JPS6037183Y2 - Laser energy superposition device - Google Patents

Description

[Detailed explanation of the idea] [Technical field of invention] This invention relates to a laser energy superimposition device.

[Technical background of the invention and its problems]

Conventionally, one laser beam emitted from one laser device is divided into a plurality of parts using a half mirror or a special prism.

However, the two laser beams emitted from the two laser devices are not divided into three.

In addition, there may be a condition in which the three laser beams must be incident on the processing section or the incident section at the same angle, instead of simply separating the laser beams.

[Purpose of invention]

This invention provides a device that allows two laser beams to be incident on a target location at approximately the same irradiation angle without making the beam diameter larger than the original beam diameter when emitted.

[Summary of the idea] Three roof-shaped total internal reflection optical systems were installed in parallel at the same position, and the two emitted laser beams were placed in the center so that they were incident non-coaxially from the tops of the optical systems on both sides. This makes it possible to set the irradiation angle of the spectral laser beam emitted from the optical system to the same level or less than that of the other two separated laser beams.

[Example of idea]

Before explaining one embodiment of this invention, the configuration up to the embodiment will be explained.

In Figure 1, 1 and 1' are separate laser oscillators (
These are laser beams emitted from a laser beam (not shown) and traveling parallel to each other.

2 and 2' are mirrors with a reflectance of 33% that are placed on the optical paths of the respective laser beams with their reflective surfaces facing each other at an angle of 45 degrees, and are placed on the optical paths of the transmitted laser beams 3 and 3'. Condensing lenses 4 and 5 are provided, and the light enters processing points A and B of the workpiece 6, respectively.

Additionally, total reflection mirrors 7 and 7' are provided between the mirrors 2 and 2'.
The reflected beams 8 and 8' from mirrors 2 and 2' are processed at points A and B.
It is provided so as to proceed to a processing point C between the two.

Further, condenser lenses 10a and 10b are provided on the optical path of the reflected light 9.9' of the total reflection mirror 7.7'.

In the above configuration, the reflected lights 9°9' travel at an angle θ formed by their optical axes.

There is no particular problem if the machining point C is flat as shown in Fig. 1, but as shown in Fig. 2, another object 12 with a microhole 11 is placed on the workpiece 6, and the machining point C is When performing irradiation processing through the hole 11, a portion of the focused reflected light beams 9 and 9' is blocked by the upper edge portion of the object 12, and the processing point C
It is not possible to direct the total luminous flux to .

Moreover, what is shown in FIG. 3a is an example studied to make θ in the above example zero.

That is, in this example, there is an internal angle of 45° between mirrors 2 and 2'.
A roof-shaped total reflection mirror 13 is provided, and the beams 8 and 8' reflected by the mirrors 2 and 2' are deflected into adjacent light beams as shown in the figure.

Note that a condenser lens 14 is provided on the above-mentioned contacting light beams to transmit and condense the light beams.

In this example, the reflected lights 8, 8' are parallel to each other and the reflected lights 14.
14', so θ becomes zero, but one of the beam widths becomes twice the original beam diameter d, and as shown in Fig. Part of it is blocked by the edge of the hole 11.

Based on the above-mentioned slow speed, an embodiment of this invention shown in FIG. 5 will be described below.

In Figure 5, 15, 16 and 17 are almost identical 9s.
The first with an apex angle of 0 degrees. The second and third roof-shaped total reflection mirrors are arranged in parallel at a predetermined interval with their apex positions on the same straight line.

Total reflection mirrors 15 and 16 on both sides have their tops directed toward laser beams 18 and 18' emitted from separate laser oscillators and traveling parallel to each other, and their respective luminous fluxes have an area ratio of 2/3:1/ The light beam is divided into three parts, each of which is provided at a position where the 1/3 side is reflected toward the third total reflection mirror 17 placed in between.

In the above configuration, the luminous flux reflected by the third total reflection mirror 17 becomes a luminous flux 20 in which 1/3 of the luminous fluxes 19 and 19' form an ellipse with the string portions together.

This light beam 20 has the same energy as the reflected light 21.22 of one of the first and second total reflection mirrors 15.16, and also has the same length and breadth as the laser beam 18.22.
18' diameter d or less.

Therefore, in addition to the fact that θ is zero, if this luminous flux 20 is focused and irradiated, the entire luminous flux can be guided to the processing point C without being partially blocked by the edge part of the microhole 11 as in the above example. become.

[Effect of idea]

Since the two laser beams are divided into three equal parts with equal energy without energy loss without making the beam diameter wider than the original, the three divided laser beams can be guided into a narrow incident area under the same conditions, and the entire device This contributed to simplifying the configuration.

[Brief explanation of the drawing]

FIGS. 1 to 4 are schematic diagrams showing an experimental apparatus leading up to this invention, and FIG. 5 is a diagram showing the main part configuration of an embodiment of this invention. 15, 16. 17... Roof-shaped total reflection mirror 1B, 18'... Laser light.

Claims (2)

[Scope of utility model registration request] (1) Two laser oscillation devices, a means for making the laser beams emitted from these oscillation devices parallel to each other, and symmetrical positions on the optical path of the parallel laser beams with the tops in the incident direction. The first and second roof-shaped total internal reflection optical systems are placed on the same axis and deflect their respective light beams in opposite directions. 1. A laser energy superimposition device comprising: a third roof-shaped total internal reflection optical system provided at the top of the roof; (2) First. The second roof-shaped total internal reflection optical system has a light beam incident on the third roof-shaped total internal reflection optical system by 173% of the original light beam.
The laser energy superimposition device according to claim 1, wherein the laser energy superimposition device is arranged at a position where: