JPS6039513A - Detector of laser output - Google Patents
Detector of laser outputInfo
- Publication number
- JPS6039513A JPS6039513A JP14849983A JP14849983A JPS6039513A JP S6039513 A JPS6039513 A JP S6039513A JP 14849983 A JP14849983 A JP 14849983A JP 14849983 A JP14849983 A JP 14849983A JP S6039513 A JPS6039513 A JP S6039513A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrical insulation
- silicon carbide
- detector
- laser output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000010292 electrical insulation Methods 0.000 claims abstract description 8
- 229920001296 polysiloxane Polymers 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 239000011358 absorbing material Substances 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 2
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 2
- -1 ''Hitaceram'' Chemical compound 0.000 abstract 1
- 230000002349 favourable effect Effects 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 240000008042 Zea mays Species 0.000 description 1
- 235000016383 Zea mays subsp huehuetenangensis Nutrition 0.000 description 1
- 235000002017 Zea mays subsp mays Nutrition 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- PEEDYJQEMCKDDX-UHFFFAOYSA-N antimony bismuth Chemical compound [Sb].[Bi] PEEDYJQEMCKDDX-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 235000009973 maize Nutrition 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は基板としてシリコーンカーバイドを選択的に使
用するレーザー出力検出器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser power detector that selectively uses silicone carbide as the substrate.
従来、０．１Ｗ〜３００Ｗ程度のＣＯ２レーザ−、ＹＡ
Ｇレーザ−、Ａｒレーザー等の出力を測定するには、ナ
ーマルディスク（熱基板）型出力検出器が多く使用され
ていた。このものは、第１図に示す如く、電気絶縁性及
び耐熱性を有する基板ｌの表面ニアンチモンービスマス
系、白金−ロジウム系等のナーモパイルの温度検出部２
を真空蒸着によシ配設し、また該基板の裏面には矢印方
向から投射される紫外、可視、赤外光を能率良く吸収す
る光吸収物質３を塗設し、その他所要の部品を付設して
なるものであった。この場合、基板には、殆んどの場合
アルマイト処理を１１とこしたアルミ板、アルミナ、マ
イカ等の如く電気絶縁栓及び耐熱性を有するものが使用
されたが、特に機械的強度が大であることから上述のア
ルマイト処理したアルミ板が多く使用されていた。Conventionally, CO2 laser of about 0.1W to 300W, YA
In order to measure the output of a G laser, an Ar laser, etc., a thermal disk (thermal substrate) type output detector has often been used. As shown in FIG. 1, this device consists of a temperature detecting section 2 of a nermopile made of a material such as a nium antimony-bismuth system or a platinum-rhodium system on the surface of a substrate l having electrical insulation and heat resistance.
are arranged by vacuum evaporation, and a light-absorbing material 3 that efficiently absorbs ultraviolet, visible, and infrared light projected from the direction of the arrow is coated on the back side of the substrate, and other necessary parts are attached. It was something that happened. In this case, the substrate used in most cases is an aluminum plate that has been anodized to 11, alumina, mica, etc., which has electrical insulation plugs and heat resistance, but it is especially important to have high mechanical strength. Since then, the above-mentioned alumite-treated aluminum plate has been widely used.
しかしながら、レーザー出力測定の如き極めて高温度に
曝露される環境下においては、従来の各種基板は不燃性
ではあっても熱膨張を生じる所謂サーマルショック性を
有することで問題があシ、甚しき場合には基板に亀裂を
生じる等の現象が起った。この結果、該基板の表面に配
設されている温度検出部が該基板の膨張力によって破断
を生じる等経時的に多くの欠陥が頻発し極めて不都合で
あった。このため、かかる欠陥のない基板の出現が強く
要望されていたものである。However, in environments where they are exposed to extremely high temperatures, such as when measuring laser output, various conventional substrates, although nonflammable, have a so-called thermal shock property that causes thermal expansion, which poses a problem, and in severe cases. Phenomena such as cracks in the substrate occurred. As a result, many defects frequently occur over time, such as the temperature sensing portion disposed on the surface of the substrate breaking due to the expansion force of the substrate, which is extremely inconvenient. Therefore, there has been a strong demand for a substrate free of such defects.
本発明はかかる要望に対処するためなされたもので、電
気絶縁性を有するとともに、耐熱性が優れ特にサーマル
ショック性のない又は極めて小なる材料について種々検
討を加えた結果シリコーンカーバイドが特別に要求され
る性能を具有するものであることを発見し本発明を完成
するに至シたるものである。The present invention has been made to meet such demands, and as a result of various studies on materials that have electrical insulation properties, excellent heat resistance, and particularly no thermal shock properties, or are extremely small, silicone carbide has been specially requested. This discovery led to the completion of the present invention.
本発明に係るシリコーンカーバイドは、その電気絶縁性
が他の多くのセラミックとほぼ同様ＲＴ。The silicone carbide according to the present invention has electrical insulation properties similar to those of many other ceramics.
０ｍの単位では、１０１３よυ大であシ、また、熱膨張
係数は、アルミナの的外であシ、特に熱伝導性がアルミ
ナよりｉかに優れ、また金属アルミニウム以上の物質で
あシ、炭化珪素（ＳｉＣ）の焼結体であって例えば日立
製作断裂のヒタセラム等が好適に使用される。In the unit of 0 m, it is υ larger than 1013, and the coefficient of thermal expansion is outside the range of alumina.In particular, the thermal conductivity is much better than alumina, and it is a material that is better than metal aluminum. A sintered body of silicon carbide (SiC), such as Hitaceram produced by Hitachi, is preferably used.
なお、光吸収物質をサーモ／母イル等の温度検出部の上
面に直接塗布するメイズのレーザー出力検出器に対して
も、シリコーンカーバイト基板は極めて好都合である。Note that the silicone carbide substrate is also extremely convenient for maize laser output detectors in which a light-absorbing material is directly applied to the upper surface of the temperature detection part such as a thermometer/base plate.
以上の如く、本発明に係るシリコーンカニバイト基板を
有するレーザー出力検出器にあっては、レーザー出力に
基づく高熱猿境下にあっても、電気絶縁性及び耐熱性等
本来基板に最低限度必要な特性を有することは勿論、従
来の材質では殆んど具有されることのなかった高い熱伝
導性を有するのでレーザー光が光吸収物質によシ吸収さ
れて生じる熱が基板上の受光部に局所的に滞留すること
がなく速かに基板内部に一様に拡散するもので、特に、
基板に適宜の放熱手段を組合せるときは基板上の急激な
温度勾配が更に緩和され、基板の亀裂等を全面的に回避
し得るものであシ、その結果基板上のビスマス−アンチ
モン等の金属製の温度検出部が破線又は断線等を生じる
ことがなくなり、検出器の検出能力を低下又は消失する
ことがなく、また、その耐用命数を著しく延長しうるこ
ととなって実用上極めて有用である。As described above, in the laser output detector having the silicone canibite substrate according to the present invention, even under high temperature conditions based on the laser output, the minimum necessary characteristics of the substrate, such as electrical insulation and heat resistance, can be maintained. Not only does it have the characteristics of It quickly and uniformly diffuses inside the substrate without stagnation, and in particular,
When an appropriate heat dissipation means is combined with the substrate, the sharp temperature gradient on the substrate can be further alleviated, and cracks in the substrate can be completely avoided.As a result, metals such as bismuth-antimony on the substrate can be This is extremely useful in practice, as the temperature detection section made by the manufacturer will no longer have broken lines or disconnections, the detection ability of the detector will not be reduced or lost, and its service life can be significantly extended. .
第１図は、レーザー出力検出器の構造を示す説明図であ
る。
ｌ・・・基板、２・・・温度検出部、３・・・光吸収物
質。FIG. 1 is an explanatory diagram showing the structure of a laser output detector. 1...Substrate, 2...Temperature detection section, 3...Light absorption material.
Claims (1)
塗設する基板を有するレーザー出力検出器において、該
基板として電気絶縁性及び耐熱性を有するとともに高い
熱伝導性を具有するシリコーンカーバイドを選択的に使
用することを特徴とするレーザー出力検出器。In a laser output detector having a substrate on which a temperature detection part is extended and a light absorbing material is coated on the front or back side, silicone carbide, which has electrical insulation and heat resistance as well as high thermal conductivity, is used as the substrate. Laser power detector characterized by selective use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14849983A JPS6039513A (en) | 1983-08-13 | 1983-08-13 | Detector of laser output |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14849983A JPS6039513A (en) | 1983-08-13 | 1983-08-13 | Detector of laser output |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6039513A true JPS6039513A (en) | 1985-03-01 |
Family
ID=15454117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14849983A Pending JPS6039513A (en) | 1983-08-13 | 1983-08-13 | Detector of laser output |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6039513A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170105169A (en) * | 2016-03-08 | 2017-09-19 | 삼성디스플레이 주식회사 | Cable module for display device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57166367A (en) * | 1982-02-12 | 1982-10-13 | Hitachi Ltd | Electrically insulating material |
-
1983
- 1983-08-13 JP JP14849983A patent/JPS6039513A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57166367A (en) * | 1982-02-12 | 1982-10-13 | Hitachi Ltd | Electrically insulating material |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170105169A (en) * | 2016-03-08 | 2017-09-19 | 삼성디스플레이 주식회사 | Cable module for display device |
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