JPS6037833Y2 - イオン発生装置 - Google Patents
イオン発生装置Info
- Publication number
- JPS6037833Y2 JPS6037833Y2 JP1976082418U JP8241876U JPS6037833Y2 JP S6037833 Y2 JPS6037833 Y2 JP S6037833Y2 JP 1976082418 U JP1976082418 U JP 1976082418U JP 8241876 U JP8241876 U JP 8241876U JP S6037833 Y2 JPS6037833 Y2 JP S6037833Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- coil
- axial magnetic
- ion generator
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976082418U JPS6037833Y2 (ja) | 1976-06-22 | 1976-06-22 | イオン発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976082418U JPS6037833Y2 (ja) | 1976-06-22 | 1976-06-22 | イオン発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53300U JPS53300U (de) | 1978-01-05 |
JPS6037833Y2 true JPS6037833Y2 (ja) | 1985-11-11 |
Family
ID=28562923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976082418U Expired JPS6037833Y2 (ja) | 1976-06-22 | 1976-06-22 | イオン発生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6037833Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022244149A1 (ja) * | 2021-05-19 | 2022-11-24 | 株式会社日立ハイテク | イオンミリング装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4120238Y1 (de) * | 1964-02-26 | 1966-09-24 |
-
1976
- 1976-06-22 JP JP1976082418U patent/JPS6037833Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4120238Y1 (de) * | 1964-02-26 | 1966-09-24 |
Also Published As
Publication number | Publication date |
---|---|
JPS53300U (de) | 1978-01-05 |
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