JPS6039302U - Filtration device for chemical liquids - Google Patents
Filtration device for chemical liquidsInfo
- Publication number
- JPS6039302U JPS6039302U JP12843783U JP12843783U JPS6039302U JP S6039302 U JPS6039302 U JP S6039302U JP 12843783 U JP12843783 U JP 12843783U JP 12843783 U JP12843783 U JP 12843783U JP S6039302 U JPS6039302 U JP S6039302U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- stock solution
- filtrate
- filtration device
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- ing And Chemical Polishing (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の一実施例のフローチャート、第２図
は本考案に使用するマイクロフィルタの一部断面図であ
る。
１・・・・・・濾過液槽、２・・・・・・原液槽、３′
・・・・・・マイクロフィルタ、４・・・・・・原液供
給管、６・・・・・・濾過液管、７・・・・・・原液回
収管、８，９，１０・曲り句しブ、３４・・・・・・中
空糸状濾過膜。FIG. 1 is a flowchart of an embodiment of the present invention, and FIG. 2 is a partial sectional view of a microfilter used in the present invention. 1... Filtrate tank, 2... Stock solution tank, 3'
...Microfilter, 4...Stock solution supply pipe, 6...Filtrate pipe, 7...Stock solution collection pipe, 8, 9, 10・Curved phrase Shibu, 34...Hollow fiber filtration membrane.
Claims (1)
おいて、 濾過済液を貯溜するための濾過液槽と、該濾過液槽から
オーバーフローする薬液をも受容するように配設された
原液槽と、 該原液を濾過するためのフィルタと、 上記原液槽とフィルタのインポートとの間に配設した原
液供給管と、 上記フィルタの原液用アウトポートと上記原液槽との間
に配設した原液回収管と、 上記フィルタの濾過液相アウトポートと濾過液槽との間
に配設した濾過液管と、 少なくとも上記原液回収管に設けられた流量調節用のバ
ルブと、 からなり、 原液中の微粒子量に応じて、上記バルブを調節すること
により、原液の一部を原液槽へ回収して循環濾過し得る
ように設けてなる薬液用濾過装置。 ２ 薬液がエツチング用薬品であり、濾過液槽がエツチ
ング用浸漬槽として用いられてなる前記゛登録請求の範
囲第１項記載の薬液用濾過装置。 ３ フィルタが、モジュールケース内に中空糸状濾過膜
の集束体を内蔵してなる前記登録請求の範囲第１項記載
の濾過装置。[Scope of Claim for Utility Model Registration] 1. A filtration device for chemical liquids for removing particulates from chemical liquids, which includes a filtrate tank for storing the filtered liquid, and a filtrate tank for storing the chemical liquid overflowing from the filtrate tank. A stock solution tank disposed in the stock solution tank, a filter for filtering the stock solution, a stock solution supply pipe arranged between the stock solution tank and the filter import, and a stock solution out port of the filter and the stock solution tank. a filtrate pipe arranged between the filtrate phase out port of the filter and the filtrate tank; and a flow rate adjustment valve provided at least in the filtrate collection pipe. A filtration device for a chemical liquid, comprising: A filtration device for a chemical solution, which is arranged so that a part of the stock solution can be collected into a tank for circulation filtration by adjusting the valve according to the amount of particulates in the stock solution. 2. The chemical liquid filtration device according to claim 1, wherein the chemical liquid is an etching chemical and the filtrate tank is used as an etching immersion tank. 3. The filtration device according to claim 1, wherein the filter includes a bundle of hollow fiber filtration membranes built into a module case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12843783U JPS6039302U (en) | 1983-08-22 | 1983-08-22 | Filtration device for chemical liquids |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12843783U JPS6039302U (en) | 1983-08-22 | 1983-08-22 | Filtration device for chemical liquids |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6039302U true JPS6039302U (en) | 1985-03-19 |
Family
ID=30291366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12843783U Pending JPS6039302U (en) | 1983-08-22 | 1983-08-22 | Filtration device for chemical liquids |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6039302U (en) |
-
1983
- 1983-08-22 JP JP12843783U patent/JPS6039302U/en active Pending
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