatible fro surfaces, it is necessary to smooth the surface in the pretreatment stage. was there. In addition, for the purpose of qualitative and quantitative analysis of the sample surface, it is impossible to perform the above pretreatment, and there is a drawback that analysis cannot be performed.This invention is extremely effective for quickly removing one or more defects. In order to stably perform glow discharge, we installed double OIJ rings to maintain a vacuum level of about 10' Torr in the shaded area where the sample is mounted. ) oxygen in the outside air, which is a hindrance to
Prevent nitrogen from entering the glow discharge device, and inert gas such as Ar in the glow discharge device for several TQr? ' By flowing, oxygen and nitrogen in the outside air are replaced with inert gas such as Ar, stabilizing the glow discharge, and further
A tube for flowing an inert gas such as Ar is installed in the groove outside the O-ring of the 1 shield, and the inert gas such as Ar is forcibly inserted into the glow discharge device through a sample with a rough surface. .

Below, along with the drawings, glow emission 1 for emission spectrometry according to the present invention! A preferred embodiment of the device will now be described.

In the drawings, 1 shows a sample as an analyte, 2 shows an electrode to which a positive potential of 500 to 2000 V is applied by a DC high-voltage power supply (not shown), 6 shows an insulator for insulating from the upper part with a voltage value of 2, and 4 5Vi is an insulator for insulating the lower part of the electric coffin 2, 5Vi is an insulator for insulating the electrode and cathode 7, and 6 is an insulator 4.
7, a cathode placed in contact with the sample 1, 8 a gas introduction tube for introducing an inert gas such as argon, and 9 a quartz plate placed on the insulator 3. A glass window, 10, a gas exhaust pipe formed to penetrate the electrode 2, 11
12 is a support frame for fixing a quartz glass window; 13 is a sample 1, an electrode 2, . . .
6. This is a discharge space formed by the insulators 3, 4.5 and the quartz glass window 9. 14 OIJ rings are used to maintain the degree of vacuum in the sample 1 and the discharge space; 15 is a ring groove having a gas introduction tube 16 for introducing an inert gas such as argon, and into which an 011 ring 17 is attached.

Next, the operation will be explained.

First, a metallic sample 1 is set as shown in the drawing, and then an inert gas such as argon gas is introduced into the discharge space 13 from the gas introduction tube 8 in the direction of the arrow. At the same time, inert gas is similarly introduced through the gas introduction pipe 16, and inert gas such as argon is exhausted from the gas exhaust pipe 10.11 in the direction of the arrow.

Next, a power source (not shown) is driven to apply the above-mentioned voltage between the electrodes 2 and 7. Here, the electrode 6 is electrostatically coupled to the electrode 2, and a voltage approximately 9 times that of the electrode 2 is applied to the electrode 6. At the same time, the inert gas such as argon inside the electrode 2.6 is ionized and becomes positive ions, which irradiate the sample 1 at the same potential as the cathode 7, so that the atoms in the sample 1 are scattered and excited to emit light.

At this time, inert gases such as the gas inlet tube 16 and sialbone are forced into the glow discharge device through the rough surface of the sample in the direction of arrow entry, so impurity gases such as oxygen and nitrogen from the outside air do not enter. . As a result, even when analyzing a sample with a rough surface, it is possible to perform stable glow discharge in the same way as when analyzing a sample with a smooth surface.As described above, according to the present invention, It is possible to perform glow discharge under the same discharge moxibustion conditions regardless of the roughness of the sample surface, allowing for highly accurate analysis.

Furthermore, this invention makes it possible to perform surface analysis of samples with rough surfaces, which has been difficult until now, and provides a highly accurate glow discharge device for emission spectroscopic analysis that has a wide range of applications.

[Brief explanation of drawings]

The drawing is a longitudinal sectional view of one embodiment of the present invention. 1... Sample to be analyzed 2...Positive electrode 3, 4.5... Insulator 6... Electrode 7...Cathode 8...Gas introduction pipe 9...Quartz glass window 10.11... Gas exhaust pipe 12...Quartz glass window support frame 13...discharge space 14...0 ring １５　・・・・・・0ri puffer groove 16...Gas introduction pipe 17...0 ring that's all Applicant: Daini Seikogo Co., Ltd.

Claims (2)

[Claims] (1) In a glow discharge device that causes discharge light emission by applying a voltage between a cathode section on which a sample to be measured is attached and an anode section insulated from the cathode section, the cathode section has an A
A glow discharge device characterized in that a groove is provided for flowing inert gas. (2) The glow discharge device according to claim 1, wherein the groove of the cathode portion is provided outside a groove in which an O cylinder for maintaining the degree of vacuum within the glow discharge device is installed.