JPS6037833Y2 - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS6037833Y2
JPS6037833Y2 JP1976082418U JP8241876U JPS6037833Y2 JP S6037833 Y2 JPS6037833 Y2 JP S6037833Y2 JP 1976082418 U JP1976082418 U JP 1976082418U JP 8241876 U JP8241876 U JP 8241876U JP S6037833 Y2 JPS6037833 Y2 JP S6037833Y2
Authority
JP
Japan
Prior art keywords
magnetic field
coil
axial magnetic
ion generator
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976082418U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53300U (de
Inventor
俊昭 木ノ山
康次 林
Original Assignee
日新電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新電機株式会社 filed Critical 日新電機株式会社
Priority to JP1976082418U priority Critical patent/JPS6037833Y2/ja
Publication of JPS53300U publication Critical patent/JPS53300U/ja
Application granted granted Critical
Publication of JPS6037833Y2 publication Critical patent/JPS6037833Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1976082418U 1976-06-22 1976-06-22 イオン発生装置 Expired JPS6037833Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976082418U JPS6037833Y2 (ja) 1976-06-22 1976-06-22 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976082418U JPS6037833Y2 (ja) 1976-06-22 1976-06-22 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS53300U JPS53300U (de) 1978-01-05
JPS6037833Y2 true JPS6037833Y2 (ja) 1985-11-11

Family

ID=28562923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976082418U Expired JPS6037833Y2 (ja) 1976-06-22 1976-06-22 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS6037833Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022244149A1 (ja) * 2021-05-19 2022-11-24 株式会社日立ハイテク イオンミリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4120238Y1 (de) * 1964-02-26 1966-09-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4120238Y1 (de) * 1964-02-26 1966-09-24

Also Published As

Publication number Publication date
JPS53300U (de) 1978-01-05

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